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    • 1. 发明授权
    • Shuttle valve having two drives
    • 换向阀有两个驱动器
    • US08424843B2
    • 2013-04-23
    • US11879500
    • 2007-07-18
    • Florian Ehrne
    • Florian Ehrne
    • F16K1/16
    • F16K51/02
    • The invention relates to a shuttle valve for interrupting a flow path (F), comprising a valve housing (1) having a valve seat (4) surrounding an opening (3) for the flow path (F). A valve disc (5) is arranged on a rotatably mounted shaft (6). By means of a drive unit (7), the valve disc (5) can be swiveled along a defined displacement curve (K1; K2; K3) from an opened position and leaving the flow path (F) unobstructed over the cross-section of the first opening (3) by a rotational movement about the pivot axis (8) of the shaft (6) and can be moved by a linear movement parallel to the pivot axis (8) in the direction of the valve seat (4) into a closed position so that the flow path (F) is sealed gas-tight by a sealing contact between the valve disc (5) and the valve seat (4). According to the invention, the drive unit (7) has a first drive (9a) for carrying out the rotational movement about the pivot axis (8) and a second drive (10a) for carrying out the linear movement parallel to the pivot axis (8). By means of a control unit (11), the first drive (9a) and the second drive (10a) can be actuated so that a variable displacement curve (K1; K2; K3) can be produced.
    • 本发明涉及一种用于中断流路(F)的梭阀,包括具有围绕流路(F)的开口(3)的阀座(4)的阀壳体(1)。 阀盘(5)布置在可旋转地安装的轴(6)上。 通过驱动单元(7),阀盘(5)可以沿着限定的位移曲线(K1; K2; K3)从打开位置旋转,并使流动路径(F)在横截面 所述第一开口(3)通过围绕所述轴(6)的枢转轴线(8)的旋转运动,并且可以沿着所述阀座(4)的方向平行于所述枢转轴线(8)的直线运动移动到 关闭位置,使得流路(F)通过阀盘(5)和阀座(4)之间的密封接触而气密地密封。 根据本发明,驱动单元(7)具有用于执行围绕枢转轴线(8)的旋转运动的第一驱动器(9a)和用于执行平行于枢转轴线的线性运动的第二驱动器(10a) 8)。 通过控制单元(11),可以致动第一驱动器(9a)和第二驱动器(10a),从而可以产生可变位移曲线(K1; K2; K3)。
    • 2. 发明申请
    • SLIDING VALVE
    • 滑阀
    • US20110057136A1
    • 2011-03-10
    • US12943353
    • 2010-11-10
    • Florian Ehrne
    • Florian Ehrne
    • F16K1/00
    • F16K51/02F16K3/182
    • A sliding valve including a valve body (1) with a wall having a valve opening (3) and a valve seat (4) surrounding the valve opening (3), a valve plate (5), at least one valve rod (8) that can move in the axial direction and can be moved for closing the valve starting from a first position in which the valve plate (5) assumes its open position, to a second position in which the valve plate (5) assumes an intermediate position covering the valve opening (3) but lifted from the valve seat (4), into a third position in which the valve plate (5) assumes its closed position. At least one lifting element (10, 11) moves the valve plate (5) from its intermediate position into its closed position, and at least one support unit (12) with at least one front and at least one rear support element (14, 13) that interact in the closed position of the valve plate (5) with at least one valve-body-fixed, front support element and at least one valve-body-fixed, rear support element (16, 15). In the second position of the valve rod (8), either the rear support elements (13, 15) or the front support elements (14, 16) are in engagement and the other of these support elements (14, 16; 13, 15) are spaced apart from each other. When moving the valve rod (8) from its second to its third position, the support unit (12) pivots about a rotational axis (17) from a starting position in which the other support elements (14, 16; 13, 15) are spaced apart from each other into an end position in which the other support elements (14, 16; 13, 15) contact each other.
