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    • 1. 发明授权
    • Composite structures to prevent pattern collapse
    • 复合结构防止图案崩溃
    • US07799503B2
    • 2010-09-21
    • US11750026
    • 2007-05-17
    • Colin J. BrodskyAllen H. GaborJavier Perez
    • Colin J. BrodskyAllen H. GaborJavier Perez
    • G03F7/00G03F7/004
    • G03F7/0035
    • A method and a structure. The structure includes: a solid core comprising a first photoresist material, the core having a bottom surface on a substrate, a top surface and opposite first and second side surfaces between the top surface and the bottom surface; and a shell comprising a second photoresist material, the shell on the top surface of the substrate, the shell containing a cavity open to the top surface of the substrate, the shell formed over the top surface and the first and second side surfaces walls of the core, the core completely filling the cavity. The core is stiffer than the shell. The method includes: forming the core from a first photoresist layer and forming the shell from a second photoresist layer applied over the core. The core may be cross-linked to increase its stiffness.
    • 一种方法和结构。 该结构包括:固体芯,其包括第一光致抗蚀剂材料,所述芯在基底上具有底表面,顶表面以及在顶表面和底表面之间的相对的第一和第二侧表面; 以及壳体,其包括第二光致抗蚀剂材料,所述壳体在所述基板的顶表面上,所述外壳包含通向所述基板的顶表面的空腔,所述外壳形成在所述顶表面上以及所述第一和第二侧表面壁上 核心,核心完全填充空腔。 核心比壳更僵硬。 该方法包括:从第一光致抗蚀剂层形成芯并从施加在芯上的第二光致抗蚀剂层形成壳。 芯可以交联以增加其刚度。
    • 2. 发明申请
    • COMPOSITE STRUCTURES TO PREVENT PATTERN COLLAPSE
    • 复合结构防止图案褶皱
    • US20080286683A1
    • 2008-11-20
    • US11750026
    • 2007-05-17
    • Colin J. BrodskyAllen H. GaborJavier Perez
    • Colin J. BrodskyAllen H. GaborJavier Perez
    • G03C1/00G03C5/00
    • G03F7/0035
    • A method and a structure. The structure includes: a solid core comprising a first photoresist material, the core having a bottom surface on a substrate, a top surface and opposite first and second side surfaces between the top surface and the bottom surface; and a shell comprising a second photoresist material, the shell on the top surface of the substrate, the shell containing a cavity open to the top surface of the substrate, the shell formed over the top surface and the first and second side surfaces walls of the core, the core completely filling the cavity. The core is stiffer than the shell. The method includes: forming the core from a first photoresist layer and forming the shell from a second photoresist layer applied over the core. The core may be cross-linked to increase its stiffness.
    • 一种方法和结构。 该结构包括:固体芯,其包括第一光致抗蚀剂材料,所述芯在基底上具有底表面,顶表面以及在顶表面和底表面之间的相对的第一和第二侧表面; 以及壳体,其包括第二光致抗蚀剂材料,所述壳体在所述基板的顶表面上,所述外壳包含通向所述基板的顶表面的空腔,所述外壳形成在所述顶表面上以及所述第一和第二侧表面壁上 核心,核心完全填充空腔。 核心比壳更僵硬。 该方法包括:从第一光致抗蚀剂层形成芯并从施加在芯上的第二光致抗蚀剂层形成壳。 芯可以交联以增加其刚度。