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    • 7. 发明授权
    • Methods of forming double pinned photodiodes
    • 形成双针光电二极管的方法
    • US07829368B2
    • 2010-11-09
    • US12389973
    • 2009-02-20
    • Inna Patrick
    • Inna Patrick
    • H01L21/00
    • H01L27/14609H01L27/14603H01L27/14643H01L27/14689H01L31/03529Y02E10/50
    • A pinned photodiode, which is a double pinned photodiode having increased electron capacitance, and a method for forming the same are disclosed. The invention provides a pinned photodiode structure comprising a substrate base over which is a first layer of semiconductor material. There is a base layer of a first conductivity type, wherein the base layer of a first conductivity type is the substrate base or is a doped layer over the substrate base. At least one doped region of a second conductivity type is below the surface of said first layer, and extends to form a first junction with the base layer. A doped surface layer of a first conductivity type is over the at least one region of a second conductivity type and forms a second junction with said at least one region of a second conductivity type.
    • 公开了一种钉扎光电二极管,其是具有增加的电子电容的双引脚光电二极管及其形成方法。 本发明提供了一种钉扎光电二极管结构,其包括基底,第一半导体材料层。 存在第一导电类型的基底层,其中第一导电类型的基底层是衬底基底,或者是衬底基底上的掺杂层。 至少一个第二导电类型的掺杂区域位于所述第一层的表面之下,并延伸以与基底层形成第一结。 第一导电类型的掺杂表面层在第二导电类型的至少一个区域之上,并且与所述至少一个第二导电类型的区域形成第二结。