    • 一种滑阀,包括具有阀开口(3)的阀体和围绕阀开口(3)的阀座(4)的阀体(1),阀板(5),至少一个阀杆(8) 其可以在轴向方向上移动并且可以从阀板(5)处于其打开位置的第一位置开始到阀门(5)呈中间位置覆盖的第二位置,从而关闭阀 阀开口(3)但从阀座(4)提升到阀板(5)处于其关闭位置的第三位置。 至少一个提升元件(10,11)将阀板(5)从其中间位置移动到其关闭位置,并且至少一个支撑单元(12)具有至少一个前部和至少一个后部支撑元件(14, 13),其在阀板(5)的关闭位置与至少一个阀体固定的前支撑元件和至少一个阀体固定的后支撑元件(16,15)相互作用。 在阀杆(8)的第二位置,后支撑元件(13,15)或前支撑元件(14,16)处于啮合状态,并且这些支撑元件(14,16; 13,15 )彼此间隔开。 当将阀杆(8)从第二位置移动到其第三位置时,支撑单元(12)围绕旋转轴线(17)从其他支撑元件(14,16; 13,15)的起始位置枢转 彼此间隔开成使其他支撑元件(14,16; 13,15)彼此接触的终止位置。
    • 3. 发明授权
    • Valve device
    • 阀门装置
    • US07228687B2
    • 2007-06-12
    • US10916698
    • 2004-08-12
    • Florian Ehrne
    • Florian Ehrne
    • B01D8/00
    • F04B37/08
    • A valve device, according to the invention, for connecting to a cryopump, wherein the valve device comprises a body with a through-channel and a connection flange at one end of the through-channel for connecting to a backing pump connection flange of the cryopump; a pressure relief valve which opens when an overpressure in the through-channel exceeds a limiting valve and which lets this overpressure out of the through-channel; a purge gas line in which a purge gas valve is arranged and which serves to supply a purge gas to a supply line of the cryopump during a regeneration process of the cryopump; wherein an end portion of the purge gas line by which the purge gas line can be connected to the supply line of the cryopump runs within the through-channel to the area of the end of the through-channel situated in the connection flange. A pump arrangement according to the invention is also disclosed.
    • 根据本发明的用于连接到低温泵的阀装置,其中阀装置包括具有通道的主体和在通道的一端处的连接凸缘,用于连接到低温泵的背衬泵连接凸缘 ; 当通流通道中的超压超过限制阀并且使过压通过通道时打开的减压阀; 吹扫气体管线,其中布置有吹扫气体阀,并且用于在低温泵的再生过程期间向吹扫气体供应吹扫气体; 其中吹扫气体管线的端部可以连接到低温泵的供应管线,吹扫气体管线在通道内延伸到位于连接法兰中的通道的端部区域。 还公开了根据本发明的泵装置。
    • 5. 发明授权
    • Mounting of a valve plate on a valve rod
    • 将阀板安装在阀杆上
    • US08678344B2
    • 2014-03-25
    • US13009147
    • 2011-01-19
    • Florian EhrneThomas Blecha
    • Florian EhrneThomas Blecha
    • F16K3/314
    • F16K3/314F16K3/188F16K51/02
    • A mounting of a valve plate (1) on a valve rod (2) using a cross member (3) extending transversely with respect to the valve rod (2) is provided. The cross member (3) is connected at a central connecting point (4) to the valve rod (2) and is connected at least two lateral connecting points (5, 6), which are situated on both sides of the central connecting point (4), to the valve plate (1). The cross member (3) has a spacing (a) from the valve plate (1) in a central section (17) which comprises the central connecting point (4) and sections of the cross member (3) adjacent to the central connecting point (4) at both sides. By a twisting of the cross member (3), the valve plate (1) can be pivoted relative to the valve rod (2) about a pivot axis (19) which is at right angles to the valve rod.
