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2. 发明申请

US20040089069A1 High-G acceleration protection by caging 失效
标题翻译：高G加速保护
公开(公告)号：US20040089069A1
公开(公告)日：2004-05-13
申请号：US10292785
申请日：2002-11-12
申请人： Honeywell International Inc.
发明人： Mark W. Weber , William A. Harris , Max C. Glenn
IPC分类号： G01P015/13
CPC分类号： B81B7/0012 , G01C19/5719 , G01P15/08 , G01P15/097 , G01P2015/0814
摘要： For use in a MEMS device having a suspended proof mass, a method and apparatus for securing the MEMS device during a period of high acceleration. The method may include applying a DC voltage between the proof mass and a non-suspended structure of the device. The non-suspended structure may be mounted on a substrate, and the substrate or the non-suspended structure may be electrically isolated from the proof mass by an insulating layer or by one or more islands. Applying the DC voltage creates an electrostatic force that moves the proof mass toward (or holds the proof mass near) the substrate. Movement of the proof mass may be limited by mechanical contact between the proof mass and the insulating layer, the one or more islands, or by a cage mounted on the substrate during the period of high acceleration.
摘要翻译：用于具有悬挂质量的MEMS器件，用于在高加速度的时段期间固定MEMS器件的方法和装置。所述方法可以包括在所述检测质量块和所述器件的非悬浮结构之间施加DC电压。非悬挂结构可以安装在基板上，并且基板或非悬挂结构可以通过绝缘层或一个或多个岛与证明物质电隔离。施加直流电压会产生一个静电力，使静电质量向基板移动（或保持质量附近）。检测质量块的移动可以通过在高加速度期间的检测质量体与绝缘层，一个或多个岛状体之间的机械接触或由安装在基板上的保持架来限制。

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