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    • 5. 发明授权
    • Nanoscale switching devices with partially oxidized electrodes
    • 具有部分氧化电极的纳米开关器件
    • US09024285B2
    • 2015-05-05
    • US13636814
    • 2010-04-19
    • Jianhua YangGilberto RibeiroR. Stanley Williams
    • Jianhua YangGilberto RibeiroR. Stanley Williams
    • H01L47/00H01L45/00H01L27/24
    • H01L45/08H01L27/2463H01L45/1253H01L45/146Y10S438/90
    • A nanoscale switching device is provided. The device comprises: a first electrode of a nanoscale width; a second electrode of a nanoscale width; an active region disposed between the first and second electrodes, the active region having a non-conducting portion comprising an electronically semiconducting or nominally insulating and a weak ionic conductor switching material capable of carrying a species of dopants and transporting the dopants under an electric field and a source portion that acts as a source or sink for the dopants; and an oxide layer either formed on the first electrode, between the first electrode and the active region or formed on the second electrode, between the second electrode and the active region. A crossbar array comprising a plurality of the nanoscale switching devices is also provided. A process for making at least one nanoscale switching device is further provided.
    • 提供了纳米尺度的开关装置。 该装置包括:纳米级宽度的第一电极; 纳米级宽度的第二电极; 有源区域设置在第一和第二电极之间,有源区域具有非导电部分,其包括电子半导体或名义绝缘以及能够承载一种掺杂剂并在电场下传输掺杂剂的弱离子导体开关材料,以及 用作掺杂剂的源或汇的源部分; 以及形成在第一电极之间,第一电极和有源区之间或形成在第二电极上的第二电极和有源区之间的氧化物层。 还提供了包括多个纳米级切换装置的交叉开关阵列。 还提供了制造至少一个纳米级切换装置的方法。