    • 提供了使用相对于阀杆(2)横向延伸的横向构件(3)将阀板(1)安装在阀杆(2)上。 横向构件(3)在中心连接点(4)处连接到阀杆(2),并且连接至少两个位于中心连接点两侧的横向连接点(5,6) 4)到阀板(1)。 横向构件(3)在中心部分(17)中具有与阀板(1)的间隔(a),其包括中心连接点(4)和与中心连接点相邻的横向构件(3)的部分 (4)两侧。 通过横向构件(3)的扭转,阀板(1)能够相对于阀杆(2)围绕与阀杆成直角的枢转轴线(19)枢转。
    • 6. 发明申请
    • VACUUM VALVE
    • 真空阀
    • US20110175011A1
    • 2011-07-21
    • US13119530
    • 2009-09-21
    • Florian EhrneThomas Blecha
    • Florian EhrneThomas Blecha
    • F16K51/02
    • F16K51/02F16K3/182
    • A vacuum valve including a wall (1) having a valve opening (2) surrounded by a valve seat (4), at least one valve plate (5), which is disposed in a vacuum region of the vacuum valve and can be moved from an open position in a longitudinal direction (6) into an intermediate position, and from the intermediate position in a transverse direction (7) perpendicular to the longitudinal direction (6) into a closed position. At least one valve rod (12), which carries the valve plate (5), is led through the vacuum region of the vacuum valve and can be displaced relative to the wall (1) in the longitudinal direction (6) located parallel to the longitudinal axis (14) of the valve rod (12), and also in the transverse direction (7). Longitudinal and transverse drive devices (15, 15′, 16, 16′) are disposed outside of the vacuum region of the vacuum valve, and the drive devices can displace the valve rod (12) in the longitudinal direction (6) and in the transverse direction (7) in order to adjust the valve plate (5). A bearing unit (17, 17′) is provided, which is located outside of the vacuum region of the vacuum valve and rigidly connected to the wall (1) and by which a guide unit (20, 20′) that displaceably guides the valve rod (12) in the longitudinal direction (6) is guided displaceably in the transverse direction (7).
    • 一种真空阀,包括具有由阀座(4)围绕的阀开口(2)的壁(1),至少一个阀板(5),其设置在真空阀的真空区域中并且可以从 在纵向方向(6)处于中间位置的打开位置,以及从垂直于纵向方向(6)的横向(7)的中间位置到关闭位置。 承载阀板(5)的至少一个阀杆(12)被引导通过真空阀的真空区域,并且可以在平行于阀板(5)的纵向(6)上相对于壁(1)移位。 阀杆(12)的纵向轴线(14),以及横向(7)。 纵向和横向驱动装置(15,15',16,16')设置在真空阀的真空区域的外部,并且驱动装置可沿纵向方向(6)移动阀杆(12) 横向(7)以调节阀板(5)。 设置有一个轴承单元(17,17'),该轴承单元位于真空阀的真空区域的外部并且刚性地连接到壁(1)上,通过该轴承单元(20,20')可移动地引导阀 沿纵向(6)的杆(12)沿横向(7)可移动地被引导。
    • 7. 发明申请
    • VACUUM VALVE WITH GAS-TIGHT SHAFT PENETRATION
    • 真空阀具有气密性透气
    • US20110168937A1
    • 2011-07-14
    • US13062458
    • 2009-08-27
    • Florian Ehrne
    • Florian Ehrne
    • F16K27/00
    • F16K51/02F16J1/01F16J15/3212F16J15/322F16K1/2268F16K41/04Y10T137/71
    • The invention relates to a vacuum valve for interrupting, releasing or controlling a flowing medium in the interior (3) of the vacuum valve (1). A shaft (6) coupled to a valve drive (5) is routed gas-tight from the atmospheric area (4) to the interior (3) through a valve housing (2) by way of a sealing shaft penetration (20) so that a movement produced by the valve drive (5) can be transferred from the atmospheric area (4) to the interior (3) for the purposes of interrupting, releasing or controlling the flow. The shaft penetration (20) comprises a first seal ring (21) that concentrically surrounds the shaft (6) in a gas-sealing manner in the radial direction, a support surface (22) that faces in an axial direction with respect to the shaft (6), at least partially, against said support surface the first seal ring (21) abuts in a gas-tight sealing manner, a support ring (23) and a spring (25). An inner, conic segment (24) of the support ring (23) surrounds the first seal ring (21), at least partially. The spring (25) presses the support ring (23) axially in the direction toward the support surface (22) in such a way that the conic segment (24) elastically presses the first seal ring (21) pliably onto the support surface (22) and the shaft (6) with a substantially constant pressure force.
