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1. 发明授权

US06608848B2 Method and apparatus for wavelength calibration 失效
公开(公告)号：US06608848B2
公开(公告)日：2003-08-19
申请号：US09849600
申请日：2001-05-04
申请人： Jürgen Kleinschmidt , Uwe Stamm , Klaus Vogler , Peter Lokai
发明人： Jürgen Kleinschmidt , Uwe Stamm , Klaus Vogler , Peter Lokai
IPC分类号： H01S313
CPC分类号： H01S3/1392 , H01S3/225
摘要： A wavelength calibration system determines an absolute wavelength of a narrowed spectral emission band of an excimer or molecular laser system. The system includes a module including an element which optically interacts with a component of an output beam of the laser within the tunable range of the laser system around the narrowed band. An inter-level resonance is detected by monitoring changes in voltage within the module, or photo-absorption is detected by photodetecting equipment. The absolute wavelength of the narrowed band is precisely determinable when the optical transitions occur and are detected. When the system specifically includes an ArF-excimer laser chamber, the module is preferably a galvatron containing an element that photo-absorbs around 193 nm and the element is preferably a gas or vapor selected from the group consisting of arsenic, carbon, oxygen, iron, gaseous hydrocarbons, halogenized hydrocarbons, carbon-contaminated inert gases, germanium and platinum vapor. When the system specifically includes F2-laser chamber, the module is preferably a galvatron containing an element that photo-absorbs around 157 nm and the element is preferably a gas or vapor selected from the group consisting of selenium, bromine and silicon. The module is alternatively a purge chamber configurable for purging with a photo-absorbing gas.

2. 发明授权

US06272158B1 Method and apparatus for wavelength calibration 失效
标题翻译：用于波长校准的方法和装置
公开(公告)号：US06272158B1
公开(公告)日：2001-08-07
申请号：US09679592
申请日：2000-10-04
申请人： Jürgen Kleinschmidt , Uwe Stamm , Klaus Vogler , Peter Lokai
发明人： Jürgen Kleinschmidt , Uwe Stamm , Klaus Vogler , Peter Lokai
IPC分类号： H01S313
CPC分类号： H01S3/1392 , H01S3/225
摘要： A wavelength calibration system determines an absolute wavelength of a narrowed spectral emission band of an excimer or molecular laser system. The system includes a module including an element which optically interacts with a component of an output beam of the laser within the tunable range of the laser system around the narrowed band. An inter-level resonance is detected by monitoring changes in voltage within the module, or photo-absorption is detected by photodetecting equipment. The absolute wavelength of the narrowed band is precisely determinable when the optical transitions occur and are detected. When the system specifically includes an ArF-excimer laser chamber, the module is preferably a galvatron containing an element that photo-absorbs around 193 nm and the element is preferably a gas or vapor selected from the group consisting of arsenic, carbon, oxygen, iron, gaseous hydrocarbons, halogenized hydrocarbons, carbon-contaminated inert gases, germanium and platinum vapor. When the system specifically includes F2-laser chamber, the module is preferably a galvatron containing an element that photo-absorbs around 157 nm and the element is preferably a gas or vapor selected from the group consisting of selenium, bromine and silicon. The module is alternatively a purge chamber configurable for purging with a photo-absorbing gas.
摘要翻译：波长校准系统确定准分子或分子激光系统的窄谱分光发射带的绝对波长。该系统包括模块，该模块包括与激光系统的可变范围内的变窄带周围的激光输出光束的分量光学相互作用的元件。通过监测模块内的电压变化来检测层间谐振，或者通过光电检测设备检测光吸收。当发生光学转变并被检测时，窄带的绝对波长可以精确地确定。当该系统具体包括ArF-准分子激光室时，该模块优选地是含有吸光约193nm的元素的加合加速器，该元件优选为选自砷，碳，氧，铁，气态烃，卤化烃，碳污染的惰性气体，锗和铂蒸气。当该系统具体包括F2激光室时，该模块优选为含有吸收约157nm的元素的加合加速器，该元件优选为选自硒，溴和硅的气体或蒸汽。该模块可选地是可配置为用光吸收气体吹扫的净化室。

