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    • 1. 发明申请
    • STRUCTURE AND METHOD FOR IMPROVED SRAM INTERCONNECT
    • 改进SRAM互连的结构和方法
    • US20090186476A1
    • 2009-07-23
    • US12018440
    • 2008-01-23
    • Haining YangRobert C. Wong
    • Haining YangRobert C. Wong
    • H01L21/4763
    • H01L27/1104H01L21/84H01L27/0207H01L27/11H01L27/1203
    • A method of forming an improved static random access memory (SRAM) interconnect structure is provided. The method includes forming a sidewall spacer around a periphery of a patterned poly-silicon layer formed over a silicon layer of a semiconductor substrate; removing the patterned poly-silicon layer for exposing a portion of a cap layer; etching the exposed portion of the cap layer for revealing a portion of the silicon layer; etching the potion of the silicon layer, in which a portion of said silicon layer connects at least a portion of pull-down device of said SRAM to at least a portion of pull-up device of said SRAM; forming a gate oxide; and forming a gate conductor over the gate oxide. An interconnect structure is also provided.
    • 提供了形成改进的静态随机存取存储器(SRAM)互连结构的方法。 该方法包括在形成在半导体衬底的硅层上的图案化多晶硅层的周围形成侧壁隔离物; 去除图案化的多晶硅层以暴露盖层的一部分; 蚀刻盖层的暴露部分以露出硅层的一部分; 蚀刻硅层的一部分,其中所述硅层的一部分将所述SRAM的下拉器件的至少一部分连接到所述SRAM的上拉器件的至少一部分; 形成栅极氧化物; 以及在所述栅极氧化物上形成栅极导体。 还提供互连结构。
    • 3. 发明授权
    • Structure and method for improved SRAM interconnect
    • 用于改进SRAM互连的结构和方法
    • US07678658B2
    • 2010-03-16
    • US12018440
    • 2008-01-23
    • Haining YangRobert C. Wong
    • Haining YangRobert C. Wong
    • H01L21/20
    • H01L27/1104H01L21/84H01L27/0207H01L27/11H01L27/1203
    • A method of forming an improved static random access memory (SRAM) interconnect structure is provided. The method includes forming a sidewall spacer around a periphery of a patterned poly-silicon layer formed over a silicon layer of a semiconductor substrate; removing the patterned poly-silicon layer for exposing a portion of a cap layer; etching the exposed portion of the cap layer for revealing a portion of the silicon layer; etching the portion of the silicon layer, in which a portion of said silicon layer connects at least a portion of pull-down device of said SRAM to at least a portion of pull-up device of said SRAM; forming a gate oxide; and forming a gate conductor over the gate oxide. An interconnect structure is also provided.
    • 提供了形成改进的静态随机存取存储器(SRAM)互连结构的方法。 该方法包括在形成在半导体衬底的硅层上的图案化多晶硅层的周围形成侧壁隔离物; 去除图案化的多晶硅层以暴露盖层的一部分; 蚀刻盖层的暴露部分以露出硅层的一部分; 蚀刻硅层的部分,其中所述硅层的一部分将所述SRAM的下拉器件的至少一部分连接到所述SRAM的上拉器件的至少一部分; 形成栅极氧化物; 以及在所述栅极氧化物上形成栅极导体。 还提供互连结构。