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1. 发明申请

US20100319195A1 PIEZOELECTRIC INKJET PRINTHEAD AND METHOD OF MANUFACTURING THE SAME 失效
标题翻译：压电喷墨印刷机及其制造方法
公开(公告)号：US20100319195A1
公开(公告)日：2010-12-23
申请号：US12852613
申请日：2010-08-09
申请人： Jong-beom Kim , Jae-chang Lee
发明人： Jong-beom Kim , Jae-chang Lee
IPC分类号： B23P17/00
CPC分类号： B41J2/1628 , B41J2/14233 , B41J2/161 , B41J2/1631 , B41J2/1642 , B41J2/1646 , Y10T29/49401
摘要： Provided are a piezoelectric inkjet printhead and a method of manufacturing the same. The piezoelectric inkjet printhead includes first and second single-crystalline silicon substrates. An ink flow path is disposed in a first surface of the first substrate. The ink flow path includes an ink introduction port, a manifold for supplying ink, a plurality of pressure chambers filled with ink to be ejected, a plurality of restrictors for connecting the manifold with the plurality of pressure chambers, respectively, and a plurality of nozzles for ejecting ink. The second substrate is bonded to the first substrate to thereby complete the ink flow path. A plurality of piezoelectric actuators are disposed on a second surface of the first substrate to correspond to each of the pressure chambers and provide drivability required for ejecting ink to the respective pressure chambers. In this construction, aligning the first and second substrates is unnecessary, so that the manufacturing process can be simplified, the manufacturing cost can be reduced, and ink ejecting performance can be improved.
摘要翻译：提供一种压电喷墨打印头及其制造方法。压电喷墨打印头包括第一和第二单晶硅衬底。墨流路设置在第一基板的第一表面中。墨水流路包括墨水引入口，用于供应墨水的歧管，填充有待喷射墨水的多个压力室，分别用于将歧管与多个压力室连接的多个限制器，以及多个喷嘴用于喷墨。第二基板结合到第一基板，从而完成油墨流动路径。多个压电致动器设置在第一基板的第二表面上以对应于每个压力室，并提供将油墨喷射到各个压力室所需的驱动能力。在这种结构中，不需要对准第一和第二基板，从而可以简化制造工艺，可以降低制造成本，并且可以提高喷墨性能。

2. 发明申请

US20090102895A1 PIEZOELECTRIC INKJET PRINTHEAD AND METHOD OF MANUFACTURING THE SAME 失效
标题翻译：压电喷墨印刷机及其制造方法
公开(公告)号：US20090102895A1
公开(公告)日：2009-04-23
申请号：US12038170
申请日：2008-02-27
申请人： Jong-beom Kim , Jae-chang Lee
发明人： Jong-beom Kim , Jae-chang Lee
IPC分类号： B41J2/045 , H01L21/00
CPC分类号： B41J2/1628 , B41J2/14233 , B41J2/161 , B41J2/1631 , B41J2/1642 , B41J2/1646 , Y10T29/49401
摘要： Provided are a piezoelectric inkjet printhead and a method of manufacturing the same. The piezoelectric inkjet printhead includes first and second single-crystalline silicon substrates. An ink flow path is disposed in a first surface of the first substrate. The ink flow path includes an ink introduction port, a manifold for supplying ink, a plurality of pressure chambers filled with ink to be ejected, a plurality of restrictors for connecting the manifold with the plurality of pressure chambers, respectively, and a plurality of nozzles for ejecting ink. The second substrate is bonded to the first substrate to thereby complete the ink flow path. A plurality of piezoelectric actuators are disposed on a second surface of the first substrate to correspond to each of the pressure chambers and provide drivability required for ejecting ink to the respective pressure chambers. In this construction, aligning the first and second substrates is unnecessary, so that the manufacturing process can be simplified, the manufacturing cost can be reduced, and ink ejecting performance can be improved.
摘要翻译：提供一种压电喷墨打印头及其制造方法。压电喷墨打印头包括第一和第二单晶硅衬底。墨流路设置在第一基板的第一表面中。墨水流路包括墨水引入口，用于供应墨水的歧管，填充有待喷射墨水的多个压力室，分别用于将歧管与多个压力室连接的多个限制器，以及多个喷嘴用于喷墨。第二基板结合到第一基板，从而完成油墨流动路径。多个压电致动器设置在第一基板的第二表面上以对应于每个压力室，并提供将油墨喷射到各个压力室所需的驱动能力。在这种结构中，不需要对准第一和第二基板，从而可以简化制造工艺，可以降低制造成本，并且可以提高喷墨性能。

