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    • 2. 发明申请
    • Coherent beam device for observing and measuring sample
    • 用于观察和测量样品的相干光束装置
    • US20050146730A1
    • 2005-07-07
    • US10485541
    • 2002-08-02
    • Junji EndoChen Jun
    • Junji EndoChen Jun
    • G01B9/02
    • G01B9/02024G01B9/02038G01B9/02052G01B9/02059G01D11/26
    • In an interferometric device using a coherent beam and an image pickup camera, a protective glass for the detector surface is needed on the incident side of the pickup unit of the image pickup camera, and this gives rise to interference fringes which constitute noise. To solve this problem, a dustproof container is configured also to cover an imaging lens system arranged on the incident side of the pickup unit of the image pickup camera, and the pickup unit of the image pickup camera is arranged in this container. By assigning the function of the protective glass for the detector surface in the conventional configuration to the imaging lens system, the protective glass is made unnecessary.
    • 在使用相干光束和摄像照相机的干涉仪中,在摄像机的拾取单元的入射侧需要用于检测器表面的保护玻璃,并且这引起构成噪声的干涉条纹。 为了解决这个问题,防尘容器还被配置为覆盖设置在摄像机的拾取单元的入射侧的成像透镜系统,并且摄像相机的拾取单元布置在该容器中。 通过将传统配置中的检测器表面的保护玻璃的功能分配给成像透镜系统,不需要保护玻璃。
    • 3. 发明授权
    • Field emission electron gun system
    • 场发射电子枪系统
    • US4945247A
    • 1990-07-31
    • US365827
    • 1989-06-14
    • Takeshi KawasakiJunji EndoShigeto IsakozawaMasahiro TomitaAkira Tonomura
    • Takeshi KawasakiJunji EndoShigeto IsakozawaMasahiro TomitaAkira Tonomura
    • H01J29/48H01J37/073H01J37/145
    • H01J37/073
    • In a field emission electron gun system with a multi-stage acceleration tube comprising a field emission electron source, a field emission electrode for extracting the electrons, a magnetic lens having a magnetic gap between the field emission electron source and the field emission electrode or a magnetic lens having a magnetic pole which also serves as the field emission electrode, and at least two-stages of acceleration electrodes for accelerating the electrons, a magnetization current I for the magnetic lens is changed interlocking with a field emission voltage V.sub.1 applied between the field emission electron source and the field emission electrode so that IN/.sqroot.V.sub.1 (N: the number of windings of the magnetic lens) takes a predetermined value and a first acceleration voltage V.sub.2 applied between the field emission electron source and the first-stage acceleration electrode is changed interlocking with the field emission voltage V.sub.1 so that V.sub.2 /V.sub.1 takes a predetermined value.
    • 在具有包括场发射电子源的多级加速管的场发射电子枪系统中,用于提取电子的场发射电极,在场发射电子源和场发射电极之间具有磁隙的磁透镜或 具有也用作场发射电极的磁极的磁性透镜以及用于加速电子的至少两级的加速电极,用于磁性透镜的磁化电流I与施加在磁场之间的场致发射电压V1互锁地变化 发射电子源和场发射电极,使得IN / 2ROOT V1(N:磁性透镜的绕组数)取预定值,施加在场发射电子源和第一级加速电极之间的第一加速电压V2 与场致发射电压V1互锁,使得V2 / V1取规定值。
    • 4. 发明授权
    • Charged particle guide apparatus and image viewing apparatus for charged
particle microscope using the same
    • 带电粒子引导装置和使用其的带电粒子显微镜的图像观察装置
    • US5811805A
    • 1998-09-22
    • US702183
    • 1996-08-23
    • Nobuyuki OsakabeJunji EndoTetsuji KodamaTsuneyuki UrakamiHiroshi TsuchiyaShinji Ohsuka
    • Nobuyuki OsakabeJunji EndoTetsuji KodamaTsuneyuki UrakamiHiroshi TsuchiyaShinji Ohsuka
    • H01J37/22H01J37/244H01J37/26
    • H01J37/22H01J37/244
    • An electron-microscope image viewing apparatus capable of measuring of a moving speed or a vibration frequency of an atomic structure, a magnetic structure, an electric structure or the like of a specimen even when the structure changes at a high rate. The apparatus includes a charged particle source for emitting charged particles, an illuminating electron lens system for illuminating a specimen with a beam of the charged particles, an image magnifying/projecting lens system for magnifying an image of the specimen formed by charged particles scattered upon transmission through the specimen and projecting the magnified image onto an image forming plane, at least one charged particle extracting means provided on the image forming plane of the image magnifying/projecting lens system for taking out the charged particles from a predetermined portion of the charged particle beam projected onto the image forming plane, at least one charged particle detector for detecting the charged particles taken out through the charged particle extracting means, and a signal processing means for processing a signal outputted from the charged particle detector.
