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    • 6. 发明申请
    • Bottom anode Schottky diode structure and method
    • 底部阳极肖特基二极管的结构和方法
    • US20100133644A1
    • 2010-06-03
    • US12653345
    • 2009-12-11
    • Francois Hébert
    • Francois Hébert
    • H01L29/872H01L21/30
    • H01L29/872H01L29/402H01L29/66143H01L29/861H01L2924/0002H01L2924/00
    • This invention discloses a bottom-anode Schottky (BAS) diode that includes an anode electrode disposed on a bottom surface of a semiconductor substrate. The bottom-anode Schottky diode further includes a sinker dopant region disposed at a depth in the semiconductor substrate extending substantially to the anode electrode disposed on the bottom surface of the semiconductor and the sinker dopant region covered by a buried Schottky barrier metal functioning as a Schottky anode. The BAS diode further includes a lateral cathode region extended laterally from a cathode electrode near a top surface of the semiconductor substrate opposite the Schottky barrier metal wherein the lateral cathode region doped with an opposite dopant from the sinker dopant region and interfacing the sinker dopant region whereby a current path is formed from the cathode electrode to the anode electrode through the lateral cathode region and the sinker dopant region in applying a forward bias voltage and the sinker dopant region depleting the cathode region in applying a reverse bias voltage for blocking a leakage current.
    • 本发明公开了一种底阳极肖特基(BAS)二极管,其包括设置在半导体衬底的底表面上的阳极电极。 底部阳极肖特基二极管还包括设置在半导体衬底中的深度处的沉降片掺杂剂区域,其基本上延伸到设置在半导体底表面上的阳极电极和由用作肖特基的埋地肖特基势垒金属覆盖的沉降弧掺杂区域 阳极。 BAS二极管进一步包括从阴极延伸到靠近半导体衬底的与肖特基势垒金属相对的顶表面的横向阴极区域,其中侧向阴极区域掺杂有与沉降弧掺杂区域相反的掺杂剂,并且与沉淀弧掺杂区域接合,由此 在施加正偏压时,通过横向阴极区和沉降弧掺杂区形成电流路径,并且在施加用于阻断泄漏电流的反向偏置电压时消耗阴极区的沉降掺杂区。