3. 发明授权

US07445314B2 Piezoelectric ink-jet printhead and method of manufacturing a nozzle plate of the same 失效
标题翻译：压电式喷墨打印头及其喷嘴板的制造方法
公开(公告)号：US07445314B2
公开(公告)日：2008-11-04
申请号：US11064834
申请日：2005-02-25
申请人： Jae-chang Lee , Jung-min Oh , Jae-woo Chung , Jong-beom Kim , Seung-mo Lim
发明人： Jae-chang Lee , Jung-min Oh , Jae-woo Chung , Jong-beom Kim , Seung-mo Lim
IPC分类号： B41J2/135 , B41J29/38 , B41J2/045
CPC分类号： B41J2/161 , B41J2/14137 , B41J2/14233 , B41J2/162 , B41J2/1623 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1642 , B41J2/1643 , B41J2/1646
摘要： In a piezoelectric ink-jet printhead, and a method of manufacturing a nozzle plate, the piezoelectric ink-jet printhead includes a flow path plate having an ink flow path including pressure chambers to be filled with ink to be ejected, a piezoelectric actuator formed on an upper surface of the flow path plate and for supplying a driving force for ink ejection to the pressure chambers, and a nozzle plate bonded to a lower surface of the flow path plate including nozzles for ejecting ink from the pressure chambers bored through the nozzle plate. The printhead may further include a heater formed on a lower surface of the nozzle plate for heating ink in the ink flow path and/or a temperature detector formed on a lower surface of the nozzle plate or on an upper surface of the flow path plate.
摘要翻译：在压电喷墨打印头和喷嘴板的制造方法中，压电喷墨打印头包括流路板，该流路板具有墨流路，该墨流路包括填充有待喷射的墨的压力室，形成在流路板的上表面，并且用于向压力室供给用于喷墨的驱动力;以及喷嘴板，其结合到流路板的下表面，该喷嘴板包括用于从通过喷嘴板钻出的压力室喷射油墨的喷嘴。打印头还可以包括形成在喷嘴板的下表面上的加热器，用于加热油墨流路中的油墨和/或形成在喷嘴板的下表面上或在流路板的上表面上形成的温度检测器。

4. 发明授权

US08037605B2 Piezoelectric inkjet printhead and method of manufacturing the same 失效
标题翻译：压电喷墨打印头及其制造方法
公开(公告)号：US08037605B2
公开(公告)日：2011-10-18
申请号：US12852613
申请日：2010-08-09
申请人： Jong-beom Kim , Jae-chang Lee
发明人： Jong-beom Kim , Jae-chang Lee
IPC分类号： B23P17/00 , B41J2/17
CPC分类号： B41J2/1628 , B41J2/14233 , B41J2/161 , B41J2/1631 , B41J2/1642 , B41J2/1646 , Y10T29/49401
摘要： Provided are a piezoelectric inkjet printhead and a method of manufacturing the same. The piezoelectric inkjet printhead includes first and second single-crystalline silicon substrates. An ink flow path is disposed in a first surface of the first substrate. The ink flow path includes an ink introduction port, a manifold for supplying ink, a plurality of pressure chambers filled with ink to be ejected, a plurality of restrictors for connecting the manifold with the plurality of pressure chambers, respectively, and a plurality of nozzles for ejecting ink. The second substrate is bonded to the first substrate to thereby complete the ink flow path. A plurality of piezoelectric actuators are disposed on a second surface of the first substrate to correspond to each of the pressure chambers and provide drivability required for ejecting ink to the respective pressure chambers. In this construction, aligning the first and second substrates is unnecessary, so that the manufacturing process can be simplified, the manufacturing cost can be reduced, and ink ejecting performance can be improved.
摘要翻译：提供一种压电喷墨打印头及其制造方法。压电喷墨打印头包括第一和第二单晶硅衬底。墨流路设置在第一基板的第一表面中。墨水流路包括墨水引入口，用于供应墨水的歧管，填充有待喷射墨水的多个压力室，分别用于将歧管与多个压力室连接的多个限制器，以及多个喷嘴用于喷墨。第二基板结合到第一基板，从而完成油墨流动路径。多个压电致动器设置在第一基板的第二表面上以对应于每个压力室，并提供将油墨喷射到各个压力室所需的驱动能力。在这种结构中，不需要对准第一和第二基板，从而可以简化制造工艺，可以降低制造成本，并且可以提高喷墨性能。

