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    • 10. 发明授权
    • Nanotube array and method for producing a nanotube array
    • 纳米管阵列及其制造方法
    • US07635867B2
    • 2009-12-22
    • US10476663
    • 2002-05-16
    • Andrew GrahamFranz HofmannJohannes KretzFranz KreuplRichard LuykenWolfgang Rösner
    • Andrew GrahamFranz HofmannJohannes KretzFranz KreuplRichard LuykenWolfgang Rösner
    • H01L31/0312
    • H01L51/0048B82Y10/00C01B32/05G01N27/127G11C13/025H01L51/0595
    • A nanotube array and a method for producing a nanotube array. The nanotube array has a substrate, a catalyst layer, which includes one or more subregions, on the surface of the substrate and at least one nanotube arranged on the surface of the catalyst layer, parallel to the surface of the substrate. The at least one nanotube being arranged parallel to the surface of the substrate results in a planar arrangement of at least one nanotube. Therefore, the nanotube array of the invention is suitable for coupling to conventional silicon microelectronics. Therefore, according to the invention it is possible for a nanotube array to be electronically coupled to macroscopic semiconductor electronics. Furthermore, the nanotube array according to the invention may have an electrically insulating layer between the substrate and the catalyst layer. This electrically insulating layer preferably has a topography which is such that the at least one nanotube rests on the electrically insulating layer at its end sections and is uncovered in its central section. As a result of the surface of the at least one nanotube being partly uncovered, the uncovered surface of the nanotube can be used as an active sensor surface. For example, the uncovered surface of the nanotube can come into operative contact with an atmosphere which surrounds the nanotube array. The electrical resistance of a nanotube changes significantly in the presence of certain gases. Thus because the nanotube is clear and uncovered, the nanotube array can be used in many sensor applications.
    • 纳米管阵列及其制造方法。 纳米管阵列具有衬底,催化剂层,其包括在衬底的表面上的一个或多个子区域,和布置在催化剂层表面上的平行于衬底表面的至少一个纳米管。 所述至少一个纳米管平行于衬底的表面布置,导致至少一个纳米管的平面布置。 因此,本发明的纳米管阵列适用于与传统的硅微电子耦合。 因此,根据本发明,可以将纳米管阵列电连接到宏观半导体电子器件。 此外,根据本发明的纳米管阵列可以在衬底和催化剂层之间具有电绝缘层。 该电绝缘层优选地具有使得至少一个纳米管在其端部部分处于电绝缘层上并且在其中心部分未被覆盖的形貌。 由于至少一个纳米管的表面部分未被覆盖,纳米管的未被覆盖的表面可以用作主动传感器表面。 例如,纳米管的未覆盖表面可以与围绕纳米管阵列的气氛进行操作接触。 在某些气体的存在下,纳米管的电阻显着变化。 因此,由于纳米管是透明和未覆盖的,所以纳米管阵列可用于许多传感器应用中。