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1. 发明授权

US07616312B2 Apparatus and method for probing integrated circuits using laser illumination 有权
标题翻译：使用激光照明探测集成电路的装置和方法
公开(公告)号：US07616312B2
公开(公告)日：2009-11-10
申请号：US11169423
申请日：2005-06-29
申请人： Steven Kasapi , Kenneth Wilsher , Gary Woods , William Lo , Radu Ispasoiu , Nagamani Nataraj , Nina Boiadjieva
发明人： Steven Kasapi , Kenneth Wilsher , Gary Woods , William Lo , Radu Ispasoiu , Nagamani Nataraj , Nina Boiadjieva
IPC分类号： G01B11/00
CPC分类号： G01R31/308 , G01R31/311
摘要： An apparatus and method for laser probing of a DUT at very high temporal resolution is disclosed. The system includes a CW laser source, a beam optics designed to point two orthogonally polarized beams at the same location on the DUT, optical detectors for detecting the reflected beams, collection electronics, and an oscilloscope. The beam optics defines a common-path polarization differential probing (PDP) optics. The common-path PDP optics divides the laser beam into two beams of orthogonal polarization. Due to the intrinsic asymmetry of a CMOS transistor, the interaction of the beams with the DUT result in different phase modulation in each beam. This difference can be investigated to study the response of the DUT to the stimulus signal.
摘要翻译：公开了一种以非常高的时间分辨率激光探测DUT的装置和方法。该系统包括CW激光源，设计用于在DUT上的相同位置处指向两个正交偏振光束的光束光学元件，用于检测反射光束的光学检测器，收集电子器件和示波器。光束光学器件定义了共路径偏振微分探测（PDP）光学器件。公共路径PDP光学将激光束分成两束正交极化。由于CMOS晶体管的固有不对称性，光束与DUT的相互作用在每个光束中产生不同的相位调制。可以研究这种差异来研究DUT对刺激信号的响应。

2. 发明授权

US07450245B2 Method and apparatus for measuring high-bandwidth electrical signals using modulation in an optical probing system 有权
标题翻译：用于在光学探测系统中使用调制测量高带宽电信号的方法和装置
公开(公告)号：US07450245B2
公开(公告)日：2008-11-11
申请号：US11436267
申请日：2006-05-17
申请人： Gary Woods , Steven Kasapi , Kenneth Wilsher
发明人： Gary Woods , Steven Kasapi , Kenneth Wilsher
IPC分类号： G01B9/02
CPC分类号： G01R31/308
摘要： A system for probing a DUT is provided, the system comprising a tunable or CW laser source, a modulator for modulating the output of the laser source, a beam optics designed to point a probing beam at a designated location on the DUT, optical detector for detecting the reflected beam, and collection and signal processing electronics. The system deciphers perturbations in the reflected beam by detecting beat frequency between operation frequency of the DUT and frequency of the modulation. In an alternative embodiment, the laser is CW and the modulation is applied to the optical detector.
摘要翻译：提供了一种用于探测DUT的系统，该系统包括可调谐或CW激光源，用于调制激光源的输出的调制器，被设计为将探测光束指向DUT上的指定位置的光束光学器件，用于检测反射光束，采集和信号处理电子元件。系统通过检测DUT的工作频率和调制频率之间的拍频来破译反射光束的扰动。在替代实施例中，激光是CW并且调制被应用于光学检测器。

3. 发明申请

US20050174248A1 Apparatus and method for determining voltage using optical observation 失效
标题翻译：使用光学观察确定电压的装置和方法
公开(公告)号：US20050174248A1
公开(公告)日：2005-08-11
申请号：US10845013
申请日：2004-05-14
申请人： Gary Woods , Steven Kasapi
发明人： Gary Woods , Steven Kasapi
IPC分类号： G08B21/00
CPC分类号： G01R31/311
摘要： A beacon circuit enabling study of active elements in an integrated circuit is disclosed. The beacon circuit may be integral to a DUT to be tested. The DUT is stimulated by a conventional ATE, so that its active devices are operating. The signal from the active device is sent to the beacon circuit which, in response to the signal, emits light having intensity that is proportional to the value of the signal. In one example, the beacon circuit is constructed as a voltage to current converter having its input connected to the node of interest and its output connected to a current to light converter. In one example, the current to light converter is implemented as a current mirror circuit. One beneficial implementation disclosed is the use of the beacon circuit for the study of voltage supply disturbances.
摘要翻译：公开了一种能够研究集成电路中的有源元件的信标电路。信标电路可以与待测试的DUT成为一体。 DUT由常规ATE激励，使其有源器件正在运行。来自有源器件的信号被发送到信标电路，信标电路响应于信号发射具有与信号值成比例的强度的光。在一个示例中，信标电路被构造为其电压到电流转换器，其输入连接到感兴趣的节点，并且其输出连接到电流到光转换器。在一个示例中，电流到光转换器被实现为电流镜电路。公开的一个有益实施是使用信标电路来研究电压干扰。

