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    • 1. 发明授权
    • On-chip pad conditioning for chemical mechanical polishing
    • 用于化学机械抛光的片上衬垫调理
    • US06300248B1
    • 2001-10-09
    • US09366227
    • 1999-08-03
    • Chih-Lung LinPei-Yu Chen
    • Chih-Lung LinPei-Yu Chen
    • H01L21302
    • B24B53/017H01L21/31053
    • A method for on-chip polishing pad conditioning in a chemical mechanical polishing process is disclosed. In the method, a plurality of dummy patterns in a designated area on a wafer surface are planted during the same photolithographic method for forming the IC dies. The designated area may be the edge portion, i.e., the blanket area along the edges of a wafer, or the scribe lines formed on the wafer. The dummy patterns should be formed to a step height of at least 2,000 Å, and preferably to at least 4,000 Å. The present invention plurality of dummy patterns is used during a polishing process for the top surface of a semiconductor wafer by a polishing pad. The plurality of dummy patterns simultaneously conditions the pad in a localized manner to improve the removal rate of the pad. The shape of the dummy patterns can be formed in any desirable shape, including those that have a cross-section of a square or a rectangle with a width of at least 100 Å.
    • 公开了一种在化学机械抛光工艺中的片上抛光垫调节方法。 在该方法中,在用于形成IC芯片的相同的光刻方法中,植入在晶片表面上的指定区域中的多个虚拟图案。 指定区域可以是边缘部分,即沿着晶片边缘的橡皮布区域,或者形成在晶片上的划线。 虚拟图案应形成为至少2000埃,优选至少4,000埃的台阶高度。 本发明通过抛光垫在半导体晶片的顶表面的抛光工艺期间使用多个虚拟图案。 多个虚拟图案以局部方式同时对焊盘进行调节以提高焊盘的去除速率。 虚拟图案的形状可以形成为任何期望的形状,包括具有至少为100埃的宽度为正方形或矩形的横截面的形状。
    • 2. 发明授权
    • Touch panel
    • 触控面板
    • US08269118B2
    • 2012-09-18
    • US12625474
    • 2009-11-24
    • Jing-Tin KuoPei-Yu ChenYu-Chuan LinWei-Jen ChangKuo-Hsing Cheng
    • Jing-Tin KuoPei-Yu ChenYu-Chuan LinWei-Jen ChangKuo-Hsing Cheng
    • G06F3/044
    • G06F3/044
    • A touch panel includes a substrate, a touch-sensing circuit, a plurality of sensing signal transmission wires, a capacitance compensation conductor, and a sensing signal readout circuit. The touch-sensing circuit is disposed on the substrate. The sensing signal transmission wires are disposed on the substrate and electrically connected to the touch-sensing circuit. The capacitance compensation conductor is disposed over the sensing signal transmission wires. Capacitance of each sensing signal transmission wire is C1, and coupling capacitance between each sensing signal transmission wire and the capacitance compensation conductor is C2. The sensing signal readout circuit is electrically connected to the sensing signal transmission wires. In each sensing signal transmission wire, variation of summation of C1 and C2 is less than a readout resolution of the sensing signal readout circuit. Another touch panel using an electrostatic discharge conductor to adjust varied capacitances of sensing signal transmission wires is also provided.
