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    • 3. 发明申请
    • Method for fabricating fine pattern in semiconductor device
    • 在半导体器件中制造精细图案的方法
    • US20080081479A1
    • 2008-04-03
    • US11824362
    • 2007-06-29
    • Jung-Woo Park
    • Jung-Woo Park
    • H01L21/311
    • H01L21/31144H01L21/0337H01L21/32139
    • A method for fabricating a fine pattern in a semiconductor device includes forming a first photoresist pattern over an etch target layer, forming a first hard mask layer over a substrate structure, planarizing the first hard mask layer to form a first hard mask pattern and expose the first photoresist pattern, removing the first photoresist pattern, forming a second photoresist pattern enclosing the first hard mask pattern, forming a second hard mask layer over the substrate structure, planarizing the second hard mask layer to form a second hard mask pattern and expose the first hard mask pattern, removing the second photoresist pattern, and etching the etch target layer using the first hard mask pattern and the second hard mask pattern.
    • 在半导体器件中制造精细图案的方法包括在蚀刻目标层上形成第一光致抗蚀剂图案,在衬底结构上形成第一硬掩模层,平面化第一硬掩模层以形成第一硬掩模图案,并将 第一光致抗蚀剂图案,去除第一光致抗蚀剂图案,形成包围第一硬掩模图案的第二光致抗蚀剂图案,在衬底结构上方形成第二硬掩模层,平坦化第二硬掩模层以形成第二硬掩模图案, 硬掩模图案,去除第二光致抗蚀剂图案,以及使用第一硬掩模图案和第二硬掩模图案蚀刻蚀刻目标层。
    • 4. 发明授权
    • Semiconductor memory device having capacitor and method of forming the same
    • 具有电容器的半导体存储器件及其形成方法
    • US07326587B2
    • 2008-02-05
    • US11153746
    • 2005-06-14
    • Jung-Woo ParkJung-Min Ha
    • Jung-Woo ParkJung-Min Ha
    • H01L21/00
    • H01L27/1087H01L28/84H01L31/0236H01L31/02363H01L31/0745Y02E10/50
    • A semiconductor memory device having a capacitor is disclosed. The capacitor includes a bottom capacitor surface formed of a silicon-germanium crystalline layer or a dual layer in which a silicon-germanium crystalline layer covers a silicon crystalline layer. The bottom capacitor surface is uneven and is conventionally formed by an epitaxial method. The silicon germanium crystalline layer is approximately 5 to 50 percent germanium content by weight. The method of fabricating the semiconductor memory device comprises: selectively exposing the surface of a crystalline silicon substrate at the region where the capacitor bottom electrode is formed; supplying a source gas to grow a silicon germanium crystalline layer at the surface of the selectively exposed silicon substrate; stacking a dielectric layer over the silicon germanium crystalline layer; and stacking a conductive layer over the dielectric layer to form a capacitor top electrode. After forming the silicon germanium crystalline layer to a predefined thickness, a silicon crystalline layer can be further grown at the silicon germanium crystalline layer. After forming the silicon germanium crystalline layer and before forming the dielectric layer, annealing can be performed for a predefined time.
