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    • 10. 发明授权
    • Laser irradiation apparatus and method of fabricating organic light emitting display using the same
    • 激光照射装置及使用其制造有机发光显示器的方法
    • US07542063B2
    • 2009-06-02
    • US11020670
    • 2004-12-27
    • Jae-Ho LeeTae-Min KangSeong-Taek LeeJin-Soo Kim
    • Jae-Ho LeeTae-Min KangSeong-Taek LeeJin-Soo Kim
    • B41J2/47
    • H01L51/0013B23K26/066H01L51/0011H01L51/56
    • Provided are a laser irradiation apparatus and method of fabricating an organic light emitting display using the same. The laser irradiation apparatus includes a mask positioned below the laser generator, and the mask is patterned such that lengths of an upper portion and a lower portion of a mask pattern are patterned longer than a length of a middle portion of the mask pattern with respect to the scanning direction. The method of fabricating an organic light emitting display includes scanning a laser beam on a predetermined region of the donor substrate using the laser irradiation apparatus to form an organic layer pattern on the substrate. When the organic layer pattern is formed using a laser induced thermal imaging (LITI) method, the transfer may be carried out using a laser beam having low energy, laser beam efficiency may be enhanced, the organic layer may be less damaged, and the quality of the organic layer pattern to be transferred may also be enhanced.
    • 提供一种激光照射装置和使用其的有机发光显示器的制造方法。 激光照射装置包括位于激光发生器下方的掩模,并且掩模被图案化,使得掩模图案的上部和下部的长度被图案化为比掩模图案的中间部分的长度相对于 扫描方向。 制造有机发光显示器的方法包括使用激光照射装置在施主衬底的预定区域上扫描激光束,以在衬底上形成有机层图案。 当使用激光诱导热成像(LITI)方法形成有机层图案时,可以使用具有低能量的激光束进行转印,可以提高激光束效率,有机层可能损坏较小,并且质量 的有机层图案也可以被增强。