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1. 发明授权

US06911097B1 Photoresist stripper using nitrogen bubbler 失效
标题翻译：使用氮气鼓泡机的光刻胶剥离器
公开(公告)号：US06911097B1
公开(公告)日：2005-06-28
申请号：US09629213
申请日：2000-07-31
申请人： Chie-Chi Chen , Wen-Hsiang Tseng , Sheng-Liang Pan , Jen-Shiang Fang
发明人： Chie-Chi Chen , Wen-Hsiang Tseng , Sheng-Liang Pan , Jen-Shiang Fang
IPC分类号： B08B3/10 , B08B5/00 , H01L21/00
CPC分类号： H01L21/67086 , B08B3/102 , Y10S438/906
摘要： Provided is a process and apparatus characterized by a gas distribution plate in which a gas supply manifold directs gas bubbles from the bottom of a process tank upward and between wafers contained in a cassette and supported therewithin. This improved method and apparatus is used for effectively stripping photoresist from the larger semiconductor wafers having dense top conductive patterns with protuberant sidewalls. The method provides a scrubbing action that is parallel to the device array being formed on the wafer's surface. Broadly stated, the method of a chemical action on large substrates supported adjacent respective edge portions thereof in a carrier includes submerging the carrier and substrates supported thereby in a process tank containing a liquid chemical, and a gas distribution plate disposed on the bottom of the tank for directing gas bubbles upward and parallel to the surfaces of each substrate contained in the carrier to ensure that a uniform chemical action occurs.
摘要翻译：提供了一种工艺和装置，其特征在于气体分配板，其中气体供应歧管将处理罐底部的气泡向上引导到包含在盒中并在其中支撑的晶片之间。这种改进的方法和装置用于从具有突出侧壁的致密顶部导电图案的较大半导体晶片有效地剥离光致抗蚀剂。该方法提供了平行于在晶片表面上形成的器件阵列的擦洗动作。广泛地说，在载体附近支撑在其各个边缘部分上的大的基板上的化学作用的方法包括将载体和由其支撑的基板浸没在包含液体化学品的处理槽中，以及设置在罐的底部上的气体分配板用于将气泡向上引导并平行于包含在载体中的每个基底的表面，以确保发生均匀的化学作用。

2. 发明授权

US06281140B1 Method of reducing the roughness of a gate insulator layer after exposure of the gate insulator layer to a threshold voltage implantation procedure 有权
标题翻译：在栅极绝缘体层暴露于阈值电压注入程序之后减小栅极绝缘体层的粗糙度的方法
公开(公告)号：US06281140B1
公开(公告)日：2001-08-28
申请号：US09591846
申请日：2000-06-12
申请人： Chie-Chi Chen , Sheng-Liang Pan
发明人： Chie-Chi Chen , Sheng-Liang Pan
IPC分类号： H01L214763
CPC分类号： H01L21/28185 , H01L21/2652 , H01L21/3105 , H01L21/31105
摘要： A process for reducing the surface roughness of a silicon dioxide gate insulator layer, that has been subjected to a boron ion implantation procedure, has been developed. The process features the use of an ammonium hydroxide-hydrogen peroxide solution, applied to the gate insulator layer, to reduce the surface roughness of the gate insulator layer, created by the boron ion implantation procedure. The treatment of the gate insulator layer, in the ammonium hydroxide-hydrogen peroxide solution, results in a surface roughness equivalent to the surface roughness of the gate insulator layer, prior to the boron ion implantation procedure.
摘要翻译：已经开发了一种用于降低二氧化硅栅极绝缘体层的已经经过硼离子注入工艺的表面粗糙度的方法。该方法的特征在于使用施加到栅极绝缘体层的氢氧化铵 - 过氧化氢溶液，以减少由硼离子注入程序产生的栅极绝缘体层的表面粗糙度。在硼离子注入程序之前，在氢氧化铵 - 过氧化氢溶液中处理栅极绝缘体层导致与栅极绝缘体层的表面粗糙度相当的表面粗糙度。