4. 发明申请

US20070002329A1 Laser probing system for integrated circuits 有权
标题翻译：集成电路激光探测系统
公开(公告)号：US20070002329A1
公开(公告)日：2007-01-04
申请号：US11169423
申请日：2005-06-29
申请人： Steven Kasapi , Kenneth Wilsher , Gary Woods , William Lo , Radu Ispasoiu , Nagamani Nataraj , Nina Boiadjieva
发明人： Steven Kasapi , Kenneth Wilsher , Gary Woods , William Lo , Radu Ispasoiu , Nagamani Nataraj , Nina Boiadjieva
IPC分类号： G01B9/02
CPC分类号： G01R31/308 , G01R31/311
摘要： An apparatus and method for laser probing of a DUT at very high temporal resolution is disclosed. The system includes a CW laser source, a beam optics designed to point two orthogonally polarized beams at the same location on the DUT, optical detectors for detecting the reflected beams, collection electronics, and an oscilloscope. The beam optics defines a common-path polarization differential probing (PDP) optics. The common-path PDP optics divides the laser beam into two beams of orthogonal polarization. Due to the intrinsic asymmetry of a CMOS transistor, the interaction of the beams with the DUT result in different phase modulation in each beam. This difference can be investigated to study the response of the DUT to the stimulus signal.
摘要翻译：公开了一种以非常高的时间分辨率激光探测DUT的装置和方法。该系统包括CW激光源，设计用于在DUT上的相同位置处指向两个正交偏振光束的光束光学元件，用于检测反射光束的光学检测器，收集电子器件和示波器。光束光学器件定义了共路径偏振微分探测（PDP）光学器件。公共路径PDP光学将激光束分成两束正交极化。由于CMOS晶体管的固有不对称性，光束与DUT的相互作用在每个光束中产生不同的相位调制。可以研究这种差异来研究DUT对刺激信号的响应。

5. 发明申请

US20070002328A1 Method and apparatus for measuring high-bandwidth electrical signals using modulation in an optical probing system 有权
标题翻译：用于在光学探测系统中使用调制测量高带宽电信号的方法和装置
公开(公告)号：US20070002328A1
公开(公告)日：2007-01-04
申请号：US11436267
申请日：2006-05-17
申请人： Gary Woods , Steven Kasapi , Kenneth Wilsher
发明人： Gary Woods , Steven Kasapi , Kenneth Wilsher
IPC分类号： G01B9/02
CPC分类号： G01R31/308
摘要： A system for probing a DUT is provided, the system comprising a tunable or CW laser source, a modulator for modulating the output of the laser source, a beam optics designed to point a probing beam at a designated location on the DUT, optical detector for detecting the reflected beam, and collection and signal processing electronics. The system deciphers perturbations in the reflected beam by detecting beat frequency between operation frequency of the DUT and frequency of the modulation. In an alternative embodiment, the laser is CW and the modulation is applied to the optical detector.
摘要翻译：提供了一种用于探测DUT的系统，该系统包括可调谐或CW激光源，用于调制激光源的输出的调制器，被设计为将探测光束指向DUT上的指定位置的光束光学器件，用于检测反射光束，采集和信号处理电子元件。系统通过检测DUT的工作频率和调制频率之间的拍频来破译反射光束的扰动。在替代实施例中，激光是CW并且调制被应用于光学检测器。

6. 发明申请

US20050002028A1 Time resolved emission spectral analysis system 审中-公开
标题翻译：时间分辨发射光谱分析系统
公开(公告)号：US20050002028A1
公开(公告)日：2005-01-06
申请号：US10613592
申请日：2003-07-02
申请人： Steven Kasapi , Gary Woods , John Field
发明人： Steven Kasapi , Gary Woods , John Field
IPC分类号： G01R11/24 , G01J3/30 , G01J3/28
CPC分类号： G01R31/311
摘要： A system for temporal and spectral resolved detection of photon emission from an integrated circuit is disclosed. A DUT is stimulated by a conventional ATE, so that its active devices emit light. The signal from the ATE is also sent to the system's computer as a synchronization signal. The light emitted from the switching devices is passed through a wavelength filter. Selected bands of wavelengths are then passed to respective detector(s) and the detector(s) response with respect to the time correlated ATE stimulus is studied.
摘要翻译：公开了一种用于从集成电路进行光子发射的时间和光谱解析检测的系统。 DUT由传统的ATE激励，使其有源器件发光。来自ATE的信号也作为同步信号发送到系统的计算机。从开关装置发出的光通过波长滤波器。然后将所选波长的波段传递到相应的检测器，并且研究相对于时间相关的ATE刺激的检测器响应。

