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    • 2. 发明授权
    • Semiconductor laser diode with integrated etalon
    • 具有集成标准具的半导体激光二极管
    • US5629954A
    • 1997-05-13
    • US329017
    • 1994-10-25
    • Michael JansenPhillip D. HayashidaSimon S. OuDennis P. Bowler
    • Michael JansenPhillip D. HayashidaSimon S. OuDennis P. Bowler
    • H01S5/026H01S5/028H01S5/10H01S5/18H01S3/18
    • H01S5/026H01S5/18H01S5/028H01S5/1025
    • A single-frequency semiconductor laser diode structure and a method for its fabrication. The structure includes a built-in etalon, which limits the frequency of operation of the device to a very narrow frequency band. For an edge-emitting diode, the etalon is formed over a cleaved end face of the semiconductor diode structure, and light is emitted from an opposed cleaved end face. For a surface emitting diode, the etalon is formed as an additional plurality of layers between a plurality of semiconductor layers forming the diode and a substrate on which the structure is formed. Transverse channels formed in the structure have side surfaces that act as mirrors, at least one of which is angularly inclined to the plane of the active region, to reflect light through the etalon layers and out through a parallel exterior surface of the structure. Multiple surface emitting lasers may be arrayed in closely spaced relation to each other, to form a powerful light emitting array.
    • 单频半导体激光二极管结构及其制造方法。 该结构包括内置的标准具,将器件的工作频率限制在非常窄的频带。 对于边缘发光二极管,标准具形成在半导体二极管结构的切割端面上,并且从相对的切割端面发射光。 对于表面发光二极管,标准具形成为形成二极管的多个半导体层和其上形成结构的基板之间的附加多个层。 在结构中形成的横向通道具有用作反射镜的侧表面,其至少其中之一与有源区域的平面成角度地倾斜,以反射光通过标准具层并且穿过结构的平行外表面。 多个表面发射激光器可以以彼此间隔紧密的关系排列,以形成强大的发光阵列。