    • 本发明涉及一种用于在真空阀(1)的内部(3)中中断,释放或控制流动介质的真空阀。 联接到阀驱动器(5)的轴(6)通过密封轴穿透(20)通过阀壳体(2)从大气区域(4)气密地路由到内部(3),使得 为了中断,释放或控制流量,由阀驱动器(5)产生的运动可以从大气区域(4)传递到内部(3)。 所述轴贯穿件(20)包括以径向方式以气密方式同心地围绕所述轴(6)的第一密封环(21),相对于所述轴线在轴向方向上面对的支撑表面(22) (6)至少部分地抵靠所述支撑表面,所述第一密封环(21)以气密密封的方式邻接,支撑环(23)和弹簧(25)。 支撑环(23)的内部圆锥形段(24)至少部分地围绕第一密封环(21)。 弹簧(25)沿着朝向支撑表面(22)的方向轴向地按压支撑环(23),使得锥形段(24)将第一密封环(21)柔性地按压到支撑表面(22)上 )和轴(6)具有基本恒定的压力。
    • 8. 发明授权
    • Vacuum valve
    • 真空阀
    • US07011294B1
    • 2006-03-14
    • US10936163
    • 2004-09-08
    • Florian EhrneChristof BachmannFriedrich Geiser
    • Florian EhrneChristof BachmannFriedrich Geiser
    • F16K3/00
    • F16K3/0227F16K3/0218F16K3/14F16K51/02
    • A vacuum valve comprises a valve housing with a valve opening having a longitudinal axis and a valve seat, a valve plate which is displaceable in a straight line in a displacement direction between an open position in which it releases the valve opening and a closed position in which its contacts the valve seat of the valve housing and closes and seals the valve opening, this valve plate being arranged on at least one valve rod which is displaceable axial to the displacement of the valve plate, a flexible sealing ring which is arranged at a front side of the valve plate or at the valve seat of the valve housing, a sealing surface which is arranged at the valve seat of the valve housing or at the front side of the valve plate and which is contacted by the sealing ring in the closed position of the valve plate, wherein the sealing surface and the sealing ring are arranged in parallel planes which are inclined relative to the displacement direction of the valve plate around an axis extending at right angles to the displacement direction and at right angles to the longitudinal axis of the valve opening, and at least one sliding-spacing part which is arranged at the front side of the valve plate next to the sealing ring or sealing surface or at the valve seat next to the sealing surface or sealing ring and which forms a sliding bearing for the valve plate relative to the valve housing when closing the valve along a final section of the displacement path of the valve plate until the closed position of the valve plate is reached and which keeps the valve plate at a distance from the valve housing in the closed position of the valve plate and accordingly limits the pressing of the sealing ring.
    • 真空阀包括具有纵向轴线和阀座的阀开口的阀壳体,阀板,其在释放阀开口的打开位置和释放阀开口的打开位置之间在位移方向上以直线移位, 其与阀壳体的阀座接触并关闭并密封阀开口,该阀板布置在至少一个阀杆上,该阀杆可以与阀板的位移轴向移动;柔性密封环,其布置在 阀板的前侧或阀壳的阀座处的密封表面设置在阀壳体的阀座处或阀板的前侧,并且在密封环中与密封环接触 阀板的位置,其中密封表面和密封环布置成平行的平面,相对于围绕轴线延伸的阀板的位移方向倾斜 与所述阀开口的纵向轴线成直角并且与所述阀开口的纵向轴线成直角;以及至少一个滑动间隔部分,所述至少一个滑动间隔部分布置在所述阀板的前侧,靠近所述密封环或密封表面 阀座靠近密封表面或密封环,并且当沿着阀板的位移路径的最后部分关闭阀门时,阀板相对于阀壳体形成滑动轴承,直到阀板的关闭位置 并且在阀板的关闭位置中使阀板保持与阀壳体一定距离,从而限制了密封环的按压。
    • 9. 发明授权
    • Vacuum valve
    • 真空阀
    • US08672293B2
    • 2014-03-18
    • US13119530
    • 2009-09-21
    • Florian EhrneThomas Blecha
    • Florian EhrneThomas Blecha
    • F16K25/00F16K3/00
    • F16K51/02F16K3/182
    • A vacuum valve including a wall (1) having a valve opening (2) surrounded by a valve seat (4), at least one valve plate (5), which is disposed in a vacuum region of the vacuum valve and can be moved from an open position in a longitudinal direction (6) into an intermediate position, and from the intermediate position in a transverse direction (7) perpendicular to the longitudinal direction (6) into a closed position. At least one valve rod (12), which carries the valve plate (5), is led through the vacuum region of the vacuum valve and can be displaced relative to the wall (1) in the longitudinal direction (6) located parallel to the longitudinal axis (14) of the valve rod (12), and also in the transverse direction (7). Longitudinal and transverse drive devices (15, 15′, 16, 16′) are disposed outside of the vacuum region of the vacuum valve, and the drive devices can displace the valve rod (12) in the longitudinal direction (6) and in the transverse direction (7) in order to adjust the valve plate (5). A bearing unit (17, 17′) is provided, which is located outside of the vacuum region of the vacuum valve and rigidly connected to the wall (1) and by which a guide unit (20, 20′) that displaceably guides the valve rod (12) in the longitudinal direction (6) is guided displaceably in the transverse direction (7).