3. 发明授权

US06360756B1 Wafer rinse tank for metal etching and method for using 有权
标题翻译：用于金属蚀刻的晶圆冲洗槽和使用方法
公开(公告)号：US06360756B1
公开(公告)日：2002-03-26
申请号：US09325307
申请日：1999-06-03
申请人： Chie-Chi Chen , Tzu-Yang Chung , Szu-Yao Wang , Sheng-Liang Pan
发明人： Chie-Chi Chen , Tzu-Yang Chung , Szu-Yao Wang , Sheng-Liang Pan
IPC分类号： B08B704
CPC分类号： H01L21/67057 , B08B3/102 , Y10S134/902
摘要： A rinse tank for rinsing electronic substrates after a chemical process and a method for utilizing such rinse tank are provided. In the rinse tank, devices for performing a quick dump rinse; for performing a cascade overflow rinse and for feeding an inert gas bubbling are provided in the cavity of a single rinse tank. By utilizing the present invention novel rinse tank, the processing problems frequently observed in conventional rinse tanks where two rinse tanks are required for the quick dump rinse and for the cascade overflow rinse, such as particle re-deposition and a large floor space area requirement are eliminated. Furthermore, the wafer rinse process after a metal etching process can be accomplished in a total process time that is at least 2˜3 minutes shorter than that required by using conventional rinse tanks.
摘要翻译：提供了一种用于在化学过程之后冲洗电子基板的冲洗槽和用于使用这种冲洗槽的方法。在冲洗槽中，进行快速冲洗冲洗的装置; 在单个冲洗槽的空腔中设置用于进行级联溢流冲洗和用于进料惰性气体鼓泡的装置。通过利用本发明的新型漂洗槽，在常规冲洗槽中经常观察到的处理问题，其中需要两个漂洗槽用于快速冲洗冲洗和级联溢流冲洗，例如颗粒再沉积和大的占地空间面积要求，消除了此外，在金属蚀刻工艺之后的晶片冲洗过程可以在比使用常规冲洗槽所需的总处理时间短至少2〜3分钟的时间内完成。

4. 发明授权

US07838386B2 Method and system for patterning alignment marks on a transparent substrate 有权
标题翻译：在透明基板上图案化对准标记的方法和系统
公开(公告)号：US07838386B2
公开(公告)日：2010-11-23
申请号：US12235960
申请日：2008-09-23
申请人： Ruei-Hung Jang , Ya-Wen Lee , Tzu-Yang Wu , Sheng-Liang Pan , Chin-Hsiang Lin , Tsai-Sheng Gau
发明人： Ruei-Hung Jang , Ya-Wen Lee , Tzu-Yang Wu , Sheng-Liang Pan , Chin-Hsiang Lin , Tsai-Sheng Gau
IPC分类号： H01L21/76 , H01L21/00 , H01L23/544
CPC分类号： G02B26/0841
摘要： Disclosed is a method and a system for forming alignment marks on a transparent substrate. A light reflective layer is deposited over an optically transparent substrate of a wafer. A region is defined around an alignment mark on the optically transparent substrate. The light reflective layer is removed from a substantial portion of the transparent substrate excluding the region. In addition, a micro electro-mechanical systems device is disclosed. The device comprises an optically transparent substrate, at least one optically partially transparent alignment mark on the optically transparent substrate, and a plurality of reflective elements or imaging pixels attached to the optically transparent substrate.
摘要翻译：公开了一种在透明基板上形成对准标记的方法和系统。光反射层沉积在晶片的光学透明衬底上。围绕光学透明基板上的对准标记限定区域。除了该区域之外，从透明基板的大部分除去光反射层。另外，公开了一种微电子机械系统装置。该器件包括光学透明衬底，在光学透明衬底上的至少一个光学部分透明的对准标记，以及附接到光学透明衬底的多个反射元件或成像像素。