    • 公开了一种具有电容器的半导体存储器件。 电容器包括由硅 - 锗晶体层形成的底部电容器表面或其中硅 - 锗晶体层覆盖硅晶体层的双层。 底部电容器表面是不均匀的,并且通常通过外延法形成。 硅锗晶体层的锗含量约为5-50%。 制造半导体存储器件的方法包括:在形成电容器底部电极的区域选择性地暴露晶体硅衬底的表面; 供应源气体以在选择性暴露的硅衬底的表面上生长硅锗晶体层; 在硅锗晶体层上堆叠介电层; 并在该电介质层上层叠导电层以形成电容器顶部电极。 在将硅锗晶层形成预定厚度之后,可以在硅锗晶层进一步生长硅晶层。 在形成硅锗晶层之后,在形成电介质层之前,可以进行预定时间的退火。
    • 6. 发明申请
    • Semiconductor memory device having capacitor and method of forming the same
    • 具有电容器的半导体存储器件及其形成方法
    • US20050230732A1
    • 2005-10-20
    • US11153746
    • 2005-06-14
    • Jung-Woo ParkJung-Min Ha
    • Jung-Woo ParkJung-Min Ha
    • H01L27/108H01L21/02H01L21/8242H01L31/0236H01L31/0745H01L27/14
    • H01L27/1087H01L28/84H01L31/0236H01L31/02363H01L31/0745Y02E10/50
    • A semiconductor memory device having a capacitor is disclosed. The capacitor includes a bottom capacitor surface formed of a silicon-germanium crystalline layer or a dual layer in which a silicon-germanium crystalline layer covers a silicon crystalline layer. The bottom capacitor surface is uneven and is conventionally formed by an epitaxial method. The silicon germanium crystalline layer is approximately 5 to 50 percent germanium content by weight. The method of fabricating the semiconductor memory device comprises: selectively exposing the surface of a crystalline silicon substrate at the region where the capacitor bottom electrode is formed; supplying a source gas to grow a silicon germanium crystalline layer at the surface of the selectively exposed silicon substrate; stacking a dielectric layer over the silicon germanium crystalline layer; and stacking a conductive layer over the dielectric layer to form a capacitor top electrode. After forming the silicon germanium crystalline layer to a predefined thickness, a silicon crystalline layer can be further grown at the silicon germanium crystalline layer. After forming the silicon germanium crystalline layer and before forming the dielectric layer, annealing can be performed for a predefined time.
    • 公开了一种具有电容器的半导体存储器件。 电容器包括由硅 - 锗晶体层形成的底部电容器表面或其中硅 - 锗晶体层覆盖硅晶体层的双层。 底部电容器表面是不均匀的,并且通常通过外延法形成。 硅锗晶体层的锗含量约为5-50%。 制造半导体存储器件的方法包括:在形成电容器底部电极的区域选择性地暴露晶体硅衬底的表面; 供应源气体以在选择性暴露的硅衬底的表面上生长硅锗晶体层; 在硅锗晶体层上堆叠介电层; 并在该电介质层上层叠导电层以形成电容器顶部电极。 在将硅锗晶层形成预定厚度之后,可以在硅锗晶层进一步生长硅晶层。 在形成硅锗晶层之后,在形成电介质层之前,可以进行预定时间的退火。
    • 10. 发明申请
    • SEMICONDUCTOR DEVICE WITH VERTICAL CELLS AND FABRICATION METHOD THEREOF
    • 具有垂直电池的半导体器件及其制造方法
    • US20110156118A1
    • 2011-06-30
    • US12830654
    • 2010-07-06
    • Jung-Woo Park
    • Jung-Woo Park
    • H01L27/108H01L21/8242
    • H01L29/0649H01L27/0207H01L27/105H01L27/1052H01L27/10876H01L29/0657H01L29/0692H01L29/66666H01L29/7827
    • A method for fabricating a semiconductor substrate includes defining an active region by forming a device isolation layer over the substrate, forming a first trench dividing the active region into a first active region and a second active region, forming a buried bit line filling a portion of the first trench, forming a gap-filling layer gap-filling an upper portion of the first trench over the buried bit line, forming second trenches by etching the gap-filling layer and the device isolation layer in a direction crossing the buried bit line, and forming a first buried word line and a second buried word line filling the second trenches, wherein the first buried word line and the second buried word line are shaped around sidewalls of the first active region and the second active region, respectively.
    • 一种用于制造半导体衬底的方法,包括通过在衬底上形成器件隔离层来限定有源区,形成将有源区分成第一有源区和第二有源区的第一沟槽,形成填充部分 所述第一沟槽在所述掩埋位线上形成填充所述第一沟槽的上部的间隙填充层间隙,通过在与所述掩埋位线交叉的方向上蚀刻所述间隙填充层和所述器件隔离层来形成第二沟槽, 以及形成填充所述第二沟槽的第一掩埋字线和第二掩埋字线,其中所述第一掩埋字线和所述第二掩埋字线分别围绕所述第一有源区和所述第二有源区的侧壁成形。