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1. 发明授权

US06905026B2 Wafer carrying system 失效
标题翻译：晶圆承载系统
公开(公告)号：US06905026B2
公开(公告)日：2005-06-14
申请号：US10318663
申请日：2002-12-13
申请人： Chang Chih-Kang
发明人： Chang Chih-Kang
IPC分类号： H01L21/677 , B65D85/30 , B65D85/86
CPC分类号： H01L21/67772 , H01L21/67775 , Y10S206/832
摘要： The purpose of the present invention is to provide a wafer carrying system with a manual-opened cover. The wafer carrying system of the present invention includes a wafer cassette having an opening, a cover disposed on the wafer cassette for covering the opening of the wafer cassette, an opener disposed on the cover for opening the cover, a base for mounting the opener thereon, a separating device connected with the base and the opener, thereby the cover being movable from a shut position to a separated position, a first pivoting device connected to the separating device for pivoting the cover to a first specific position, and a second pivoting device connected to the first pivoting device for pivoting the cover to a second specific position.
摘要翻译：本发明的目的是提供具有手动打开的盖的晶片承载系统。本发明的晶片承载系统包括具有开口的晶片盒，设置在晶片盒上的用于覆盖晶片盒的开口的盖，设置在盖上用于打开盖的开启器，用于在其上安装开启器的基座，与基座和开启器连接的分离装置，从而盖可从关闭位置移动到分离位置;连接到分离装置的第一枢转装置，用于将盖枢转到第一特定位置;以及第二枢转装置连接到第一枢转装置，用于将盖枢转到第二特定位置。

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