    • 即使当结构以高速率变化时,也可以测量试样的原子结构,磁性结构,电结构等的移动速度或振动频率的电子显微镜图像观察装置。 该装置包括用于发射带电粒子的带电粒子源,用于用带电粒子束照射样本的照明电子透镜系统,用于放大由透射时散射的带电粒子形成的样本的图像的图像放大/投影透镜系统 通过样本并将放大图像投影到图像形成平面上,至少一个带电粒子提取装置,设置在图像放大/投影透镜系统的图像形成平面上,用于从带电粒子束的预定部分中取出带电粒子 投影到图像形成平面上的至少一个带电粒子检测器,用于检测通过带电粒子提取装置取出的带电粒子;以及信号处理装置,用于处理从带电粒子检测器输出的信号。
    • 7. 发明授权
    • Fluidized bed method of forming a nitride or carbonitride layer
    • 形成氮化物或碳氮化物层的流化床方法
    • US4871401A
    • 1989-10-03
    • US123662
    • 1987-11-13
    • Tohru AraiJunji EndoHiromasa Takeda
    • Tohru AraiJunji EndoHiromasa Takeda
    • C23C12/02
    • C23C12/02
    • A method of forming a nitride or carbonitride layer on the surface of an iron or iron alloy article, which comprises the steps of: (a) disposing in a fluidized bed furnace a treating agent comprising a refractory powder, a metal powder of at least one selected from the group consisting of chromium, vanadium, titanium and a metal containing at least one of the chromium, vanadium and titanium, and a halide powder; (b) introducing a nitrogen-containing gas into the fluidizied bed furnace; (c) heating the fluidized bed furnace; and (d) disposing the article in the fluidized bed furnace during or after the steps (a) to (c). In this method, the article is preferably treated at a temperature not higher than 650.degree. C. The step (c) may precede the step (b). The halide powder may be supplied to the fluidized bed furnace from outside in the form of green compact or a gas.