3. 发明授权

US6160832A Method and apparatus for wavelength calibration 失效
公开(公告)号：US6160832A
公开(公告)日：2000-12-12
申请号：US416344
申请日：1999-10-12
申请人： Jurgen Kleinschmidt , Uwe Stamm , Klaus Vogler , Peter Lokai
发明人： Jurgen Kleinschmidt , Uwe Stamm , Klaus Vogler , Peter Lokai
IPC分类号： H01S3/139 , H01S3/225 , H01S3/22
CPC分类号： H01S3/1392 , H01S3/225
摘要： A wavelength calibration system determines an absolute wavelength of a narrowed spectral emission band of an excimer or molecular laser system. The system includes a module including an element which optically interacts with a component of an output beam of the laser within the tunable range of the laser system around the narrowed band. An inter-level resonance is detected by monitoring changes in voltage within the module, or photo-absorption is detected by photodetecting equipment. The absolute wavelength of the narrowed band is precisely determinable when the optical transitions occur and are detected. When the system specifically includes an ArF-excimer laser chamber, the module is preferably a galvatron containing an element that photo-absorbs around 193 nm and the element is preferably a gas or vapor selected from the group consisting of arsenic, carbon, oxygen, iron, gaseous hydrocarbons, halogenized hydrocarbons, carbon-contaminated inert gases, germanium and platinum vapor. When the system specifically includes F.sub.2 -laser chamber, the module is preferably a galvatron containing an element that photo-absorbs around 157 nm and the element is preferably a gas or vapor selected from the group consisting of selenium, bromine and silicon. The module is alternatively a purge chamber configurable for purging with a photo-absorbing gas.

4. 发明授权

US06490307B1 Method and procedure to automatically stabilize excimer laser output parameters 有权
标题翻译：自动稳定准分子激光输出参数的方法和程序
公开(公告)号：US06490307B1
公开(公告)日：2002-12-03
申请号：US09447882
申请日：1999-11-23
申请人： Bruno Becker de Mos , Uwe Stamm , Klaus Vogler
发明人： Bruno Becker de Mos , Uwe Stamm , Klaus Vogler
IPC分类号： H01S322
CPC分类号： G03F7/70025 , G03F7/70575 , H01S3/036 , H01S3/134 , H01S3/225
摘要： A method and apparatus is provided for stabilizing output beam parameters of a gas discharge laser by maintaining a constituent gas of the laser gas mixture at a predetermined partial pressure using a gas supply unit and a processor. The constituent gas of the laser gas mixture is provided at an initial partial pressure and the constituent gas is subject to depletion within the laser discharge chamber. A parameter such as time, pulse count, driving voltage for maintaining a constant laser beam output energy, pulse shape, pulse duration, pulse stability, beam profile, bandwidth of the laser beam, temporal or spatial coherence, discharge width, or a combination thereof, which varies with a known correspondence to the partial pressure of the constituent gas is monitored. Injections of the constituent gas are performed each to increase the partial pressure by a selected amount in the discharge chamber. A number of successive injections is performed at selected intervals to maintain the constituent gas substantially at the initial partial pressure for maintaining stable output beam parameters.
摘要翻译：提供了一种用于通过使用气体供应单元和处理器将激光气体混合物的组成气体维持在预定分压来稳定气体放电激光器的输出光束参数的方法和装置。激光气体混合物的构成气体以初始分压提供，并且组成气体在激光放电室内耗尽。诸如时间，脉冲计数，用于保持恒定的激光束输出能量，脉冲形状，脉冲持续时间，脉冲稳定性，光束分布，激光束的带宽，时间或空间相干性，放电宽度或其组合的参数，其随着对构成气体的分压的已知对应而变化。各组分气体的注入是在放电室中增加选定量的分压。以选定的间隔执行多次连续喷射，以维持构成气体基本处于初始分压，以维持稳定的输出光束参数。

5. 发明申请

US20060056478A1 Laser gas replenishment method 有权
标题翻译：激光加气方式
公开(公告)号：US20060056478A1
公开(公告)日：2006-03-16
申请号：US11263626
申请日：2005-10-31
申请人： Hans-Stephen Albrecht , Klaus Vogler , Juergen Kleinschmidt , Thomas Schroeder , Igor Bragin , Vadim Berger , Uwe Stamm , Wolfgang Zschocke , Sergei Govorkov
发明人： Hans-Stephen Albrecht , Klaus Vogler , Juergen Kleinschmidt , Thomas Schroeder , Igor Bragin , Vadim Berger , Uwe Stamm , Wolfgang Zschocke , Sergei Govorkov
IPC分类号： H01S3/22
CPC分类号： G03F7/70025 , G02B5/1814 , G02B5/1838 , G03F7/70575 , H01S3/02 , H01S3/036 , H01S3/038 , H01S3/08004 , H01S3/08009 , H01S3/08031 , H01S3/08045 , H01S3/0971 , H01S3/1055 , H01S3/134 , H01S3/225
摘要： Output beam parameters of a gas discharge laser are stabilized by maintaining a molecular fluorine component at a predetermined partial pressure using a gas supply unit and a processor. The molecular fluorine is subject to depletion within the discharge chamber. Gas injections including molecular fluorine can increase the partial pressure of molecular fluorine by a selected amount. The injections can be performed at selected intervals to maintain the constituent gas substantially at the initial partial pressure. The amount per injection and/or the interval between injections can be varied, based on factors such as driving voltage and a calculated amount of molecular fluorine in the discharge chamber. The driving voltage can be in one of multiple driving voltage ranges that are adjusted based on system aging. Within each range, gas injections and gas replacements can be performed based on, for example, total applied electrical energy or time/pulse count.
摘要翻译：气体放电激光器的输出光束参数通过使用气体供应单元和处理器将分子氟成分保持在预定的分压来稳定。分子氟在放电室内会耗尽。包括分子氟在内的气体注入可以将分子氟的分压提高一定量。注射可以以选定的间隔进行，以使构成气体基本保持在初始分压。基于诸如驱动电压和排放室中分子量的计算量的因素，可以改变每次注射的量和/或注射间隔。驱动电压可以是根据系统老化进行调整的多个驱动电压范围之一。在每个范围内，可以基于例如总施加的电能或时间/脉冲计数进行气体注入和气体替换。

