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    • 6. 发明授权
    • Calixarene and photoresist composition comprising same
    • 杯芳烃和包含其的光致抗蚀剂组合物
    • US08936900B2
    • 2015-01-20
    • US13624579
    • 2012-09-21
    • Rohm and Haas Electronic Materials LLCDow Global Technologies LLC
    • Vipul JainD. Patrick GreenJames W. ThackerayBrad C. BaileySu Jin Kang
    • G03F7/004C07C43/02C07C309/00
    • C07C67/29C07C69/76G03F7/0392
    • A molecular glass compound comprises a vinyl ether adduct of an aromatic vinyl ether of formula C(R1)2═C(R2)—O-(L)n-Ar1, and a calix[4]arene, wherein R1 and R2 are each independently a single bond, H, C1-20 alkyl, C1-20 haloalkyl, C6-20 aryl, C6-20 haloaryl, C7-20 aralkyl, or C7-20 haloaralkyl, L is a C1-20 linking group, n is 0 or 1, and Ar1 is a halo-containing monocyclic, or substituted or unsubstituted polycyclic or fused polycyclic C6-20 aromatic-containing moiety, wherein R1 and R2 are connected to Ar1 when either or both of R1 and R2 is a single bond and n is 0. A photoresist, comprising the molecular glass compound, a solvent, and a photoacid generator, a coated substrate, comprising (a) a substrate having one or more layers to be patterned on a surface thereof; and (b) a layer of a photoresist composition over the one or more layers to be patterned, and a method of forming the molecular glass compound, are also disclosed.
    • 分子玻璃化合物包括式C(R 1)2 = C(R 2)-O-(L)n -Ar 1的芳族乙烯基醚和杯[4]芳烃的乙烯基醚加合物,其中R 1和R 2各自 独立地单键,H,C 1-20烷基,C 1-20卤代烷基,C 6-20芳基,C 6-20卤代芳基,C 7-20芳烷基或C 7-20卤代烷基,L是C 1-20连接基团,n是0 或1,并且Ar 1是含卤素的单环或取代或未取代的多环或稠合多环C 6-20芳族部分,其中当R 1和R 2中的任一个或两个为单键时,R 1和R 2连接到Ar 1,n 包括分子玻璃化合物,溶剂和光致酸产生剂的涂覆基材,包括(a)在其表面上具有待图案化的一层或多层的基材; 和(b)一层或多层待图案化的光致抗蚀剂组合物层,以及形成分子玻璃化合物的方法。