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1. 发明授权

US06720263B2 Planarization of metal layers on a semiconductor wafer through non-contact de-plating and control with endpoint detection 失效
标题翻译：通过非接触式去镀层和端点检测来控制半导体晶片上的金属层的平面化
公开(公告)号：US06720263B2
公开(公告)日：2004-04-13
申请号：US09981505
申请日：2001-10-16
申请人： Donald J. K. Olgado , Joseph J. Stevens , Alexander Lerner
发明人： Donald J. K. Olgado , Joseph J. Stevens , Alexander Lerner
IPC分类号： H01L21302
CPC分类号： H01L21/32115 , C25F7/00 , H01L21/32134 , H01L21/6708 , H01L21/7684
摘要： A non-contact apparatus and method for removing a metal layer from a substrate are provided. The apparatus includes a rotatable anode substrate support member configured to support a substrate in a face-up position and to electrically contact the substrate positioned thereon. A pivotally mounted cathode fluid dispensing nozzle assembly positioned above the anode substrate support member is also provided. A power supply in electrical communication with the anode substrate support member and the cathode fluid dispensing nozzle is provided, and a system controller configured to regulate at least one of a rate of rotation of the anode substrate support member, a radial position of the cathode fluid dispensing nozzle, and an output power of the power supply is provided. The method provides for the removal of a metal layer from a substrate by rotating the substrate in a face up position on a rotatable substrate support member. A cathode fluid dispensing nozzle is positioned over a central portion of the substrate and a metal removing solution is dispensed from the cathode fluid dispensing nozzle onto the central portion of the substrate. An electrical bias is applied between the substrate and the cathode fluid dispensing nozzle, which operates to deplate the metal layer below the fluid dispensing nozzle.
摘要翻译：提供了一种用于从基板去除金属层的非接触式设备和方法。该装置包括可旋转的阳极基板支撑构件，其构造成将基板支撑在面朝上的位置并且电接触定位在其上的基板。还提供了一种位于阳极基板支撑构件上方的枢转安装的阴极流体分配喷嘴组件。提供与阳极基板支撑构件和阴极流体分配喷嘴电连通的电源，以及系统控制器，被配置为调节阳极基板支撑构件的旋转速率，阴极流体的径向位置分配喷嘴，并且提供电源的输出功率。该方法通过在可旋转的基板支撑构件上面向上的位置旋转基板来提供从基板移除金属层。阴极流体分配喷嘴位于衬底的中心部分上方，金属去除溶液从阴极流体分配喷嘴分配到衬底的中心部分上。在衬底和阴极流体分配喷嘴之间施加电偏压，其用于使流体分配喷嘴下方的金属层脱落。

2. 发明授权

US06736408B2 Rotary vacuum-chuck with venturi formed at base of rotating shaft 失效
标题翻译：带有文丘里管的旋转式真空吸盘形成在旋转轴的底部
公开(公告)号：US06736408B2
公开(公告)日：2004-05-18
申请号：US10057114
申请日：2002-01-25
申请人： Donald J. K. Olgado , Bernardo Donoso , Alexander Lerner
发明人： Donald J. K. Olgado , Bernardo Donoso , Alexander Lerner
IPC分类号： B23B3100
CPC分类号： H01L21/6838 , B23B31/307 , B25B11/005 , Y10T279/11
摘要： In a first aspect, a rotary vacuum-chuck is provided that may hold a substrate such as a silicon wafer for rotation. The vacuum-chuck includes a hollow rotary shaft and a chuck mounted on the hollow rotary shaft and having a surface adapted to support a substrate. The chuck has one or more openings in fluid communication with the hollow rotary shaft. A venturi is formed near an end of the hollow rotary shaft to apply vacuum to the hollow rotary shaft and the openings in the chuck surface. No seal is required between the end of the hollow rotary shaft and a surrounding stationary block.
摘要翻译：在第一方面中，提供一种旋转式真空吸盘，其可以保持诸如硅晶片的基板旋转。真空吸盘包括中空旋转轴和安装在中空旋转轴上并具有适于支撑基底的表面的卡盘。卡盘具有与中空旋转轴流体连通的一个或多个开口。在中空旋转轴的端部附近形成文丘里管，以向空心旋转轴和卡盘表面中的开口施加真空。在空心旋转轴的端部和周围的固定块之间不需要密封。