6. 发明申请

US20140362384A1 SPECTROSCOPIC INSTRUMENT AND PROCESS FOR SPECTRAL ANALYSIS 审中-公开
标题翻译：光谱仪和光谱分析方法
公开(公告)号：US20140362384A1
公开(公告)日：2014-12-11
申请号：US14368609
申请日：2011-12-28
申请人： Claudia Gorschboth , Tobias Jeglorz , Ole Massow , Henning Wisweh , Klaus Vogler
发明人： Claudia Gorschboth , Tobias Jeglorz , Ole Massow , Henning Wisweh , Klaus Vogler
IPC分类号： G01J3/45 , G01B9/02
CPC分类号： G01J3/45 , G01B9/02091 , G01J3/2803
摘要： A spectroscopic instrument includes a first optical component for spatial spectral splitting of a polychromatic beam of light impinging onto the first optical component, an objective, which routes various spectral regions of the split beam of light onto differing spatial regions, and a sensor, situated downstream of the objective in the beam path of the beam of light, with a plurality of light-sensitive sensor elements. The sensor elements are arranged in the beam path of the split beam of light in such a manner that each sensor element registers the intensity of a spectral sector of the beam of light and the medians of the spectral sectors are situated equidistant from one another in the k-space, where k denotes the wavenumber.
摘要翻译：光谱仪包括用于对入射到第一光学部件上的光的多色光束进行空间光谱分割的第一光学部件，其将分离光束的各种光谱区域路由到不同的空间区域上，以及位于下游的传感器具有多个光敏传感器元件的光束的光束路径中的物镜。传感器元件被布置在分束光束的光束路径中，使得每个传感器元件记录光束的光谱扇区的强度，并且光谱扇区的中心位于等距离的位置 k空间，其中k表示波数。

7. 发明授权

US08858581B2 Interface unit for positioning an object to be irradiated in relation to a radiation source 有权
标题翻译：用于定位相对于辐射源照射的物体的接口单元
公开(公告)号：US08858581B2
公开(公告)日：2014-10-14
申请号：US12894356
申请日：2010-09-30
申请人： Gerhard Robl , Thomas Deisinger , Klaus Vogler
发明人： Gerhard Robl , Thomas Deisinger , Klaus Vogler
IPC分类号： A61F9/00 , A61B18/18 , A61F9/009
CPC分类号： A61F9/009
摘要： An interface unit for positioning an object to be irradiated in relation to a radiation source has at least one first positioning surface for positioning the interface unit in relation to the radiation source, and a second positioning surface for bearing on the object to be irradiated. The interface unit provides a path, which passes through the second positioning surface, for the radiation from the radiation source. According to the invention, the interface unit comprises an integrally produced interface body which forms both the at least one first positioning surface and the second positioning surface. The interface body is preferably produced from a plastic material by an injection compression molding method, in order to achieve the desired high manufacturing accuracy.
摘要翻译：用于定位相对于辐射源照射的物体的接口单元具有至少一个用于将接口单元相对于辐射源定位的第一定位表面和用于承载在被照射物体上的第二定位表面。接口单元提供穿过第二定位表面的路径，用于来自辐射源的辐射。根据本发明，接口单元包括整体制造的接口体，其形成至少一个第一定位表面和第二定位表面。界面体优选地通过注射压缩成型方法由塑料材料制成，以便实现期望的高制造精度。

