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    • 4. 发明授权
    • On-chip radial cavity power divider/combiner
    • 片上径向腔功率分配器/组合器
    • US08643191B2
    • 2014-02-04
    • US13358792
    • 2012-01-26
    • Hanyi DingPinping SunGuoan WangWayne H. Woods, Jr.
    • Hanyi DingPinping SunGuoan WangWayne H. Woods, Jr.
    • H01L23/48H01L23/52H01L29/40
    • H01L23/481H01L23/66H01L2224/16225H01L2924/1305H01L2924/15311H01L2924/00
    • Disclosed is a chip with a power divider/combiner, a module incorporating the chip and associated methods. The divider/combiner comprises first and second metal layers on opposite sides of a substrate. Interconnects extend through the substrate and comprise: a first interconnect, second interconnects annularly arranged about the first interconnect and third interconnects annularly arranged about the second interconnects. Each interconnect comprises one or more through silicon vias lined/filled with a conductor. For a power divider, an opening in the first metal layer at the first interconnect comprises an input port for receiving power and openings in the first or second metal layer at the second interconnects comprise output ports for applying power to other devices. For a power combiner, openings in the first or second metal layer at the second interconnects comprise the input ports and an opening in the first metal layer at the first interconnect comprises an output port.
    • 公开了具有功率分配器/组合器的芯片,包括芯片的模块和相关联的方法。 分隔器/组合器包括在衬底的相对侧上的第一和第二金属层。 互连件延伸穿过衬底并且包括:第一互连,围绕第一互连环形布置的第二互连和围绕第二互连环形布置的第三互连。 每个互连包括一个或多个内衬/填充有导体的通孔硅通孔。 对于功率分配器,第一互连处的第一金属层中的开口包括用于接收功率的输入端口,并且在第二互连处的第一或第二金属层中的开口包括用于向其它器件施加电力的输出端口。 对于功率组合器,在第二互连处的第一或第二金属层中的开口包括输入端口,并且在第一互连处的第一金属层中的开口包括输出端口。
    • 5. 发明申请
    • ON-CHIP RADIAL CAVITY POWER DIVIDER/COMBINER
    • 片上径向辐射功率分配器/组合器
    • US20130193584A1
    • 2013-08-01
    • US13358792
    • 2012-01-26
    • Hanyi DingPinping SunGuoan WangWayne H. Woods, JR.
    • Hanyi DingPinping SunGuoan WangWayne H. Woods, JR.
    • H01L23/48H01L21/768
    • H01L23/481H01L23/66H01L2224/16225H01L2924/1305H01L2924/15311H01L2924/00
    • Disclosed is a chip with a power divider/combiner, a module incorporating the chip and associated methods. The divider/combiner comprises first and second metal layers on opposite sides of a substrate. Interconnects extend through the substrate and comprise: a first interconnect, second interconnects annularly arranged about the first interconnect and third interconnects annularly arranged about the second interconnects. Each interconnect comprises one or more through silicon vias lined/filled with a conductor. For a power divider, an opening in the first metal layer at the first interconnect comprises an input port for receiving power and openings in the first or second metal layer at the second interconnects comprise output ports for applying power to other devices. For a power combiner, openings in the first or second metal layer at the second interconnects comprise the input ports and an opening in the first metal layer at the first interconnect comprises an output port.
    • 公开了具有功率分配器/组合器的芯片,包括芯片的模块和相关联的方法。 分隔器/组合器包括在衬底的相对侧上的第一和第二金属层。 互连件延伸穿过衬底并且包括:第一互连,围绕第一互连环形布置的第二互连和围绕第二互连环形布置的第三互连。 每个互连包括一个或多个内衬/填充有导体的通孔硅通孔。 对于功率分配器,第一互连处的第一金属层中的开口包括用于接收功率的输入端口,并且在第二互连处的第一或第二金属层中的开口包括用于向其它器件施加电力的输出端口。 对于功率组合器,在第二互连处的第一或第二金属层中的开口包括输入端口,并且在第一互连处的第一金属层中的开口包括输出端口。
    • 7. 发明授权
    • Micro-electro-mechanical system (MEMS) capacitive OHMIC switch and design structures
    • 微机电系统(MEMS)电容OHMIC开关和设计结构
    • US08592876B2
    • 2013-11-26
    • US13342689
    • 2012-01-03
    • Hanyi DingQizhi LiuAnthony K. Stamper
    • Hanyi DingQizhi LiuAnthony K. Stamper
    • H01L29/80
    • H01H1/0036B81B7/0006B81B2201/016G06F17/5063G06F17/5068H01P1/127
    • A micro-electro-mechanical system (MEMS), methods of forming the MEMS and design structures are provided. The method comprises forming a coplanar waveguide (CPW) comprising a signal electrode and a pair of electrodes on a substrate. The method comprises forming a first sacrificial material over the CPW, and a wiring layer over the first sacrificial material and above the CPW. The method comprises forming a second sacrificial material layer over the wiring layer, and forming insulator material about the first sacrificial material and the second sacrificial material. The method comprises forming at least one vent hole in the insulator material to expose portions of the second sacrificial material, and removing the first and second sacrificial material through the vent hole to form a cavity structure about the wiring layer and which exposes the signal line and pair of electrodes below the wiring layer. The vent hole is sealed with sealing material.
    • 提供了微机电系统(MEMS),形成MEMS和设计结构的方法。 该方法包括在衬底上形成包括信号电极和一对电极的共面波导(CPW)。 该方法包括在CPW上形成第一牺牲材料,以及在第一牺牲材料上方和CPW上方的布线层。 该方法包括在布线层上形成第二牺牲材料层,以及围绕第一牺牲材料和第二牺牲材料形成绝缘体材料。 该方法包括在绝缘体材料中形成至少一个通气孔以暴露第二牺牲材料的部分,以及通过通气孔去除第一和第二牺牲材料,以形成围绕布线层的空腔结构,并使信号线和 一对电极在布线层下方。 通气孔用密封材料密封。