    • 一种在铁或铁合金制品的表面上形成氮化物或碳氮化物层的方法,包括以下步骤:(a)在流化床炉中设置包括耐火粉末,至少一种 选自铬,钒,钛和含有铬,钒和钛中的至少一种的金属和卤化物粉末; (b)将含氮气体引入流化床炉; (c)加热流化床炉; 和(d)在步骤(a)至(c)期间或之后将制品置于流化床炉中。 在该方法中,优选在不高于650℃的温度下进行处理。步骤(c)可以在步骤(b)之前。 卤化物粉末可以从生坯或气体的形式从外部供应到流化床炉。
    • 8. 发明授权
    • Method of surface treatment and apparatus used therefor
    • 表面处理方法及其使用的设备
    • US4844949A
    • 1989-07-04
    • US249251
    • 1988-09-23
    • Tohru AraiJunji EndoHiromasa Takeda
    • Tohru AraiJunji EndoHiromasa Takeda
    • C23C10/36C23C10/52C23C12/00C23C12/02C23C16/06C23C16/32C23C16/34C23C16/36C23C16/442C23C16/448F27B15/10
    • C23C16/32C23C16/34C23C16/36C23C16/442C23C16/4488Y10S118/05
    • A method of forming a surface layer of carbide, nitride, carbonitride, or solid-solution on the surface of a material to be treated, which comprises disposing in a fluidized bed furnace a treating agent comprising a powder of a refractory material, and a powder of a metal for forming a carbide, nitride, carbonitride or solid-solution or a powder of an alloy thereof, introducing a fluidizing gas into the fluidized bed furnace to fluidize the treating agent and form a fluidized layer, disposing the material to be treated in the fluidized layer, and introducing a predetermined amount of halide into the fluidized layer, and an apparatus for forming the surface layer on the material to be treated, comprising a furnace body for forming the surface layer in the fluidized layer of the treating agent, a heating furnace for heating the fluidized layer, a halide supply pipe in communication with the outside of the furnace body, and a halide gas jetting pipe disposed within the furnace body, which is connected to the halide supply pipe and has a plurality of apertures opened into the fluidized layer.
    • 在待处理材料的表面上形成碳化物,氮化物,碳氮化物或固溶体的表面层的方法,其包括在流化床炉中设置包含耐火材料粉末和粉末的处理剂 用于形成碳化物,氮化物,碳氮化物或固溶体的金属或其合金粉末,将流化气体引入流化床炉中以使处理剂流化并形成流化层,将待处理的材料置于 流化层,并将预定量的卤化物引入到流化层中,以及用于在待处理材料上形成表面层的装置,包括在处理剂的流化层中形成表面层的炉体, 用于加热流化层的加热炉,与炉体外部连通的卤化物供给管和设置在炉体内的卤化物气体喷射管,其中 连接到卤化物供给管,并且具有通向流化层的多个孔。
    • 9. 发明授权
    • Interference device and method for observing phase informalities
    • 干涉装置和观察阶段非正规性的方法
    • US5446589A
    • 1995-08-29
    • US103682
    • 1993-08-10
    • Qing X. RuJunji EndoAkira Tonomura
    • Qing X. RuJunji EndoAkira Tonomura
    • G02B27/50G01Q90/00G03H1/04G03H5/00H01J37/26H01J37/295G02B26/06
    • G03H1/0404G03H5/00
    • An interference device and method for observing phase information, using electron or other waves with the amplitude difficult to split by a half mirror. Using an interference device comprising in combination two scattering films A1 and A2 capable of scattering incident waves randomly, first lens systems B1 and B2 that are located between said two scattering films to form the image of one scattering film A1 on the other scattering film A2, a second lens system B3 for forming on an observation surface C the image of a specimen 2 located at a position where a component going straight through said one scattering film is converged in a spot form through said first lens system or a part thereof, and means for recording an interference pattern formed on the observation surface C, an interference pattern is detected while the specimen 2 is inserted in the arrangement, and an interference pattern is detected while the specimen 2 is removed from the arrangement, so that the difference between both the interference patterns, or the sum or product of them, can be found to observe the phase information of the specimen directly as interference fringes.
    • 一种用于观测相位信息的干涉装置和方法,使用电子束或其他具有难以用半透半反镜分裂的波的波。 使用包括两个能够随机散射入射波的两个散射膜A1和A2的干涉装置,位于所述两个散射膜之间的第一透镜系统B1和B2,以在另一散射膜A2上形成一个散射膜A1的图像, 第二透镜系统B3,用于在观察表面C上形成位于通过所述第一透镜系统或其一部分以直线通过所述一个散射膜的部件会聚在一起的位置的样本2的图像;以及装置 为了记录形成在观察表面C上的干涉图案,在样本2被插入到该装置中时检测到干涉图案,并且在从装置移除样本2的同时检测干涉图案,从而两者之间的差异 可以发现干涉图案或其总和或乘积直接作为干涉条纹观察样本的相位信息 es。