    • 一种真空阀,包括具有由阀座(4)围绕的阀开口(2)的壁(1),至少一个阀板(5),其设置在真空阀的真空区域中并且可以从 在纵向方向(6)处于中间位置的打开位置,以及从垂直于纵向方向(6)的横向(7)的中间位置到关闭位置。 承载阀板(5)的至少一个阀杆(12)被引导通过真空阀的真空区域,并且可以在平行于阀板(5)的纵向(6)上相对于壁(1)移位。 阀杆(12)的纵向轴线(14),以及横向(7)。 纵向和横向驱动装置(15,15',16,16')设置在真空阀的真空区域的外部,并且驱动装置可沿纵向方向(6)移动阀杆(12) 横向(7)以调节阀板(5)。 设置有一个轴承单元(17,17'),该轴承单元位于真空阀的真空区域的外部并且刚性地连接到壁(1)上,通过该轴承单元(20,20')可移动地引导阀 沿纵向(6)的杆(12)沿横向(7)可移动地被引导。
    • 10. 发明申请
    • Vacuum valve
    • 真空阀
    • US20070007475A1
    • 2007-01-11
    • US11177072
    • 2005-07-07
    • Peter ZvokeljGebhard LutzFlorian Ehrne
    • Peter ZvokeljGebhard LutzFlorian Ehrne
    • F16K31/00
    • F16K51/02F16K1/52F16K31/122F16K39/024
    • A vacuum valve comprises a valve body (1) with an inner cavity (4) through which a main passageway leads between an inlet (2) and an outlet (3) of the vacuum valve and with a main valve seat (6) which surrounds the main passageway, a main closing member (5) which is adjustable in the inner cavity (4) of the valve body between an open position, in which it is lifted from the main valve seat (6) and in which the main passageway through the vacuum valve is open, and a closed position, in which it tightly contacts the main valve seat (6) and in which the main passageway through the vacuum valve is closed, and which has an inner cavity (10) through which an additional passageway leads and an additional valve seat (14) surrounding the additional passageway, an additional closing member (11) which is adjustable in the inner cavity (10) of the main closing member (5) between an open position, in which it is lifted from the additional valve seat (14) and in which the additional passageway through the vacuum valve is open, and a closed position in which it tightly contacts the additional valve seat (14) and in which the additional passageway through the vacuum valve is closed, wherein the additional passageway runs through a changeable intermediate space (43) between the main closing member (5) and the additional closing member (11), and the size of this intermediate space (43) is changeable by means of a rotation of the additional closing member (11) relative to the main closing member (5).
    • 真空阀包括具有内腔(4)的阀体(1),主通道通过该主体通道在真空阀的入口(2)和出口(3)之间引出,并且主阀座(6)围绕 主通道,主关闭构件(5),其可在阀体的内腔(4)中在可从主阀座(6)提升的打开位置之间调节,并且主通道 真空阀打开,并且关闭位置,其紧密接触主阀座(6),并且其中通过真空阀的主通道关闭,并且其具有内腔(10),通过该内腔 引线和围绕附加通道的另外的阀座(14),附加的关闭构件(11),其可在主闭合构件(5)的内腔(10)中在可从主闭合构件(5)的内部空腔 附加阀座(14),其中t 他通过真空阀的附加通道是打开的,并且在闭合位置中,其紧密接触附加阀座(14),并且其中通过真空阀的附加通道关闭,其中附加通道穿过可更换的中间空间 在主关闭构件(5)和附加关闭构件(11)之间,可以通过附加关闭构件(11)相对于主闭合构件(11)的旋转来改变该中间空间(43)的尺寸 (5)。