    • 触摸面板包括基板,触摸感测电路,多个感测信号传输线,电容补偿导体和感测信号读出电路。 触摸感测电路设置在基板上。 感测信号传输线设置在基板上并电连接到触摸感测电路。 电容补偿导体设置在感测信号传输线上。 每个感应信号传输线的电容为C1,每个感应信号传输线与电容补偿导体之间的耦合电容为C2。 感测信号读出电路电连接到感测信号传输线。 在每个感测信号传输线中,C1和C2的求和的变化小于感测信号读出电路的读出分辨率。 还提供了使用静电放电导体来调节感测信号传输线的不同电容的另一触摸面板。
    • 6. 发明授权
    • Touch panel
    • 触控面板
    • US08184105B2
    • 2012-05-22
    • US12629058
    • 2009-12-02
    • Yu-Chuan LinSheng-Fa LiuJing-Tin KuoHsin-Hung LeeWei-Jen ChangPei-Yu ChenYu-Mei ChiuMei-Sheng MaKuo-Hsing Cheng
    • Yu-Chuan LinSheng-Fa LiuJing-Tin KuoHsin-Hung LeeWei-Jen ChangPei-Yu ChenYu-Mei ChiuMei-Sheng MaKuo-Hsing Cheng
    • G06F3/041
    • G06F3/044G06F2203/04111
    • A touch panel including a substrate, a plurality of first sensing series, and a plurality of second sensing series is provided. The first sensing series and the second sensing series are disposed on the substrate. The first sensing series extend along a first direction and are electrically insulated from each other. Each of the first sensing series includes a plurality of first sensing pads and a plurality of first bridge portions connected between the first sensing pads. The second sensing series extend along a second direction and are electrically insulated from each other. Each of the second sensing series includes a plurality of second sensing pads and a plurality of second bridge portions connected between the second sensing pads. Each of the first bridge portions and one of the second bridge portions are intersected, and at least one of the second bridge portions has at least one electrostatic discharge tip.
    • 提供了包括基板,多个第一感测系列和多个第二感测系列的触摸面板。 第一感测系列和第二感测系列设置在衬底上。 第一感测系列沿着第一方向延伸并且彼此电绝缘。 第一感测系列中的每一个包括多个第一感测焊盘和连接在第一感测焊盘之间的多个第一桥接部分。 第二感测系列沿着第二方向延伸并且彼此电绝缘。 第二感测系列中的每一个包括多个第二传感垫和连接在第二传感垫之间的多个第二桥接部分。 第一桥接部分和第二桥接部分中的每一个相交,并且至少一个第二桥接部分具有至少一个静电放电尖端。
    • 8. 发明申请
    • TOUCH DISPLAY PANEL AND TOUCH SENSING UNIT THEREOF
    • 触摸显示面板和触摸感应单元
    • US20110096018A1
    • 2011-04-28
    • US12700737
    • 2010-02-05
    • Hsin-Hung LeePei-Yu ChenYu-Mei ChiuWei-Jen ChangYu-Chuan LinKuo-Hsing Cheng
    • Hsin-Hung LeePei-Yu ChenYu-Mei ChiuWei-Jen ChangYu-Chuan LinKuo-Hsing Cheng
    • G06F3/045
    • G06F3/044G06F2203/04111
    • A touch display panel includes a display panel and a touch sensing unit. The touch sensing unit includes first sensing series, and second sensing series. Each of the first sensing series includes a plurality of first transparent sensing pads disposed along a first direction, and a plurality of non-transparent bridge lines disposed along the first direction. Each of the non-transparent bridge lines is disposed between two adjacent first transparent sensing pads, overlapping with two adjacent first transparent sensing pads, and electrically connected to two adjacent first transparent sensing pads. The line width of each non-transparent bridge line is substantially between 0.5 micrometers and 10 micrometers, and the reduction of aperture ratio in a pixel region of the touch display panel caused by the non-transparent bridge lines is substantially between 0.1% and 5%.
    • 触摸显示面板包括显示面板和触摸感测单元。 触摸感测单元包括第一感测系列和第二感测系列。 第一感测系列中的每一个包括沿着第一方向设置的多个第一透明感测垫和沿着第一方向设置的多个不透明的桥线。 每个非透明桥线布置在两个相邻的第一透明感测垫之间,与两个相邻的第一透明感测垫重叠,并且电连接到两个相邻的第一透明感测垫。 每个非透明桥接线的线宽基本上在0.5微米至10微米之间,并且由非透明桥接线引起的触摸显示面板的像素区域中的开口率的减小基本上在0.1%和5%之间, 。