7. 发明申请

US20110101991A1 Techniques Employing Light-Emitting Circuits 有权
标题翻译：采用发光电路的技术
公开(公告)号：US20110101991A1
公开(公告)日：2011-05-05
申请号：US12909127
申请日：2010-10-21
申请人： Martin L. Villafana , Michael DiBattista , Gary Woods
发明人： Martin L. Villafana , Michael DiBattista , Gary Woods
IPC分类号： G01R31/02 , H05B37/02
CPC分类号： H05B33/0896 , G01R31/311 , H01L25/18 , H01L2224/16145 , H01L2225/06513
摘要： A light-emitting circuit includes a light-emitting transistor and a voltage supply in communication with the light-emitting transistor to bias the light-emitting transistor in a reasonably bright state. A reasonably bright state is a state in which light emission approaches the greatest for a given drain-source current in the light-emitting transistor. In one aspect, the light-emitting circuit is in communication with a device under test and configured so that the light-emitting transistor emits photons in a manner indicative of an operation of the device under test. The light-emitting circuit may be disposed in a first semiconductor layer, and the device under test may be disposed in a second semiconductor layer. Further, the first semiconductor layer may be included in a first die, and the second semiconductor layer may be included in a second die.
摘要翻译：发光电路包括发光晶体管和与发光晶体管连通的电压源，以将发光晶体管偏置在相当明亮的状态。相当明亮的状态是发光晶体管中给定的漏 - 源电流的发光接近最大的状态。在一个方面，发光电路与被测器件通信，并被配置为使得发光晶体管以指示被测器件的操作的方式发射光子。发光电路可以设置在第一半导体层中，并且被测器件可以设置在第二半导体层中。此外，第一半导体层可以包括在第一管芯中，并且第二半导体层可以包括在第二管芯中。

8. 发明授权

US06355494B1 Method and apparatus for controlling material removal from a semiconductor substrate using induced current endpointing 有权
公开(公告)号：US06355494B1
公开(公告)日：2002-03-12
申请号：US09702052
申请日：2000-10-30
申请人： Richard H. Livengood , Paul Winer , Gary Woods , Michael DiBattista
发明人： Richard H. Livengood , Paul Winer , Gary Woods , Michael DiBattista
IPC分类号： H01L2166
CPC分类号： H01L21/67253 , H01L22/12 , H01L22/26
摘要： A method and apparatus for controlling the removal of material from a semiconductor substrate in an integrated circuit fabrication process is disclosed. The method and apparatus utilize a light source or charged particle beam (electron or ion beam) to induce a current in at least one P-N junction formed in the semiconductor substrate. The induced current is monitored during the removal of material and the process is stopped or endpointed in response to the induced current making a predetermined transition.

9. 发明授权

US09521306B2 Apparatus and method for compressive imaging and sensing through multiplexed modulation via spinning disks 有权
标题翻译：用于通过旋转盘复用调制的压缩成像和感测的装置和方法
公开(公告)号：US09521306B2
公开(公告)日：2016-12-13
申请号：US14811080
申请日：2015-07-28
申请人： Kevin F Kelly , Richard G Baraniuk , Gary Woods , Ting Sun , Matthew Turner
发明人： Kevin F Kelly , Richard G Baraniuk , Gary Woods , Ting Sun , Matthew Turner
IPC分类号： H04N5/225 , H04N3/08 , H04N5/335 , H03M7/30 , H04N19/90
CPC分类号： H04N5/2254 , H03M7/3062 , H04N3/08 , H04N5/335 , H04N19/90
摘要： Compressive imaging apparatus employing multiple modulators in various optical schemes to generate the modulation patterns before the signal is recorded at a detector. The compressive imaging apparatus is equally valid when applying compressive imaging to structured light embodiments where the placement is shifted from the acquisition path between the subject and the detector into the illumination path between the source and the subject to be imaged.
摘要翻译：在各种光学方案中采用多个调制器的压缩成像装置在信号被记录在检测器之前产生调制图案。当将压缩成像应用于结构化光实施例时，压缩成像装置同样有效，其中放置从被摄体和检测器之间的采集路径移动到源和待成像对象之间的照明路径。

10. 发明申请

US20160014310A1 Apparatus And Method For Compressive Imaging And Sensing Through Multiplexed Modulation Via Spinning Disks 有权
标题翻译：通过旋转磁盘进行多路调制的压缩成像和感应的装置和方法
公开(公告)号：US20160014310A1
公开(公告)日：2016-01-14
申请号：US14811080
申请日：2015-07-28
申请人： Kevin F. Kelly , Richard G. Baraniuk , Gary Woods , Ting Sun , Matthew Turner
发明人： Kevin F. Kelly , Richard G. Baraniuk , Gary Woods , Ting Sun , Matthew Turner
IPC分类号： H04N5/225 , H04N5/335 , H04N3/08
CPC分类号： H04N5/2254 , H03M7/3062 , H04N3/08 , H04N5/335 , H04N19/90
摘要： Compressive imaging apparatus employing multiple modulators in various optical schemes to generate the modulation patterns before the signal is recorded at a detector. The compressive imaging apparatus is equally valid when applying compressive imaging to structured light embodiments where the placement is shifted from the acquisition path between the subject and the detector into the illumination path between the source and the subject to be imaged.
摘要翻译：在各种光学方案中采用多个调制器的压缩成像装置在信号被记录在检测器之前产生调制图案。当将压缩成像应用于结构化光实施例时，压缩成像装置同样有效，其中放置从被摄体和检测器之间的采集路径移动到源和待成像对象之间的照明路径。

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