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    • 1. 发明申请
    • Semiconductor laser and method of making the same
    • 半导体激光器及其制作方法
    • US20090141764A1
    • 2009-06-04
    • US12289709
    • 2008-10-31
    • Hideki YagiToshio NomaguchiKenji Hiratsuka
    • Hideki YagiToshio NomaguchiKenji Hiratsuka
    • H01S5/22H01L21/02
    • H01S5/2231H01S5/0425H01S5/2213H01S5/2214H01S5/222
    • In the method of making a semiconductor laser, a semiconductor region is grown on an active layer, and a part of the semiconductor region is etched to form a ridge structure. An insulating film is formed over the ridge structure, and a resin layer of photosensitive material is formed to bury the ridge structure. A cured resin portion and an uncured resin portion are formed in the resin layer by performing lithographic exposure of the resin layer, and the uncured resin portion is on the top of the ridge structure. The uncured resin portion is removed to form a dent which is provided on the top of the ridge structure. An overall surface of the cured resin portion and dent is etched to form an etched resin layer. An opening is formed in the etched resin layer by thinning the cured resin portion, and a part of the insulating film is exposed in the opening of the etched resin layer. The part of the insulating film is etched using the etched resin layer as a mask to form an opening in the insulating film. An electrode is formed over the ridge structure and the etched resin layer.
    • 在制造半导体激光器的方法中,半导体区域在有源层上生长,并且半导体区域的一部分被蚀刻以形成脊结构。 在脊结构上形成绝缘膜,形成感光材料的树脂层以埋设脊结构。 通过进行树脂层的光刻曝光,在树脂层中形成固化树脂部分和未固化的树脂部分,未固化的树脂部分在脊部结构的顶部。 去除未固化的树脂部分以形成设置在脊结构的顶部上的凹陷。 将固化的树脂部分和凹陷的整个表面蚀刻以形成蚀刻的树脂层。 通过使固化的树脂部分变薄,在蚀刻的树脂层中形成开口,并且绝缘膜的一部分暴露在蚀刻的树脂层的开口中。 使用蚀刻树脂层作为掩模来蚀刻绝缘膜的一部分,以在绝缘膜中形成开口。 在脊结构和蚀刻树脂层上形成电极。
    • 2. 发明授权
    • Semiconductor laser and method of making the same
    • 半导体激光器及其制作方法
    • US07947520B2
    • 2011-05-24
    • US12289709
    • 2008-10-31
    • Hideki YagiToshio NomaguchiKenji Hiratsuka
    • Hideki YagiToshio NomaguchiKenji Hiratsuka
    • H01L21/02
    • H01S5/2231H01S5/0425H01S5/2213H01S5/2214H01S5/222
    • In the method of making a semiconductor laser, a semiconductor region is grown on an active layer, and a part of the semiconductor region is etched to form a ridge structure. An insulating film is formed over the ridge structure, and a resin layer of photosensitive material is formed to bury the ridge structure. A cured resin portion and an uncured resin portion are formed in the resin layer by performing lithographic exposure of the resin layer, and the uncured resin portion is on the top of the ridge structure. The uncured resin portion is removed to form a dent which is provided on the top of the ridge structure. An overall surface of the cured resin portion and dent is etched to form an etched resin layer. An opening is formed in the etched resin layer by thinning the cured resin portion, and a part of the insulating film is exposed in the opening of the etched resin layer. The part of the insulating film is etched using the etched resin layer as a mask to form an opening in the insulating film. An electrode is formed over the ridge structure and the etched resin layer.