5. 发明申请

US20050190232A1 Piezoelectric ink-jet printhead and method of manufacturing a nozzle plate of the same 失效
标题翻译：压电式喷墨打印头及其喷嘴板的制造方法
公开(公告)号：US20050190232A1
公开(公告)日：2005-09-01
申请号：US11064834
申请日：2005-02-25
申请人： Jae-chang Lee , Jung-min Oh , Jae-woo Chung , Jong-beom Kim , Seung-mo Lim
发明人： Jae-chang Lee , Jung-min Oh , Jae-woo Chung , Jong-beom Kim , Seung-mo Lim
IPC分类号： B41J2/045 , B41J2/055 , B41J2/135 , B41J2/14 , B41J2/16
CPC分类号： B41J2/161 , B41J2/14137 , B41J2/14233 , B41J2/162 , B41J2/1623 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1642 , B41J2/1643 , B41J2/1646
摘要： In a piezoelectric ink-jet printhead, and a method of manufacturing a nozzle plate, the piezoelectric ink-jet printhead includes a flow path plate having an ink flow path including pressure chambers to be filled with ink to be ejected, a piezoelectric actuator formed on an upper surface of the flow path plate and for supplying a driving force for ink ejection to the pressure chambers, and a nozzle plate bonded to a lower surface of the flow path plate including nozzles for ejecting ink from the pressure chambers bored through the nozzle plate. The printhead may further include a heater formed on a lower surface of the nozzle plate for heating ink in the ink flow path and/or a temperature detector formed on a lower surface of the nozzle plate or on an upper surface of the flow path plate.
摘要翻译：在压电喷墨打印头和喷嘴板的制造方法中，压电喷墨打印头包括流路板，该流路板具有墨流路，该墨流路包括填充有要喷射的墨的压力室，形成在流路板的上表面，并且用于向压力室供给用于喷墨的驱动力;以及喷嘴板，其结合到流路板的下表面，该喷嘴板包括用于从通过喷嘴板钻出的压力室喷射油墨的喷嘴。打印头还可以包括形成在喷嘴板的下表面上的加热器，用于加热油墨流路中的油墨和/或形成在喷嘴板的下表面上或在流路板的上表面上形成的温度检测器。

6. 发明授权

US07789496B2 Piezoelectric inkjet printhead and method of manufacturing the same 失效
标题翻译：压电喷墨打印头及其制造方法
公开(公告)号：US07789496B2
公开(公告)日：2010-09-07
申请号：US12038170
申请日：2008-02-27
申请人： Jong-beom Kim , Jae-chang Lee
发明人： Jong-beom Kim , Jae-chang Lee
IPC分类号： B41J2/045 , B41J2/05
CPC分类号： B41J2/1628 , B41J2/14233 , B41J2/161 , B41J2/1631 , B41J2/1642 , B41J2/1646 , Y10T29/49401
摘要： Provided are a piezoelectric inkjet printhead and a method of manufacturing the same. The piezoelectric inkjet printhead includes first and second single-crystalline silicon substrates. An ink flow path is disposed in a first surface of the first substrate. The ink flow path includes an ink introduction port, a manifold for supplying ink, a plurality of pressure chambers filled with ink to be ejected, a plurality of restrictors for connecting the manifold with the plurality of pressure chambers, respectively, and a plurality of nozzles for ejecting ink. The second substrate is bonded to the first substrate to thereby complete the ink flow path. A plurality of piezoelectric actuators are disposed on a second surface of the first substrate to correspond to each of the pressure chambers and provide drivability required for ejecting ink to the respective pressure chambers. In this construction, aligning the first and second substrates is unnecessary, so that the manufacturing process can be simplified, the manufacturing cost can be reduced, and ink ejecting performance can be improved.
摘要翻译：提供一种压电喷墨打印头及其制造方法。压电喷墨打印头包括第一和第二单晶硅衬底。墨流路设置在第一基板的第一表面中。墨水流路包括墨水引入口，用于供应墨水的歧管，填充有待喷射墨水的多个压力室，分别用于将歧管与多个压力室连接的多个限制器，以及多个喷嘴用于喷墨。第二基板结合到第一基板，从而完成油墨流动路径。多个压电致动器设置在第一基板的第二表面上以对应于每个压力室，并提供将油墨喷射到各个压力室所需的驱动能力。在这种结构中，不需要对准第一和第二基板，从而可以简化制造工艺，可以降低制造成本，并且可以提高喷墨性能。

