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1. 发明申请

US20120152172A1 GAS-DISCHARGING DEVICE AND SUBSTRATE-PROCESSING APPARATUS USING SAME 审中-公开
标题翻译：气体放电装置和基板处理装置
公开(公告)号：US20120152172A1
公开(公告)日：2012-06-21
申请号：US13393911
申请日：2010-08-24
申请人： Hui Hwang , Pil-Woong Heo , Chang-Hee Han
发明人： Hui Hwang , Pil-Woong Heo , Chang-Hee Han
IPC分类号： C23C16/455
CPC分类号： H01L21/68764 , C23C16/45551 , C23C16/45574 , H01L21/68771
摘要： Provided are a gas injection device and substrate processing apparatus using the same. The gas injection device includes a plurality of gas injection units disposed above a substrate support part rotatably disposed within a chamber to support a plurality of substrates, the plurality of gas injection units being disposed along a circumference direction with respect to a center point of the substrate support part to inject a process gas onto the substrates. Each of the plurality of gas injection units includes a top plate in which an inlet configured to introduce the process gas is provided and an injection plate disposed under the top plate to define a gas diffusion space between the injection plate and the top plate along a radius direction of the substrate support part, the injection plate having a plurality of gas injection holes under the gas diffusion space to inject the process gas introduced through the inlet and diffused in the gas diffusion space onto the substrate. In at least one gas injection unit of the plurality of gas injection units, a partition wall is disposed between the top plate and the injection plate to divide the gas diffusion space into a plurality of separated spaces along the radius direction of the substrate support part, and the inlet is provided in plurality and the plurality of inlets are respectively provided in the separated spaces so that the process gases are independently introduced into the separated spaces.
摘要翻译：提供一种使用其的气体注入装置和基板处理装置。气体注入装置包括多个气体注入单元，其设置在可旋转地设置在腔室内以支撑多个基板的基板支撑部分上方，多个气体注入单元相对于基板的中心点沿圆周方向设置支撑部分将工艺气体注入到基底上。多个气体注入单元中的每一个包括顶板，其中设置有引入处理气体的入口和设置在顶板下方的注入板，以在注射板和顶板之间沿着半径限定气体扩散空间注入板在气体扩散空间下方具有多个气体注入孔，以将通过入口引入并在气体扩散空间中扩散的工艺气体注入到衬底上。在多个气体注入单元的至少一个气体注入单元中，在顶板和注射板之间设置分隔壁，以将气体扩散空间沿着基板支撑部的半径方向分隔成多个分离的空间，并且入口设置成多个，并且多个入口分别设置在分离的空间中，使得处理气体被独立地引入到分离的空间中。

2. 发明申请

US20070170176A1 Composite tool bar 审中-公开
标题翻译：复合工具栏
公开(公告)号：US20070170176A1
公开(公告)日：2007-07-26
申请号：US10573159
申请日：2004-09-22
申请人： Dai Lee , Hui Hwang , Seung Lee , Byung Kim
发明人： Dai Lee , Hui Hwang , Seung Lee , Byung Kim
IPC分类号： H05B6/10
CPC分类号： B23B29/03407 , B23B29/02 , B23B29/248 , B23B2240/21 , B23C2226/27 , B23C2240/24 , B23C2260/04
摘要： The present invention provides a composite tool bar which has a composite body part (10) covered with a covering (20), with a plurality of bites (TO1-T05) mounted on the composite body part (10) along a longitudinal direction. The composite tool bar includes a first insert (240) which is inserted into the composite body part (10). A bite mounting hole (210) is provided in the first insert (240) to receive a bite therein. A bite height adjusting hole (220) is axially aligned with the bite mounting hole (210) to receive therein a bite height adjusting bolt (BO1-B05). The composite tool bar further includes a second insert (250) which is inserted into the composite body part (10) to be coupled to the first insert (240). A bite holding hole (230) is provided in the second insert (250) to receive therein a bite holding bolt (B06-B10).
摘要翻译：本发明提供一种复合工具杆，其具有覆盖有覆盖物（20）的复合体部分（10），多个叮咬（TO 1 -T 05）沿纵向方向安装在复合体部分（10）上。复合工具杆包括插入到复合主体部分（10）中的第一插入件（240）。咬合安装孔（210）设置在第一插入件（240）中以在其中接受咬入。咬合高度调节孔（220）与咬入安装孔（210）轴向对齐以在其中容纳咬合高度调节螺栓（BO 1 -05）。复合工具杆还包括第二插入件（250），该第二插入件插入复合主体部分（10）中以联接到第一插入件（240）。咬合保持孔（230）设置在第二刀片（250）中以在其中容纳咬合保持螺栓（B 06 -B 10）。

3. 发明申请

US20050103147A1 Robot arm with impact absorption structure 审中-公开
标题翻译：机械臂具有冲击吸收结构
公开(公告)号：US20050103147A1
公开(公告)日：2005-05-19
申请号：US10954569
申请日：2004-09-30
申请人： Dai Lee , Jung Suh , Chang Lee , Tae Lim , Woo Chin , Hak Lee , Hui Hwang , Seung Lee , Byung Kim
发明人： Dai Lee , Jung Suh , Chang Lee , Tae Lim , Woo Chin , Hak Lee , Hui Hwang , Seung Lee , Byung Kim
IPC分类号： B25J18/06 , B25J18/00 , B25J19/00 , F16F7/00 , F16F7/12 , E02F3/00
CPC分类号： F16F7/12 , B25J19/0091 , Y10T74/20305
摘要： A robot arm has an impact absorption structure for absorbing impact energy caused by a collision to protect a person from injury and the robot arm from being damaged. The robot arm includes a plurality of rigid beams provided at both end portions thereof to define a frame of the robot arm, and side members made of an elastic material and provided between the plurality of rigid beams to define an appearance of the robot arm and absorb the impact energy. Each side member includes a sheet made of a plastic material, a foam or honeycomb structure, and a fiber reinforced composite material attached to the sheet.
摘要翻译：机器人臂具有用于吸收由碰撞引起的冲击能量的冲击吸收结构，以保护人免受伤害并且机器人手臂不被损坏。机器人臂包括设置在其两个端部处的多个刚性梁，以限定机器人臂的框架，以及由弹性材料制成并设置在多个刚性梁之间的侧构件，以限定机器人手臂的外观并吸收冲击能量。每个侧构件包括由塑料材料，泡沫或蜂窝结构体制成的片材和附着到片材的纤维增强复合材料。

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