3. 发明授权

US08516544B2 Method, system, and computer program product for facilitating communication in an interoperability network 有权
公开(公告)号：US08516544B2
公开(公告)日：2013-08-20
申请号：US13293065
申请日：2011-11-09
申请人： Alexander Lerner , Michael K. Dewey
发明人： Alexander Lerner , Michael K. Dewey
IPC分类号： G06F17/00
CPC分类号： H04L63/20 , G06F9/546 , G06F21/6236 , H04L63/102 , H04L67/327
摘要： Methods and apparatus are described for facilitating communication among a plurality of entities via an interoperability network. Each entity has policy data corresponding thereto governing interaction with the entity via the interoperability network. A message is transmitted from a first one of the entities to a second one of the entities. The first entity has first policy data corresponding thereto and the second entity has second policy data corresponding thereto. The transmitted message was handled in the network according to combined policy data representing a combination of the first and second policy data.

4. 发明授权

US08453202B2 Method, system, and computer program product for facilitating communication in an interoperability network 有权
公开(公告)号：US08453202B2
公开(公告)日：2013-05-28
申请号：US13293059
申请日：2011-11-09
申请人： Alexander Lerner , Michael K. Dewey
发明人： Alexander Lerner , Michael K. Dewey
IPC分类号： G06F17/00
CPC分类号： H04L63/20 , G06F9/546 , G06F21/6236 , H04L63/102 , H04L67/327
摘要： Methods and apparatus are described for facilitating communication among a plurality of entities via an interoperability network. Each entity has policy data corresponding thereto governing interaction with the entity via the interoperability network. A message is transmitted from a first one of the entities to a second one of the entities. The first entity has first policy data corresponding thereto and the second entity has second policy data corresponding thereto. The transmitted message was handled in the network according to combined policy data representing a combination of the first and second policy data.

5. 发明授权

US08294068B2 Rapid thermal processing lamphead with improved cooling 有权
标题翻译：快速热处理灯头具有改进的冷却
公开(公告)号：US08294068B2
公开(公告)日：2012-10-23
申请号：US12207711
申请日：2008-09-10
申请人： Joseph M. Ranish , Khurshed Sorabji , Kedarnath Sangam , Alexander Lerner
发明人： Joseph M. Ranish , Khurshed Sorabji , Kedarnath Sangam , Alexander Lerner
IPC分类号： A21B1/22 , F26B19/00
CPC分类号： F27B17/0025 , F27D5/0037 , F27D21/0014 , H01L21/67109 , H01L21/67115
摘要： Embodiments of a lamphead and apparatus utilizing same are provided herein. In some embodiments, a lamphead for use in thermal processing may include a monolithic member having a plurality of coolant passages and a plurality of lamp passages and reflector cavities, wherein each lamp passage is configured to accommodate a lamp and each reflector cavity is shaped to act as a reflector or to receive a replaceable reflector for the lamp, and wherein the plurality of coolant passages are disposed proximate to the plurality of lamp passages; and at least one heat transfer member extending from the monolithic member into each coolant passage. In some embodiments, the lamphead may be disposed in an apparatus comprising a process chamber having a substrate support, wherein the lamphead is positioned to provide energy to the substrate support.
摘要翻译：本发明提供了一种灯头及其使用装置的实施例。在一些实施例中，用于热处理的灯头可以包括具有多个冷却剂通道和多个灯通道和反射器腔的整体构件，其中每个灯通道被配置成容纳灯，并且每个反射器空腔成形为能够起作用作为反射器或接收用于灯的可更换反射器，并且其中所述多个冷却剂通道设置成靠近所述多个灯通道; 以及至少一个传热构件，其从所述整体构件延伸到每个冷却剂通道中。在一些实施例中，灯头可以设置在包括具有基板支撑件的处理室的设备中，其中灯头被定位成向基板支撑件提供能量。

