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    • 2. 发明授权
    • Automatic wafer loading and pre-alignment system
    • 自动晶片装载和预对准系统
    • US3902615A
    • 1975-09-02
    • US34028173
    • 1973-03-12
    • COMPUTERVISION CORP
    • LEVY KENNETHCORBIN DAVIDFLEMING ALAN JFRIEDMAN DAVIDFRYKLUND GILBERT GPARKER VANCESCHLIEMANN GERD
    • H01L21/00H01L21/677H01L21/68B65B21/02
    • H01L21/67259B65H2301/42256H01L21/67766H01L21/67778H01L21/681Y10S414/135Y10S414/136Y10S414/137
    • An automatic wafer loading and pre-alignment system for integrated circuit wafer-mask Aligners. A belt feed track system is employed to transport wafers from a ''''send'''' wafer storage carrier to a wafer pre-alignment station. The wafer is mechanically pre-aligned with respect to the wafer chuck of the Aligner by means of a roller arm and flat-finder system. After completion of the pre-alignment process, the Aligner turntable is rotated to carry the pre-aligned wafer and chuck to the home position of the turntable and at the same time position another chuck at the pre-alignment station. If the new chuck at the prealignment station contains a wafer, the wafer is transported from the chuck to a ''''receive'''' wafer storage carrier by means of a belt return track system. The feed and return wafer belt track systems have a common portion between the pre-alignment station and the respective send and receive wafer storage carriers. Photosensors are used to detect the presence or absence of wafers at critical locations in the loading system and at the prealignment station.
    • 用于集成电路晶片掩模对准器的自动晶片装载和预对准系统。 使用带馈送轨道系统将晶片从“发送”晶片存储载体传送到晶片预对准站。 晶片通过辊臂和平板取景器系统相对于对准器的晶片卡盘机械预对准。 在完成预对准过程之后,Aligner转盘旋转,以将预对准的晶片和卡盘运送到转台的原始位置,同时将另一个卡盘放置在预对准工位。 如果预对准站上的新卡盘包含晶片,则通过带返回轨道系统将晶片从卡盘传送到“接收”晶片存储载体。 馈送和返回晶圆带轨道系统在预对准站和相应的发送和接收晶片存储载体之间具有公共部分。 光传感器用于检测加载系统和预对准站的关键位置处晶圆的存在或不存在。
    • 4. 发明授权
    • Signal level-to-pulse rate converter
    • 信号电平到脉冲速率转换器
    • US3660782A
    • 1972-05-02
    • US3660782D
    • 1970-08-24
    • COMPUTERVISION CORP
    • FRIEDMAN DAVIDLEVY KENNETH
    • H03G11/08H03K5/08H03K6/04H03K7/06H03K7/10
    • H03G11/08H03K5/08H03K6/04H03K7/06
    • An electronic circuit for generating pulses at a rate and of a nature representative of an input signal level. In order to limit the rate of change in the pulse rate to a rate of change at which an element driven by the pulses can respond, a filter is provided which establishes a maximum positive and negative slope for the signal waveform. The same slope is achieved for any abrupt step in the input signal level regardless of the magnitude of the step change. The slope-limited signal is then fed to a symmetrical zero-to-plus or minus infinite rate integrator which establishes a dead-band range surrounding the zero level. When the slopelimited signal level is outside the dead-band range, the integration proceeds at a rate proportional to the amount by which the signal level exceeds the dead-band until a positive or negative threshold level is reached, at which time a pulse is generated and the integrator reset to a lower magnitude. The pulse rate is thus proportional to the amount by which the input signal level exceeds the established dead-band.
    • 一种用于以表示输入信号电平的速率和性质产生脉冲的电子电路。 为了将脉冲率的变化率限制为由脉冲驱动的元件可以响应的变化率,提供了一种滤波器,其建立信号波形的最大正和负斜率。 对于输入信号电平中的任何突变步长而言,无论幅度变化的大小如何,都能实现相同的斜率。 然后将斜率限制信号馈送到对称的零到正或负无限速率积分器,其建立围绕零电平的死区范围。 当斜率限制信号电平超出死区范围时,积分以与信号电平超过死区的量成比例的速率进行,直到达到正或负阈值电平,此时脉冲 并且积分器复位到较低的幅度。 因此,脉冲速率与输入信号电平超过所建立的死区的量成比例。