    • 在制造半导体激光器的方法中,半导体区域在有源层上生长,并且半导体区域的一部分被蚀刻以形成脊结构。 在脊结构上形成绝缘膜,形成感光材料的树脂层以埋设脊结构。 通过进行树脂层的光刻曝光,在树脂层中形成固化树脂部分和未固化的树脂部分,未固化的树脂部分在脊部结构的顶部。 去除未固化的树脂部分以形成设置在脊结构的顶部上的凹陷。 将固化的树脂部分和凹陷的整个表面蚀刻以形成蚀刻的树脂层。 通过使固化的树脂部分变薄,在蚀刻的树脂层中形成开口,并且绝缘膜的一部分暴露在蚀刻的树脂层的开口中。 使用蚀刻树脂层作为掩模来蚀刻绝缘膜的一部分,以在绝缘膜中形成开口。 在脊结构和蚀刻树脂层上形成电极。
    • 4. 发明授权
    • Composite laser rod, fabricating method thereof, and laser device therewith
    • 复合激光棒及其制造方法及激光装置
    • US07496125B2
    • 2009-02-24
    • US11561301
    • 2006-11-17
    • Hikaru KoutaYoshikazu SuzukiShuetsu KudoMasaki TsunekaneKatsuji MukaiharaTakagimi YanagitaniHideki Yagi
    • Hikaru KoutaYoshikazu SuzukiShuetsu KudoMasaki TsunekaneKatsuji MukaiharaTakagimi YanagitaniHideki Yagi
    • H01S3/14H01S3/07
    • H01S3/061H01S3/025H01S3/0407H01S3/042H01S3/0612H01S3/08095H01S3/0941H01S3/09415
    • As a composite laser rod capable of satisfying the positional stability and output stability of a laser beam, a laser rod in which a laser active element is doped is intimately inserted into a hollow portion of a non-doped ceramic pipe that has a crystal structure the same as the laser rod followed by baking so as to remove a gap and strain at an interface between the laser rod and the ceramic pipe after the baking further followed by polishing a surface of the ceramic pipe to form a ceramic skin layer, and thereby a composite laser rod is formed. In the composite laser rod, an influence due to fluctuation in the cooling capacity of cooling water or a heat sink is averaged by a non-doped skin layer, temperature fluctuation of the laser rod is suppressed, and an influence of vibration from the cooling water or a cooling fan can be suppressed. When the refractive index of the laser rod is made higher than that of the ceramic pipe, a high efficiency oscillation can be realized, and furthermore when the thermal conductivity of the ceramic pipe is made higher than that of the laser rod, the thermal lens effect can be alleviated.
    • 作为能够满足激光的位置稳定性和输出稳定性的复合激光棒,将激光激光元件掺杂的激光棒紧密地插入到具有晶体结构的非掺杂陶瓷管的中空部分 与激光棒相同,随后烘烤,以便在烘烤之后除去激光棒和陶瓷管之间的界面处的间隙和应变,然后对陶瓷管的表面进行抛光以形成陶瓷表皮层,由此 形成复合激光棒。 在复合激光棒中,由于冷却水或散热器的冷却能力的波动引起的影响由非掺杂表层平均化,激光棒的温度波动被抑制,来自冷却水的振动的影响 或者可以抑制冷却风扇。 当激光棒的折射率高于陶瓷管的折射率时,可以实现高效率的振荡,此外,当陶瓷管的导热率高于激光棒的热导率时,热透镜效应 可以缓解。
    • 10. 发明授权
    • Multi-channel optical waveguide receiver
    • 多通道光波导接收机
    • US08811830B2
    • 2014-08-19
    • US13609591
    • 2012-09-11
    • Yoshihiro YonedaHideki YagiNaoko Inoue
    • Yoshihiro YonedaHideki YagiNaoko Inoue
    • H04B10/00H04B10/06
    • G02B6/12004G02B6/4279H01L2224/05554H01L2224/48137H01L2224/49175H01L2924/30107H01L2924/3011H01L2924/00
    • A multi-channel optical waveguide receiver includes an optical input port; an optical branching unit; light-receiving elements having bias electrodes and signal electrodes; optical waveguides being optically coupled between the optical branching unit and the light-receiving elements; capacitors electrically connected between the bias electrodes and a reference potential, the capacitors and the bias electrodes being connected through interconnection patterns; and a signal amplifier including input electrodes. The optical branching unit, the light-receiving elements, the optical waveguides, and the capacitors are formed on a single substrate, the substrate having an edge extending in a first direction. The signal amplifier and the substrate are arranged in a second direction crossing the first direction. The input electrodes and the signal electrodes are arranged along the edge of the substrate. Each of the signal electrodes of the light-receiving elements is electrically connected through a bonding wire to the input electrode.
    • 多通道光波导接收机包括光输入端口; 光分支单元; 具有偏置电极和信号电极的光接收元件; 光学波导光耦合在光学分支单元和光接收元件之间; 电连接在偏置电极和参考电位之间的电容器,电容器和偏置电极通过互连图形连接; 以及包括输入电极的信号放大器。 光分路单元,光接收元件,光波导和电容器形成在单个基板上,该基板具有沿第一方向延伸的边缘。 信号放大器和衬底沿与第一方向交叉的第二方向布置。 输入电极和信号电极沿着基板的边缘布置。 光接收元件的每个信号电极通过接合线电连接到输入电极。