6. 发明申请

US20120240189A1 METHOD, SYSTEM, AND COMPUTER PROGRAM PRODUCT FOR FACILITATING COMMUNICATION IN AN INTEROPERABILITY NETWORK 有权
公开(公告)号：US20120240189A1
公开(公告)日：2012-09-20
申请号：US13485772
申请日：2012-05-31
申请人： Alexander Lerner , Michael K. Dewey
发明人： Alexander Lerner , Michael K. Dewey
IPC分类号： G06F21/00 , G06F15/16
CPC分类号： H04L63/20 , G06F9/546 , G06F21/6236 , H04L63/102 , H04L67/327
摘要： Methods and apparatus are described for facilitating communication among a plurality of entities via an interoperability network. Each entity has policy data corresponding thereto governing interaction with the entity via the interoperability network. A message is transmitted from a first one of the entities to a second one of the entities. The first entity has first policy data corresponding thereto and the second entity has second policy data corresponding thereto. The transmitted message was handled in the network according to combined policy data representing a combination of the first and second policy data.

7. 发明授权

US08260849B2 Synchronous interface to asynchronous processes 有权
标题翻译：异步进程的同步接口
公开(公告)号：US08260849B2
公开(公告)日：2012-09-04
申请号：US12777164
申请日：2010-05-10
申请人： Taras Shkvarchuk , Alexander Lerner , Thomas Nabiel Boulos
发明人： Taras Shkvarchuk , Alexander Lerner , Thomas Nabiel Boulos
IPC分类号： G06F15/16
CPC分类号： H04L63/20 , H04L12/5601 , H04L63/10 , H04L67/02 , H04L67/28 , H04L67/2823 , H04L67/42 , H04L2012/5619 , H04L2012/5629
摘要： Methods and apparatus, including computer program products, implementing and using techniques for selectively accessing one or more web services from a client machine, the one or more web services and the client machine being accessible over a network. A request for information is received from a client machine with a conversion engine. The request is received over a synchronous interface. The request is processed in the conversion engine. The processed request is transmitted over an asynchronous interface from the conversion engine to at least one web service. Methods and apparatus, including computer program products, for converting a web service description language file for a synchronous web service into a web service description language file for an asynchronous client machine are also described.
摘要翻译：包括计算机程序产品，用于从客户机选择性地访问一个或多个web服务的实现和使用技术的方法和装置，所述一个或多个web服务和所述客户端机器可通过网络访问。从具有转换引擎的客户机接收到信息请求。通过同步接口接收请求。请求在转换引擎中处理。经处理的请求通过异步接口从转换引擎传输到至少一个Web服务。还描述了用于将用于同步web服务的web服务描述语言文件转换成用于异步客户机的web服务描述语言文件的方法和装置，包括计算机程序产品。

8. 发明申请

US20100281515A1 METHOD, SYSTEM, AND COMPUTER PROGRAM PRODUCT FOR FACILITATING COMMUNICATION IN AN INTEROPERABILITY NETWORK 有权
标题翻译：在互通网络中促进通信的方法，系统和计算机程序产品
公开(公告)号：US20100281515A1
公开(公告)日：2010-11-04
申请号：US12775394
申请日：2010-05-06
申请人： Alexander Lerner , Michael K. Dewey
发明人： Alexander Lerner , Michael K. Dewey
IPC分类号： G06F21/00
CPC分类号： H04L63/20 , G06F9/546 , G06F21/6236 , H04L63/102 , H04L67/327
摘要： Methods and apparatus are described for facilitating communication among a plurality of entities via an interoperability network. Each entity has policy data corresponding thereto governing interaction with the entity via the interoperability network. A message is transmitted from a first one of the entities to a second one of the entities. The first entity has first policy data corresponding thereto and the second entity has second policy data corresponding thereto. The transmitted message was handled in the network according to combined policy data representing a combination of the first and second policy data.
摘要翻译：描述了用于促进通过互操作性网络在多个实体之间进行通信的方法和装置。每个实体具有与其对应的策略数据，以管理通过互操作性网络与实体的交互。消息从第一个实体发送到第二个实体。第一实体具有与之对应的第一策略数据，第二实体具有对应于其的第二策略数据。根据表示第一和第二策略数据的组合的组合策略数据，在网络中处理所发送的消息。

