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1. 发明申请

US20120286159A1 PARTICLE BEAM DEVICE HAVING A DETECTOR ARRANGEMENT 有权
标题翻译：具有检测器装置的颗粒光束装置
公开(公告)号：US20120286159A1
公开(公告)日：2012-11-15
申请号：US13430913
申请日：2012-03-27
申请人： Dietmar DÖNITZ , Christian WAGNER
发明人： Dietmar DÖNITZ , Christian WAGNER
IPC分类号： H01J37/26
CPC分类号： H01J37/28
摘要： A particle beam device has a first column with a first beam axis, the first column having a first particle beam generator and a first objective lens for focusing the first particle beam on an object. A second column with a second beam axis is provided, the second column having a second particle beam generator and a second objective lens for focusing the second particle beam on the object. A detector, having a detection axis, detects interacting particles and/or radiation. The first beam axis and the second beam axis define a first angle, different from 0° and from 180°. The first and second beam axes are situated in a first plane. The detection axis of the detector and the first beam axis are situated in a second plane. The first plane and the second plane define a second angle having an absolute value in the range of 65° to 80°.
摘要翻译：粒子束装置具有具有第一光束轴的第一列，第一列具有第一粒子束发生器和用于将第一粒子束聚焦在物体上的第一物镜。提供具有第二光束轴的第二列，第二列具有第二粒子束发生器和用于将第二粒子束聚焦在物体上的第二物镜。具有检测轴的检测器检测相互作用的颗粒和/或辐射。第一光束轴线和第二光束轴线限定不同于0°和180°的第一角度。第一和第二光束轴位于第一平面中。检测器和第一光束轴的检测轴位于第二平面中。第一平面和第二平面限定了绝对值在65°至80°范围内的第二角度。

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