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    • 3. 发明授权
    • Laser irradiation apparatus and method of fabricating organic light emitting display using the same
    • 激光照射装置及使用其制造有机发光显示器的方法
    • US07542063B2
    • 2009-06-02
    • US11020670
    • 2004-12-27
    • Jae-Ho LeeTae-Min KangSeong-Taek LeeJin-Soo Kim
    • Jae-Ho LeeTae-Min KangSeong-Taek LeeJin-Soo Kim
    • B41J2/47
    • H01L51/0013B23K26/066H01L51/0011H01L51/56
    • Provided are a laser irradiation apparatus and method of fabricating an organic light emitting display using the same. The laser irradiation apparatus includes a mask positioned below the laser generator, and the mask is patterned such that lengths of an upper portion and a lower portion of a mask pattern are patterned longer than a length of a middle portion of the mask pattern with respect to the scanning direction. The method of fabricating an organic light emitting display includes scanning a laser beam on a predetermined region of the donor substrate using the laser irradiation apparatus to form an organic layer pattern on the substrate. When the organic layer pattern is formed using a laser induced thermal imaging (LITI) method, the transfer may be carried out using a laser beam having low energy, laser beam efficiency may be enhanced, the organic layer may be less damaged, and the quality of the organic layer pattern to be transferred may also be enhanced.
    • 提供一种激光照射装置和使用其的有机发光显示器的制造方法。 激光照射装置包括位于激光发生器下方的掩模,并且掩模被图案化,使得掩模图案的上部和下部的长度被图案化为比掩模图案的中间部分的长度相对于 扫描方向。 制造有机发光显示器的方法包括使用激光照射装置在施主衬底的预定区域上扫描激光束,以在衬底上形成有机层图案。 当使用激光诱导热成像(LITI)方法形成有机层图案时,可以使用具有低能量的激光束进行转印,可以提高激光束效率,有机层可能损坏较小,并且质量 的有机层图案也可以被增强。
    • 7. 发明授权
    • Laser irradiation device, patterning method and method of fabricating organic light emitting display (OLED) using the patterning method
    • 激光照射装置,图案化方法和使用图案化方法制造有机发光显示器(OLED)的方法
    • US07675003B2
    • 2010-03-09
    • US11286411
    • 2005-11-25
    • Jae-Ho LeeTae-Min KangSeong-Taek Lee
    • Jae-Ho LeeTae-Min KangSeong-Taek Lee
    • B23K26/06
    • H01L51/0009B23K26/073H01L51/0013H01L51/5012Y10T428/10
    • In a laser irradiation device, a patterning method and a method of fabricating an Organic Light Emitting Display (OLED) using the same. The laser irradiation device includes a light source, a mask, a projection lens, and a Fresnel lens formed at a predetermined portion of the mask to change an optical path. When an organic layer pattern is formed using the laser irradiation device, laser radiation is irradiated onto a region of an organic layer, which is to be cut, and the laser radiation is appropriately irradiated onto a region of the organic layer, which is to be separated from a donor substrate. The laser radiation irradiated onto an edge of the organic layer pattern has a laser energy density greater than that of the laser radiation irradiated onto other portions of the organic layer pattern. As a result, it is possible to form a uniform organic layer pattern and reduce damage of the organic layer.
    • 在激光照射装置,图案化方法和使用其的有机发光显示器(OLED)的制造方法中, 激光照射装置包括形成在掩模的预定部分处的光源,掩模,投影透镜和菲涅耳透镜,以改变光路。 当使用激光照射装置形成有机层图案时,将激光照射到要切割的有机层的区域上,并将激光辐射适当地照射到有机层的区域 与供体底物分离。 照射到有机层图案的边缘上的激光辐射的激光能量密度大于照射到有机层图案的其它部分上的激光辐射的激光能量密度。 结果,可以形成均匀的有机层图案并减少有机层的损伤。