5. 发明申请

US20070249137A1 Method and system for wafer backside alignment 失效
标题翻译：晶圆背面对准的方法和系统
公开(公告)号：US20070249137A1
公开(公告)日：2007-10-25
申请号：US11409582
申请日：2006-04-24
申请人： Sheng-Chieh Liu , Chia-Hung Kao , Tzu-Yang Wu , Sheng-Liang Pan , Yuan-Bang Lee
发明人： Sheng-Chieh Liu , Chia-Hung Kao , Tzu-Yang Wu , Sheng-Liang Pan , Yuan-Bang Lee
IPC分类号： H01L21/306 , H01L21/76 , H01L21/302
CPC分类号： B81C1/00603
摘要： Disclosed is a method and a system for wafer backside alignment. A zero mark patterning on front side of a substrate. A plurality of layers are deposited on the front side of the substrate. The wafer is flipped over with backside of the substrate facing up, and a through wafer etching is performed from the backside to an etch stop layer deposited over the front side of the substrate.
摘要翻译：公开了一种用于晶片背面对准的方法和系统。在基板的正面上形成零标记。多个层沉积在基板的正面上。将晶片的背面朝上翻转，从背面到沉积在基板前侧的蚀刻停止层进行贯通晶片蚀刻。

6. 发明申请

US20060001945A1 Spacer fabrication process for manufacturing reflective stealth mirrors and other MEMS devices 有权
标题翻译：用于制造反射隐形镜和其他MEMS器件的间隔件制造工艺
公开(公告)号：US20060001945A1
公开(公告)日：2006-01-05
申请号：US11002766
申请日：2004-12-02
申请人： Shan-Hua Wu , Fei-Yun Chen , Wei-Ya Wang , Hung-Hsin Liu , Sheng-Liang Pan
发明人： Shan-Hua Wu , Fei-Yun Chen , Wei-Ya Wang , Hung-Hsin Liu , Sheng-Liang Pan
IPC分类号： G02B26/00
CPC分类号： G02B26/0833
摘要： A method for use in manufacturing a microelectromechanical system, such as a reflective stealth mirror includes the steps of: forming an I-shape mirror structure; forming a spacer layer over the I-shape mirror structure; and patterning the spacer layer to form at least one spacer along a side of the I-shape mirror structure.
摘要翻译：一种用于制造诸如反射式隐形镜的微机电系统的方法包括以下步骤：形成I形镜结构; 在所述I形镜结构上形成间隔层; 以及图案化间隔层以沿着I形镜结构的一侧形成至少一个间隔物。

7. 发明授权

US06495813B1 Multi-microlens design for semiconductor imaging devices to increase light collection efficiency in the color filter process 有权
标题翻译：用于半导体成像装置的多微透镜设计，以提高滤色镜过程中的光采集效率
公开(公告)号：US06495813B1
公开(公告)日：2002-12-17
申请号：US09414926
申请日：1999-10-12
申请人： Yang-Tung Fan , Bii-Cheng Chang , Sheng-Liang Pan , Kuo-Liang Lu
发明人： Yang-Tung Fan , Bii-Cheng Chang , Sheng-Liang Pan , Kuo-Liang Lu
IPC分类号： H01L2700
CPC分类号： H01L27/14603 , H01L27/14627
摘要： Multi-microlens arrays for optimizing light collection efficiency in CCD/CMOS solid-state color image cameras with L-shaped or non-regular photodetector areas are disclosed. Microelectronic fabrication methods for forming planar array multi-microlenses comprised of elements consisting of lens-pairs, integrated with color-filters, and compatible with CMOS high-volume manufacturing are taught. Experimental results demonstrating the processes for fabrication of multi-microlenses for L-shaped and for non-regular sensing areas are given.
摘要翻译：公开了用于优化具有L形或非常规光电探测器区域的CCD / CMOS固态彩色摄像机中的光收集效率的多微透镜阵列。教导了用于形成平面阵列多微透镜的微电子制造方法，所述平面阵列多微透镜由与彩色滤光片集成并与CMOS大批量制造兼容的透镜对构成的元件组成。给出了证明L型和非常规感测区域的多微透镜制造工艺的实验结果。