8. 发明申请

US20140063492A1 PRODUCTION PROCESS FOR AN INTERFACE UNIT AND A GROUP OF SUCH INTERFACE UNITS 审中-公开
标题翻译：接口单元的生产过程和一个这样的界面单元组
公开(公告)号：US20140063492A1
公开(公告)日：2014-03-06
申请号：US14076023
申请日：2013-11-08
申请人： Claudia Gorschboth , Jing Li , Klaus Vogler , Olaf Kittelmann , Thomas Deisinger , Gerhard Robi
发明人： Claudia Gorschboth , Jing Li , Klaus Vogler , Olaf Kittelmann , Thomas Deisinger , Gerhard Robi
IPC分类号： B23K26/02
CPC分类号： B23K26/02 , A61F9/009 , Y10T29/49826 , Y10T156/10
摘要： A process for producing an interface unit and also a group of such interface units are specified. The interface unit exhibits a first reference surface for beaming in radiation, a second reference surface for emitting the radiation, and an axis extending in the direction from the first to the second reference surface. The production process comprises the steps of setting an optical path length of the interface unit between the first and second reference surfaces along the axis and the fixing of the set optical path length of the interface unit. The optical path length of the interface unit is set in such a way that radiation of a defined numerical aperture beamed in at the first reference surface exhibits a focus location that is predetermined with respect to the second reference surface in the direction of the axis. A precise and uniform focus location with respect to the second reference surface is obtained.
摘要翻译：指定了用于生成接口单元以及一组这样的接口单元的处理。接口单元呈现用于辐射辐射的第一参考表面，用于发射辐射的第二参考表面和沿从第一参考表面到第二参考表面的方向延伸的轴线。生产过程包括以下步骤：沿着轴线设置第一和第二参考表面之间的界面单元的光路长度以及固定接口单元的设定的光程长度。接口单元的光路长度被设定为使得在第一基准表面上射出的限定数值孔径的辐射表现出相对于第二参考表面在轴线方向上预定的聚焦位置。获得相对于第二参考表面的精确且均匀的焦点位置。

9. 发明申请

US20130321822A1 SYSTEM AND METHOD FOR MEASURING INTERNAL DIMENSIONS OF AN OBJECT BY OPTICAL COHERENCE TOMOGRAPHY 审中-公开
标题翻译：通过光学相干测量法测量物体内部尺寸的系统和方法
公开(公告)号：US20130321822A1
公开(公告)日：2013-12-05
申请号：US13984956
申请日：2011-02-15
申请人： Klaus Vogler , Christian Wuellner , Claudia Gorschboth , Christof Donitzky
发明人： Klaus Vogler , Christian Wuellner , Claudia Gorschboth , Christof Donitzky
IPC分类号： G01B11/24
CPC分类号： G01B11/2441 , A61B3/1005 , A61B3/18 , A61B5/0035 , A61B5/0066 , G01B9/02007 , G01B9/02027 , G01B9/02044 , G01B9/02091 , G01B2290/45 , G01N21/4795
摘要： A system is provided for optically measuring internal dimensions of a sample object comprising internal interfaces at which the refraction index changes so that a portion of incident light is backreflected and/or backscattered and can be detected by means of optical coherence tomography. The system comprises at least one first OCT device adapted to measure internal dimensions in a first partial volume of the object and at least one second OCT device adapted to measure internal dimensions in a second partial volume of the same object, wherein the second partial volume is at least partially different from the first partial volume. The first and second OCT devices may share at least partially spatially superimposed first and second sample arms, which may have respective different focal lengths and pass through a common optical lens system toward the object
摘要翻译：提供了一种用于光学测量样品物体的内部尺寸的系统，其包括折射率变化的内部界面，使得入射光的一部分被反射和/或反向散射并且可以通过光学相干断层摄影检测。该系统包括适于测量物体的第一部分体积中的内部尺寸的至少一个第一OCT装置和适于测量同一物体的第二部分体积中的内部尺寸的至少一个第二OCT装置，其中第二部分容积为至少部分地不同于第一部分体积。第一和第二OCT装置可以共享至少部分空间上叠加的第一和第二样本臂，其可以具有各自不同的焦距并且通过公共光学透镜系统朝向对象

10. 发明授权

US08591502B2 Laser system for refractive surgery 有权
$Laser system for refractive surgery$
标题翻译：屈光手术激光系统
公开(公告)号：US08591502B2
公开(公告)日：2013-11-26
申请号：US11835283
申请日：2007-08-07
申请人： Klaus Vogler
发明人： Klaus Vogler
IPC分类号： A61F9/008
CPC分类号： A61F9/00836 , A61F2009/00855 , A61F2009/00872 , B23K26/04 , B23K26/0624 , B23K2103/30 , B23K2103/50
摘要： A laser system for refractive surgery comprises a laser beam for generating laser beam pulses and optical means for directing these laser beam pulses as a working beam onto an eye. Some of the working radiation is extracted for optical coherence tomography, in order to measure geometrical structures in the cornea.
摘要翻译：用于屈光手术的激光系统包括用于产生激光束脉冲的激光束和用于将这些激光束脉冲作为工作光束引导到眼睛上的光学装置。一些工作辐射被提取用于光学相干断层扫描，以便测量角膜中的几何结构。

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