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1. 发明申请

US20160161247A1 METHOD FOR MEASURING THE THICKNESS OF A LAYER OF MATERIAL, GALVANIZING METHOD AND RELATED MEASURING DEVICE 有权
标题翻译：用于测量材料层厚度，加压方法和相关测量装置的方法
公开(公告)号：US20160161247A1
公开(公告)日：2016-06-09
申请号：US14902217
申请日：2014-06-03
申请人： ENOVASENSE
发明人： Jean INARD-CHARVIN , Geoffrey BRUNO
IPC分类号： G01B11/06 , C23C2/06 , C23C2/14 , G01B21/08
CPC分类号： G01B11/0658 , C23C2/06 , C23C2/14 , G01B11/06 , G01B21/085
摘要： Method of measuring the thickness of a layer by a light source irradiating the layer with a light beam, which light source is controlled by a sinusoidal control signal having a modulation frequency fm so that the light beam presents optical power that is sinusoidally modulated at the modulation frequency, the measurement method consisting in: using detector elements to determine a calibration phase shift (Δφcal) between the optical power and the control signal; heating the layer with the light beam; using the detector elements to detect a sinusoidal component of a heat flux radiated by the layer; calculating a phase shift (Δφth/opt) between the sinusoidal component of the radiated heat flux and the optical power of the light beam while taking account of the calibration phase shift; and determining the thickness of the layer of material as a function of the phase shift (Δφth/opt).
摘要翻译：通过用光束照射该层的光源测量层的厚度的方法，该光源由具有调制频率fm的正弦控制信号控制，使得光束呈现在调制时正弦调制的光功率频率，测量方法包括：使用检测器元件确定光功率和控制信号之间的校准相移（＆Dgr＆amp; Cal）; 用光束加热层; 使用检测器元件来检测由该层辐射的热通量的正弦分量; 计算辐射热通量的正弦分量与光束的光功率之间的相移（＆Dgr;＆phgr; th / opt），同时考虑校准相移; 并且确定材料层的厚度作为相移的函数（＆Dgr＆amp; th / opt）。

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