8. 发明授权

US06468704B1 Method for improved photomask alignment after epitaxial process through 90° orientation change 有权
标题翻译：在通过90°取向变化的外延工艺后改进光掩模对准的方法
公开(公告)号：US06468704B1
公开(公告)日：2002-10-22
申请号：US09835027
申请日：2001-04-16
申请人： Chi-Hung Liao , Yih-Ann Lin , Sheng-Liang Pan , Cheng-Yu Chu , Kuo-Liang Lu , Yu Hsi Wang
发明人： Chi-Hung Liao , Yih-Ann Lin , Sheng-Liang Pan , Cheng-Yu Chu , Kuo-Liang Lu , Yu Hsi Wang
IPC分类号： G03F900
CPC分类号： G03F9/7046 , G03F9/7076 , H01L23/544 , H01L2223/54453 , H01L2924/0002 , H01L2924/00
摘要： A method for alignment to an alignment mark array within a patterned electronic material layer, formed on a substrate employed in a microelectronics fabrication, with improved registration accuracy of a subsequent step-and-repeat photomask pattern. There is first provided a substrate upon which is formed a patterned microelectronics layer containing an alignment mark array. There is then formed over the substrate and patterned layer, covering over the alignment marks, a subsequent layer or layers which may be of opaque material. In order to align properly a patterned photomask for patterning the overlying layer by means of conventional photolithography, the alignment mark array is located by first scanning with a laser light source contained within a step-and-repeat apparatus containing the patterned photomask and detecting the optical radiation signal scattered from the alignment mark array. The accuracy of location may be enhanced by rotating the orientation of the alignment mark array with respect to the direction of scanning with the laser light source by 90 degrees to render the subsequent orientation orthogonal to the first orientation, and then repeating the scanning operation. The altered nature of the back-scattered light signal from the orthogonal scanning direction provides additional information for improving the precision of location and alignment.
摘要翻译：一种用于对准图案化电子材料层内的对准标记阵列的方法，其形成在微电子制造中使用的衬底上，具有改进的后续步进重复光掩模图案的配准精度。首先设置有基板，在其上形成包含对准标记阵列的图案化微电子层。然后在衬底和图案化层上形成覆盖对准标记的后续层或层，其可以是不透明材料。为了适当地对准用于通过常规光刻法图案化上覆层的图案化光掩模，通过首先用包含在包含图案化光掩模的步进重复设备中的激光源进行扫描来定位对准标记阵列，并且检测光学从对准标记阵列散射的辐射信号。可以通过将对准标记阵列的方向相对于激光光源的扫描方向旋转90度来使得随后的方向与第一方位正交，然后重复扫描操作来提高位置的精度。来自正交扫描方向的反向散射光信号的改变性质提供了用于提高位置和对准精度的附加信息。