7. 发明授权

US07926910B2 Nozzle plate for inkjet head and method of manufacturing the nozzle plate 有权
标题翻译：用于喷墨头的喷嘴板和制造喷嘴板的方法
公开(公告)号：US07926910B2
公开(公告)日：2011-04-19
申请号：US11764844
申请日：2007-06-19
申请人： Tae-woon Cha , Young-nam Kwon , Jae-chang Lee
发明人： Tae-woon Cha , Young-nam Kwon , Jae-chang Lee
IPC分类号： B41J2/135
CPC分类号： B41J2/1606 , B41J2/162 , B41J2/164
摘要： A nozzle plate for an inkjet head and a method of manufacturing the nozzle plate includes a silicon substrate having a nozzle, a thermally oxidized silicon layer formed on an outer surface of the silicon substrate and an inner wall of the nozzle, an adhesion layer deposited on the thermally oxidized silicon layer formed on the outer surface of the silicon substrate and formed of silicon oxide, and an ink-repellent coating layer deposited on the adhesion layer.
摘要翻译：用于喷墨头的喷嘴板和喷嘴板的制造方法包括具有喷嘴的硅基板，形成在硅基板的外表面上的热氧化硅层和喷嘴的内壁，粘合层沉积在形成在硅衬底的外表面上并由氧化硅形成的热氧化硅层和沉积在粘合层上的拒墨涂层。

8. 发明授权

US07703895B2 Piezoelectric inkjet printhead and method of manufacturing the same 失效
标题翻译：压电喷墨打印头及其制造方法
公开(公告)号：US07703895B2
公开(公告)日：2010-04-27
申请号：US11333540
申请日：2006-01-18
申请人： Jae-chang Lee , Jae-woo Chung , Sung-gyu Kang
发明人： Jae-chang Lee , Jae-woo Chung , Sung-gyu Kang
IPC分类号： B41J2/045
CPC分类号： B41J2/161 , B41J2/14233 , B41J2/1623 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1637 , B41J2002/14306 , B41J2002/14411 , B41J2002/14419
摘要： A piezoelectric inkjet printhead including an upper substrate, having an ink inlet, a manifold connected with the ink inlet, and a plurality of pressure chambers arranged along at least one side of the manifold, wherein the ink inlet passes through the upper substrate, and the manifold and the pressure chambers are formed in a lower surface of the upper substrate, a lower substrate disposed directly adjacent the upper substrate, the lower substrate having a plurality of restrictors each connecting the manifold with one end of each of the pressure chambers, and a plurality of nozzles each being formed in a position of the lower substrate that corresponds to the other end of each of the pressure chambers to vertically pass through the lower substrate, wherein the plurality of restrictors are formed in an upper surface of the lower substrate, and a plurality of piezoelectric actuators.
摘要翻译：一种压电喷墨打印头，包括具有墨入口，与墨入口连接的歧管的上基板和沿着歧管的至少一侧布置的多个压力室，其中墨入口穿过上基板，歧管和压力室形成在上基板的下表面中，下基板直接邻近上基板设置，下基板具有多个限制器，每个限制器将歧管与每个压力室的一端连接，并且多个喷嘴各自形成在下基板的对应于每个压力室的另一端的位置以垂直地穿过下基板，其中多个限制器形成在下基板的上表面中，以及多个压电致动器。

