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    • 1. 发明授权
    • Electron-emitting apparatus
    • 电子发射装置
    • US07304440B2
    • 2007-12-04
    • US11236422
    • 2005-09-27
    • Iwao OhwadaTakayoshi AkaoTetsuyuki KamejiHirokazu Nakamura
    • Iwao OhwadaTakayoshi AkaoTetsuyuki KamejiHirokazu Nakamura
    • G05F1/00
    • H01J1/30B82Y10/00G09G3/22G09G2320/0238H01J1/312H01J1/32H01J31/127H01L2924/0002H01L2924/00
    • An electron emitting apparatus includes a lower electrode, an emitter section made of a dielectric material, a plurality of upper electrodes having micro through holes, and a collector electrode opposing the upper electrodes. In this electron-emitting apparatus, electrons are accumulated in the emitter section by controlling the potential difference (drive voltage) between the lower and upper electrodes with respect to the potential of the lower electrode to a negative predetermined voltage. At this time, the collector electrode of the electron-emitting apparatus is grounded. Thus, unnecessary electron-emitting is suppressed. Subsequently, the drive voltage is changed to a positive predetermined voltage. As a result, polarization reversal occurs in the emitter section, and accumulated electros are emitted through the micro through holes in the upper electrodes by Coulomb repulsion. At this time, a positive voltage Vc is applied to the collector electrode to give large energy to accelerate the electrons.
    • 电子发射装置包括下电极,由介电材料制成的发射极部分,具有微通孔的多个上电极和与上电极相对的集电极。 在该电子发射装置中,通过将下电极和上电极之间的电位差(驱动电压)相对于下电极的电位控制为负的预定电压,将电子累积在发射极部分。 此时,电子发射设备的集电极接地。 因此,抑制不必要的电子发射。 随后,驱动电压变为正的预定电压。 结果,在发射极部分发生极化反转,并且通过库仑斥力通过上电极中的微通孔发射积聚的电子。 此时,向集电极施加正电压Vc以产生大的能量来加速电子。
    • 3. 发明申请
    • Electron-emitting apparatus
    • 电子发射装置
    • US20060082318A1
    • 2006-04-20
    • US11236423
    • 2005-09-27
    • Iwao OhwadaTakayoshi AkaoTetsuyuki KamejiHirokazu Nakamura
    • Iwao OhwadaTakayoshi AkaoTetsuyuki KamejiHirokazu Nakamura
    • H05B37/00
    • G09G3/22B82Y10/00G09G2310/0275G09G2310/06G09G2320/043G09G2330/025H01J1/312H05B41/2806Y02B20/22
    • An electron-emitting element has an electron emission unit including a lower electrode, an emitter section composed of a dielectric material, and an upper electrode having a plurality of micro through holes; and a power supply for applying a power supply voltage to the electron emission unit. During the period between the point at which emission of electrons accumulated in the emitter section is started and the point at which the electron emission is completed, the power supply generates a first power supply voltage, whose absolute value changes with forming a sinusoidal wave so that the potential of the upper electrode is higher than the potential of the lower electrode. During the period between the point at which the electron accumulation in the emitter section is started and the point at which the electron accumulation is completed, the power supply generates a second power supply voltage whose absolute value increases with forming a sinusoidal wave so that the potential of the lower electrode is higher than the potential of the upper electrode.
    • 电子发射元件具有电子发射单元,其包括下电极,由电介质材料构成的发射极部分和具有多个微通孔的上电极; 以及用于向电子发射单元施加电源电压的电源。 在开始发射部分的电子发射点与电子发射完成点之间的时间段期间,电源产生第一电源电压,其绝对值随着形成正弦波而改变,使得 上电极的电位高于下电极的电位。 在开始发射部分的电子积分点和电子积累完成点之间的时间段期间,电源产生绝对值随形成正弦波而增加的第二电源电压,使得电位 下电极的电位高于上电极的电位。
    • 4. 发明申请
    • Electron-emitting apparatus
    • 电子发射装置
    • US20060118827A1
    • 2006-06-08
    • US11236422
    • 2005-09-27
    • Iwao OhwadaTakayoshi AkaoTetsuyuki KamejiHirokazu Nakamura
    • Iwao OhwadaTakayoshi AkaoTetsuyuki KamejiHirokazu Nakamura
    • H01L23/58
    • H01J1/30B82Y10/00G09G3/22G09G2320/0238H01J1/312H01J1/32H01J31/127H01L2924/0002H01L2924/00
    • An electron emitting apparatus includes a lower electrode, an emitter section made of a dielectric material, a plurality of upper electrodes having micro through holes, and a collector electrode opposing the upper electrodes. In this electron-emitting apparatus, electrons are accumulated in the emitter section by controlling the potential difference (drive voltage) between the lower and upper electrodes with respect to the potential of the lower electrode to a negative predetermined voltage. At this time, the collector electrode of the electron-emitting apparatus is grounded. Thus, unnecessary electron-emitting is suppressed. Subsequently, the drive voltage is changed to a positive predetermined voltage. As a result, polarization reversal occurs in the emitter section, and accumulated electros are emitted through the micro through holes in the upper electrodes by Coulomb repulsion. At this time, a positive voltage Vc is applied to the collector electrode to give large energy to accelerate the electrons.
