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    • 5. 发明授权
    • Manufacturing apparatus and manufacturing method for alined carbon nanotubes
    • 用于制备碳纳米管的制造装置和制造方法
    • US08455050B2
    • 2013-06-04
    • US12525719
    • 2008-02-04
    • Kenji HataSatoshi YasudaMotoo Yumura
    • Kenji HataSatoshi YasudaMotoo Yumura
    • C23C16/00
    • B82Y40/00B82Y30/00C01B32/162C01B2202/08C23C16/0281C23C16/26C23C16/45565
    • An apparatus (CVD apparatus (1)) having a reaction chamber (3) for accommodating a substrate (2) formed with a metal catalyst film and means (gas supply pipes (5, 6)) for supplying a feedstock gas (9) and a catalyst activating material (10) into the reaction chamber (3) for manufacturing CNTs aligned in a direction perpendicular to the catalyst film surface (2a) of the substrate (2), wherein the means for supplying the feedstock gas (9) and the catalyst activating material (10) have a plurality of ejection holes placed at positions facing the catalyst film surface (2a) of the substrate (2), and the ejecting direction of the ejection holes is adjusted to the direction of alignment of CNTs grown from the metal catalyst film. This can provide a manufacturing technology for CNTs capable of mass-producing aligned CNTs at lower cost.
    • 具有用于容纳形成有金属催化剂膜的基板(2)的反应室(3)和用于供给原料气体(9)的装置(气体供给管(5,6))的装置(CVD装置(1))和 催化剂活化材料(10)进入反应室(3),用于制造沿着与基板(2)的催化剂膜表面(2a)垂直的方向排列的CNT,其中用于供应原料气体(9)和 催化剂活化材料(10)在基板(2)的面向催化剂膜表面(2a)的位置处具有多个喷射孔,并且喷射孔的喷射方向被调整为从 金属催化剂膜。 这可以提供能够以更低成本批量生产对准的CNT的CNT的制造技术。
    • 8. 发明申请
    • APPARATUS AND METHOD FOR PRODUCING ALIGNED CARBON-NANOTUBE AGGREGATES
    • 用于生产对准的碳纳米管聚集体的装置和方法
    • US20100196600A1
    • 2010-08-05
    • US12679869
    • 2009-04-02
    • Akiyoshi ShibuyaKeiichi KawataKohei ArakawaKenji HataMotoo Yumura
    • Akiyoshi ShibuyaKeiichi KawataKohei ArakawaKenji HataMotoo Yumura
    • C23C16/44C23C16/00
    • C23C16/26B82Y30/00B82Y40/00C01B32/162C01B32/164C01B2202/08C01P2004/13C23C16/0281
    • An apparatus of the present invention for producing an aligned carbon-nanotube aggregate is an apparatus for producing an aligned carbon-nanotube aggregate by synthesizing the aligned carbon-nanotube aggregate on a base material having a catalyst on a surface thereof, the apparatus including: a formation unit that processes a formation step of causing an environment surrounding the catalyst to be an environment of a reducing gas and heating at least either the catalyst or the reducing gas; a growth unit that processes a growth step of synthesizing the aligned carbon-nanotube aggregate by causing the environment surrounding the catalyst to be an environment of a raw material gas and by heating at least either the catalyst or the raw material gas; and a transfer unit that transfers the base material at least from the formation unit to the growth unit. Thus provided is a production apparatus and a production method that are capable of improving efficiency in the production of aligned CNT aggregates by preventing a decrease in production volume and deterioration in quality of aligned CNT aggregates in serial production and by making it easy to increase the size of the apparatus.
    • 本发明的用于制造取向碳纳米管集合体的装置是通过在其表面具有催化剂的基材上合成取向的碳纳米管集合体来制造排列的碳纳米管集合体的装置,该装置包括: 处理使催化剂周围的环境成为还原气体的环境并且至少对催化剂或还原气体进行加热的形成工序; 生长单元,其通过使所述催化剂周围的环境成为原料气体的环境,并且通过加热所述催化剂或所述原料气中的至少一种来处理所述排列的碳纳米管集合体的合成步骤; 以及将基材至少从形成单元传递到生长单元的转印单元。 因此,提供了一种制造装置和制造方法,其能够通过在生产中防止生产量的降低和排列的CNT集合体的质量劣化,并且容易地增加尺寸而提高对准的CNT集合体的生产效率 的装置。