9. 发明申请

US20070195134A1 Piezoelectric actuator inkjet head and method of forming the same 失效
标题翻译：压电致动器喷墨头及其形成方法
公开(公告)号：US20070195134A1
公开(公告)日：2007-08-23
申请号：US11581333
申请日：2006-10-17
申请人： Tae-kyung Lee , Jae-woo Chung , Kyo-yeol Lee , Hwa-sun Lee , Seung-mo Lim , Jae-chang Lee
发明人： Tae-kyung Lee , Jae-woo Chung , Kyo-yeol Lee , Hwa-sun Lee , Seung-mo Lim , Jae-chang Lee
IPC分类号： B41J2/045
CPC分类号： B41J2/14233 , B41J2002/14491 , Y10T29/42 , Y10T29/49002 , Y10T29/49005 , Y10T29/4908
摘要： A piezoelectric actuator of an inkjet head and a method of forming the piezoelectric actuator. The piezoelectric actuator is formed on a vibration plate to provide a driving force to each of a plurality of pressure chambers. The piezoelectric actuator includes a lower electrode formed on the vibration plate, a piezoelectric layer formed on the lower electrode at a position corresponding to each of the pressure chambers, a supporting pad formed on the lower electrode, the supporting pad contacting one end of the piezoelectric layer and extending away from the one end of the piezoelectric layer, and an upper electrode extending from a top surface of the piezoelectric layer to a top surface of the supporting pad. The upper electrode is bonded to a driving circuit above the supporting pad to receive a voltage from the driving circuit. The piezoelectric layer may have substantially the same length as the pressure chamber. The supporting pad may be formed of a photosensitive polymer and may have substantially the same height as the piezoelectric layer. The upper electrode may include a first portion formed on the piezoelectric layer and a second portion formed on the supporting pad, and the second portion may be wider than the first portion.
摘要翻译：喷墨头的压电致动器和形成压电致动器的方法。压电致动器形成在振动板上以向多个压力室中的每一个提供驱动力。压电致动器包括形成在振动板上的下电极，形成在下电极上的与每个压力室对应的位置处的压电层，形成在下电极上的支撑焊盘，支撑焊盘接触压电体的一端并且离开压电层的一端延伸，以及从压电层的顶表面延伸到支撑衬垫的顶表面的上电极。上电极接合到支撑焊盘上方的驱动电路，以接收来自驱动电路的电压。压电层可以具有与压力室大致相同的长度。支撑垫可以由光敏聚合物形成，并且可以具有与压电层基本相同的高度。上部电极可以包括形成在压电层上的第一部分和形成在支撑垫上的第二部分，并且第二部分可以比第一部分更宽。

10. 发明申请

US20070134928A1 Silicon wet etching method using parylene mask and method of manufacturing nozzle plate of inkjet printhead using the same 审中-公开
标题翻译：使用聚对二苯乙烯掩模的硅湿式蚀刻方法和使用其制造喷墨打印头的喷嘴板的方法
公开(公告)号：US20070134928A1
公开(公告)日：2007-06-14
申请号：US11505416
申请日：2006-08-17
申请人： Jae-chang Lee , Chang-seung Lee , Jae-woo Chung , Duck-su Kim , Kyo-yeol Lee
发明人： Jae-chang Lee , Chang-seung Lee , Jae-woo Chung , Duck-su Kim , Kyo-yeol Lee
IPC分类号： H01L21/302
CPC分类号： B41J2/161 , B41J2/1628 , B41J2/1629 , B41J2002/14411
摘要： A silicon wet etching method to form at least two elements having different shapes in a silicon substrate using at least two wet etching processes includes forming a first etch mask made of parylene on a surface of the silicon substrate, forming a first element in the substrate by wet etching the silicon substrate for a first time using the first etch mask, forming a second etch mask made of a silicon oxide layer on the surface of the silicon substrate, and forming a second element by wet etching the silicon substrate for a second time using the second etch mask.
摘要翻译：使用至少两个湿蚀刻工艺在硅衬底中形成具有不同形状的至少两种元件的硅湿式蚀刻方法包括在硅衬底的表面上形成由聚对二甲苯制成的第一蚀刻掩模，在衬底中形成第一元件，通过使用第一蚀刻掩模第一次湿蚀刻硅衬底，在硅衬底的表面上形成由氧化硅层制成的第二蚀刻掩模，并且通过湿法蚀刻硅衬底第二次来形成第二元件，第二次使用第二蚀刻掩模。

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