    • 电子发射装置包括下电极,由介电材料制成的发射极部分,具有微通孔的多个上电极和与上电极相对的集电极。 在该电子发射装置中,通过将下电极和上电极之间的电位差(驱动电压)相对于下电极的电位控制为负的预定电压,将电子累积在发射极部分。 此时,电子发射设备的集电极接地。 因此,抑制不必要的电子发射。 随后,驱动电压变为正的预定电压。 结果,在发射极部分发生极化反转,并且通过库仑斥力通过上电极中的微通孔发射积聚的电子。 此时,向集电极施加正电压Vc以产生大的能量来加速电子。
    • 5. 发明申请
    • Electron-emitting apparatus
    • 电子发射装置
    • US20060082317A1
    • 2006-04-20
    • US11235678
    • 2005-09-26
    • Iwao OhwadaTakayoshi AkaoTetsuyuki KamejiHirokazu Nakamura
    • Iwao OhwadaTakayoshi AkaoTetsuyuki KamejiHirokazu Nakamura
    • H05B37/00
    • G09G3/22G09G2310/06G09G2310/066G09G2320/043G09G2330/021
    • An electron-emitting apparatus includes an element having a lower electrode, an emitter section composed of a dielectric material, and an upper electrode having a plurality of micro through holes: and a drive voltage applying circuit having a power supply and a circuit that applies a voltage generated by the power supply between the lower electrode and the upper electrode. In order to emit electrons accumulated in the emitter section, the power supply generates a voltage gradually increasing from a first voltage to a second voltage. In order to accumulate electrons In the emitter section, the power supply generates a voltage gradually decreasing from the second voltage to the first voltage. A rapid change in element voltage and excessive element current can thereby be avoided, and unnecessary electron emission can be prevented.
    • 一种电子发射设备包括具有下电极的元件,由电介质材料构成的发射极部分和具有多个微通孔的上电极;以及驱动电压施加电路,具有电源和电路, 由下电极和上电极之间的电源产生的电压。 为了发射累积在发射极部分中的电子,电源产生从第一电压逐渐增加到第二电压的电压。 为了积累电子在发射极部分中,电源产生从第二电压逐渐降低到第一电压的电压。 因此可以避免元件电压和元件电流过大的快速变化,并且可以防止不必要的电子发射。
    • 8. 发明申请
    • Electron-emitting apparatus
    • 电子发射装置
    • US20060132024A1
    • 2006-06-22
    • US11224689
    • 2005-09-12
    • Tsutomu NanatakiIwao OhwadaTakayoshi AkaoHirokazu Nakamura
    • Tsutomu NanatakiIwao OhwadaTakayoshi AkaoHirokazu Nakamura
    • H01J3/00H01J63/04
    • H01J1/312B82Y10/00H01J1/30H01J1/32H01J29/467H01J31/127
    • An electron-emitting apparatus includes an emitter section made of a dielectric material, lower electrodes, upper electrodes having micro through holes, insulating layers disposed on the upper surface of the emitter section and between the adjacent upper electrodes, and focusing electrodes to which a predetermine potential is applied and which are disposed on the insulating layers. The electron-emitting apparatus applies a negative potential to the upper electrode to accumulate electrons in the emitter section and then applies a positive potential to the upper electrode. As a result, the polarization of the emitter section is reversed, and the accumulated electrons are emitted through the micro through holes in the upper electrodes by Coulomb repulsion. Owing to electric fields generated by the focusing electrodes, the emitted electrons travel in the upward direction of the upper electrode without spreading into a shape of a cone.
    • 电子发射装置包括由电介质材料制成的发射极部分,下电极,具有微通孔的上电极,设置在发射极部分的上表面和相邻上电极之间的绝缘层,以及预定的 施加电位并且设置在绝缘层上。 电子发射装置向上电极施加负电位以在发射极部分中积聚电子,然后向上电极施加正电位。 结果,发射极部分的极化反转,并且累积的电子通过库仑排斥通过上电极中的微通孔发射。 由于聚焦电极产生的电场,发射的电子沿着上电极的向上方向移动,而不会扩散成锥形。
    • 10. 发明授权
    • Electron beam irradiating apparatus
    • 电子束照射装置
    • US07518131B2
    • 2009-04-14
    • US11385483
    • 2006-03-21
    • Tsutomu NanatakiIwao OhwadaYuki BesshoTakayoshi Akao
    • Tsutomu NanatakiIwao OhwadaYuki BesshoTakayoshi Akao
    • A61N5/00
    • G21K5/04H01J37/317H01L21/67005
    • An electron beam irradiating apparatus includes a chamber being kept under vacuum, and housing a planar electron emitting element and a positioning unit and an object to be irradiated is directly irradiated with an electron beam emitted from the element. The planar electron emitting element includes: an emitter portion composed of a dielectric material; and a first electrode and a second electrode applied with a driving voltage for emitting electrons, and the first electrode is formed on a first surface of the emitter portion and has a plurality of through-holes where the emitter portion is exposed, a surface of the first electrode facing to the emitter portion around the through-holes is separated from the emitter portion, and the electron beam is emitted from the first surface of the emitter portion through the through-holes.
    • 电子束照射装置包括保持在真空下的室,并容纳平面电子发射元件和定位单元,并且被照射物体直接用从元件发射的电子束照射。 平面电子发射元件包括:由电介质材料构成的发射极部分; 以及施加有用于发射电子的驱动电压的第一电极和第二电极,并且所述第一电极形成在所述发射极部分的第一表面上,并且具有多个通过所述发射极部分露出的通孔, 面向通孔周围的发射极部分的第一电极与发射极部分分离,并且电子束通过通孔从发射器部分的第一表面发射。