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    • 7. 发明申请
    • INTERCONNECT FOR MEMS DEVICE INCLUDING A VISCOELASTIC SEPTUM
    • 用于包括粘弹性体的MEMS器件的互连
    • US20120017423A1
    • 2012-01-26
    • US13251959
    • 2011-10-03
    • Ellis MengRonalee Lo
    • Ellis MengRonalee Lo
    • H01S4/00
    • B01L3/502715B01L2200/027B01L2300/044B01L2300/0816B01L2300/0858B01L2300/0887B01L2400/046G01N35/1079
    • Provided is a micro electro mechanical systems (MEMS) device for use with an elongate structure. The MEMS device includes a generally planar substrate, a device wall layer formed upon the substrate, a septum cavity formed in the device wall layer, a channel formed in the device wall layer in fluid communication with the septum cavity, and a septum element disposed in the septum cavity. The septum element is formed of a viscoelastic material. The septum element defines a septum entry surface and a septum exit surface with the septum exit surface being exposed to the channel and disposed between the septum entry surface and the channel. The septum element is without any openings formed through the septum element extending between the septum entry and exit surfaces. Methods of manufacturing and interacting with the MEMS device are also provided.
    • 提供了一种用于细长结构的微机电系统(MEMS)装置。 MEMS器件包括大致平面的衬底,形成在衬底上的器件壁层,形成在器件壁层中的隔膜腔,形成在与隔膜腔流体连通的器件壁层中的通道和设置在隔膜腔中的隔膜元件 隔膜腔。 隔膜元件由粘弹性材料形成。 隔膜元件限定隔膜入口表面和隔膜出口表面,其中隔膜出口表面暴露于通道并且设置在隔膜入口表面和通道之间。 隔膜元件没有通过在隔膜入口和出口表面之间延伸的隔膜元件形成的任何开口。 还提供了与MEMS器件的制造和相互作用的方法。
    • 8. 发明授权
    • Interconnect for MEMS device including a viscoelastic septum
    • 用于MEMS器件的互连,包括粘弹性隔膜
    • US08087310B2
    • 2012-01-03
    • US12357330
    • 2009-01-21
    • Ellis MengRonalee Lo
    • Ellis MengRonalee Lo
    • G01N1/00
    • B01L3/502715B01L2200/027B01L2300/044B01L2300/0816B01L2300/0858B01L2300/0887B01L2400/046G01N35/1079
    • Provided is a micro electro mechanical systems (MEMS) device for use with an elongate structure. The MEMS device includes a generally planar substrate, a device wall layer formed upon the substrate, a septum cavity formed in the device wall layer, a channel formed in the device wall layer in fluid communication with the septum cavity, and a septum element disposed in the septum cavity. The septum element is formed of a viscoelastic material. The septum element defines a septum entry surface and a septum exit surface with the septum exit surface being exposed to the channel and disposed between the septum entry surface and the channel. The septum element is without any openings formed through the septum element extending between the septum entry and exit surfaces. Methods of manufacturing and interacting with the MEMS device are also provided.
    • 提供了一种用于细长结构的微机电系统(MEMS)装置。 MEMS器件包括大致平面的衬底,形成在衬底上的器件壁层,形成在器件壁层中的隔膜腔,形成在与隔膜腔流体连通的器件壁层中的通道和设置在隔膜腔中的隔膜元件 隔膜腔。 隔膜元件由粘弹性材料形成。 隔膜元件限定隔膜入口表面和隔膜出口表面,隔膜出口表面暴露于通道并且设置在隔膜入口表面和通道之间。 隔膜元件没有通过在隔膜入口和出口表面之间延伸的隔膜元件形成的任何开口。 还提供了与MEMS器件的制造和相互作用的方法。
    • 9. 发明授权
    • Interconnect for MEMS device including a viscoelastic septum
    • 用于MEMS器件的互连,包括粘弹性隔膜
    • US08518481B2
    • 2013-08-27
    • US13251959
    • 2011-10-03
    • Ellis MengRonalee Lo
    • Ellis MengRonalee Lo
    • B05D7/00
    • B01L3/502715B01L2200/027B01L2300/044B01L2300/0816B01L2300/0858B01L2300/0887B01L2400/046G01N35/1079
    • Provided is a micro electro mechanical systems (MEMS) device for use with an elongate structure. The MEMS device includes a generally planar substrate, a device wall layer formed upon the substrate, a septum cavity formed in the device wall layer, a channel formed in the device wall layer in fluid communication with the septum cavity, and a septum element disposed in the septum cavity. The septum element is formed of a viscoelastic material. The septum element defines a septum entry surface and a septum exit surface with the septum exit surface being exposed to the channel and disposed between the septum entry surface and the channel. The septum element is without any openings formed through the septum element extending between the septum entry and exit surfaces. Methods of manufacturing and interacting with the MEMS device are also provided.
    • 提供了一种用于细长结构的微机电系统(MEMS)装置。 MEMS器件包括大致平面的衬底,形成在衬底上的器件壁层,形成在器件壁层中的隔膜腔,形成在与隔膜腔流体连通的器件壁层中的通道和设置在隔膜腔中的隔膜元件 隔膜腔。 隔膜元件由粘弹性材料形成。 隔膜元件限定隔膜入口表面和隔膜出口表面,其中隔膜出口表面暴露于通道并且设置在隔膜入口表面和通道之间。 隔膜元件没有通过在隔膜入口和出口表面之间延伸的隔膜元件形成的任何开口。 还提供了与MEMS器件的制造和相互作用的方法。
    • 10. 发明申请
    • INTERCONNECT FOR MEMS DEVICE INCLUDING A VISCOELASTIC SEPTUM
    • 用于包括粘弹性体的MEMS器件的互连
    • US20090183555A1
    • 2009-07-23
    • US12357330
    • 2009-01-21
    • Ellis MengRonalee Lo
    • Ellis MengRonalee Lo
    • G01N1/00B05D5/12
    • B01L3/502715B01L2200/027B01L2300/044B01L2300/0816B01L2300/0858B01L2300/0887B01L2400/046G01N35/1079
    • Provided is a micro electro mechanical systems (MEMS) device for use with an elongate structure. The MEMS device includes a generally planar substrate, a device wall layer formed upon the substrate, a septum cavity formed in the device wall layer, a channel formed in the device wall layer in fluid communication with the septum cavity, and a septum element disposed in the septum cavity. The septum element is formed of a viscoelastic material. The septum element defines a septum entry surface and a septum exit surface with the septum exit surface being exposed to the channel and disposed between the septum entry surface and the channel. The septum element is without any openings formed through the septum element extending between the septum entry and exit surfaces. Methods of manufacturing and interacting with the MEMS device are also provided.
    • 提供了一种用于细长结构的微机电系统(MEMS)装置。 MEMS器件包括大致平面的衬底,形成在衬底上的器件壁层,形成在器件壁层中的隔膜腔,形成在与隔膜腔流体连通的器件壁层中的通道和设置在隔膜腔中的隔膜元件 隔膜腔。 隔膜元件由粘弹性材料形成。 隔膜元件限定隔膜入口表面和隔膜出口表面,其中隔膜出口表面暴露于通道并且设置在隔膜入口表面和通道之间。 隔膜元件没有通过在隔膜入口和出口表面之间延伸的隔膜元件形成的任何开口。 还提供了与MEMS器件的制造和相互作用的方法。