9. 发明申请

US20070295371A1 SINGLE WAFER DRYER AND DRYING METHODS 有权
标题翻译：单辊干燥机和干燥方法
公开(公告)号：US20070295371A1
公开(公告)日：2007-12-27
申请号：US11846400
申请日：2007-08-28
申请人： Younes Achkire , Alexander Lerner , Boris Govzman , Boris Fishkin , Michael Sugarman , Rashid Mavleiv , Haoquan Fang , Shijian Li , Guy Shirazi , Jianshe Tang
发明人： Younes Achkire , Alexander Lerner , Boris Govzman , Boris Fishkin , Michael Sugarman , Rashid Mavleiv , Haoquan Fang , Shijian Li , Guy Shirazi , Jianshe Tang
IPC分类号： B08B1/00
CPC分类号： H01L21/67034 , B08B3/10 , H01L21/67751 , H01L21/681 , H01L21/68764 , Y10S414/139
摘要： In a first aspect, a module is provided that is adapted to process a wafer. The module includes a processing portion having one or more features such as (1) a rotatable wafer support for rotating an input wafer from a first orientation wherein the wafer is in line with a load port to a second orientation wherein the wafer is in line with an unload port; (2) a catcher adapted to contact and travel passively with a wafer as it is unloaded from the processing portion; (3) an enclosed output portion adapted to create a laminar air flow from one side thereof to the other; (4) an output portion having a plurality of wafer receivers; (5) submerged fluid nozzles; and/or (6) drying gas flow deflectors, etc. Other aspects include methods of wafer processing.
摘要翻译：在第一方面，提供一种适于处理晶片的模块。模块包括具有一个或多个特征的处理部分，例如（1）可旋转晶片支撑件，用于从第一取向旋转输入晶片，其中晶片与负载端口对准至第二取向，其中晶片与卸货港（2）捕捉器，其适于在从所述处理部分卸载时与晶片被动接触和行进; （3）适于产生从其一侧到另一侧的层流空气流的封闭输出部分; （4）具有多个晶片接收器的输出部分; （5）浸没式流体喷嘴; 和/或（6）干燥气体导流板等。其它方面包括晶片处理的方法。

10. 发明申请

US20060174921A1 Single wafer dryer and drying methods 审中-公开
公开(公告)号：US20060174921A1
公开(公告)日：2006-08-10
申请号：US11398058
申请日：2006-04-04
申请人： Younes Achkire , Alexander Lerner , Boris Govzman , Boris Fishkin , Michael Sugarman , Rashid Mavleiv , Haoquan Fang , Shijian Li , Guy Shirazi , Jianshe Tang
发明人： Younes Achkire , Alexander Lerner , Boris Govzman , Boris Fishkin , Michael Sugarman , Rashid Mavleiv , Haoquan Fang , Shijian Li , Guy Shirazi , Jianshe Tang
IPC分类号： B08B3/00
CPC分类号： H01L21/67034 , B08B3/10 , H01L21/67751 , H01L21/681 , H01L21/68764 , Y10S414/139
摘要： In a first aspect, a module is provided that is adapted to process a wafer. The module includes a processing portion having one or more features such as (1) a rotatable wafer support for rotating an input wafer from a first orientation wherein the wafer is in line with a load port to a second orientation wherein the wafer is in line with an unload port; (2) a catcher adapted to contact and travel passively with a wafer as it is unloaded from the processing portion; (3) an enclosed output portion adapted to create a laminar air flow from one side thereof to the other; (4) an output portion having a plurality of wafer receivers; (5) submerged fluid nozzles; and/or (6) drying gas flow deflectors, etc. Other aspects include methods of wafer processing.

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