9. 发明授权

US06171885B2 High efficiency color filter process for semiconductor array imaging devices 有权
标题翻译：用于半导体阵列成像器件的高效率滤色器工艺
公开(公告)号：US06171885B2
公开(公告)日：2001-01-09
申请号：US09414925
申请日：1999-10-12
申请人： Yang-Tung Fan , Sheng-Liang Pan , Bii-Cheng Chang , Kuo-Liang Lu
发明人： Yang-Tung Fan , Sheng-Liang Pan , Bii-Cheng Chang , Kuo-Liang Lu
IPC分类号： H01L21339
CPC分类号： H01L27/14609 , H01L27/14621 , H01L27/14627
摘要： A microelectronic method is described for optimizing the fabrication of optical and semiconductor array structures for high efficiency color image formation in solid-state cameras. Disclosed is an ordered fabrication sequence in which microlens formation precedes color filter layer formation to enable increased image light collection efficiency, to encapsulate and protect the microlens elements from chemical and thermal processing damage, to minimize topographical underlayer variations which would axially misalign or otherwise aberrate microlens elements formed on non-planar surfaces, and, to complete the most difficult steps early in the process to minimize rework and scrap. A CMOS, CID, or CCD optoelectronic configuration is formed by photolithographically patterning a planar-array of photodiodes on a Silicon or other III-V, II-VI, or compound semiconductor substrate. The photodiode array is provided with metal photoshields, passivated, planarized, and, a first convex microlens array of high curvature or other suitable lenses are formed thereon. A transparent encapsulant is deposited to planarize the microlens layer and provide a spacer for the successive deposition(s) of one or more color filter layers. The microlens array may be formed from positive photoresists and the spacer from negative resist, with close attention to matching the index of refraction at layer interfaces. A final surface layer comprising a color filter completes the solid-state color image-forming device.
摘要翻译：描述了用于优化固态照相机中用于高效率彩色图像形成的光学和半导体阵列结构的制造的微电子方法。公开了一种有序的制造顺序，其中微透镜形成在滤色器层形成之前，以提高图像光采集效率，封装和保护微透镜元件免受化学和热处理损伤，以最小化将轴向不对准或以其他方式将微透镜像差的形貌底层变化在非平面表面上形成的元件，并且在过程的早期完成最困难的步骤，以最小化返工和废料。通过光刻地图案化硅或其它III-V，II-VI或化合物半导体衬底上的光电二极管平面阵列来形成CMOS，CID或CCD光电结构。光电二极管阵列设置有金属遮光罩，钝化，平面化，并且在其上形成高曲率的第一凸形微透镜阵列或其它合适的透镜。沉积透明的密封剂以使微透镜层平坦化，并为一个或多个滤色器层的连续沉积提供间隔物。微透镜阵列可以由正光致抗蚀剂和来自负光刻胶的间隔物形成，密切关注层界面处的折射率的匹配。包括滤色器的最终表面层完成了固态彩色图像形成装置。

10. 发明授权

US07071032B2 Material to improve image sensor yield during wafer sawing 失效
标题翻译：材料可以提高晶圆锯切时的图像传感器产量
公开(公告)号：US07071032B2
公开(公告)日：2006-07-04
申请号：US10431275
申请日：2003-05-07
申请人： Hung-Jen Hsu , Yu-Kung Hsiao , Chih-Kung Chang , Sheng-Liang Pan , Fu-Tien Weng
发明人： Hung-Jen Hsu , Yu-Kung Hsiao , Chih-Kung Chang , Sheng-Liang Pan , Fu-Tien Weng
IPC分类号： H01L21/44 , H01L21/48 , H01L21/50
CPC分类号： H01L21/6836 , H01L21/78 , H01L27/14683 , H01L2221/68327
摘要： A new method is provided of treating the wafer prior to the process of singulating the wafer into individual die. A first surface of the wafer over which CMOS image sensor devices have been created is coated with a layer of material that is non-soluble in water. The wafer is attached to a tape by bringing a second surface of the wafer in contact with the tape. The wafer is singulated by approaching the first surface of the wafer and by sawing first through the layer of material that has been coated over the first surface of the wafer and by then sawing through the wafer, stopping at the surface of the tape. A thorough water rinse is applied to the surface of the singulated wafer, followed by a wafer clean applying specific chemicals for this purpose. The singulated die is now removed from the tape and further processed by applying steps of die mount, wire bonding, surrounding the die in a mold compound and marking the package.
摘要翻译：提供了一种新的方法，在将晶片分离成单独的芯片的过程之前处理晶片。已经在其上形成CMOS图像传感器装置的晶片的第一表面涂覆有不溶于水的材料层。通过使晶片的第二表面与带接触而将晶片附接到带。通过接近晶片的第一表面并通过首先穿过已经涂覆在晶片的第一表面上的材料层，然后通过晶片锯切，停止在带的表面，将晶片分离。将彻底的水冲洗施加到单片晶片的表面，接着进行晶片清洁以应用特定的化学品用于此目的。单片模具现在从胶带中取出并通过将模具安装，引线接合，将模具包围在模具化合物中并标记包装件的步骤进一步处理。

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