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    • 4. 发明授权
    • Method of fabricating a semiconductor device
    • 制造半导体器件的方法
    • US07691706B2
    • 2010-04-06
    • US11616820
    • 2006-12-27
    • Bong Jun Kim
    • Bong Jun Kim
    • H01L21/336
    • H01L21/823481H01L21/76224H01L29/78
    • Embodiments relate to a method for fabricating a semiconductor device. In embodiments, the method may include forming a gate dielectric layer on an active region of a semiconductor substrate defined by an isolation region to form a gate conductive layer pattern, etching the isolation region of the semiconductor substrate where the gate conductive layer pattern is formed, to form an isolation trench, forming a polyoxide layer on the gate conductive layer pattern and a sidewall oxide layer in the trench by carrying out an oxidation process, forming a spacer nitride layer on the polyoxide layer and a liner nitride layer on the sidewall oxide layer by carrying out a nitride layer forming process, and then forming a dielectric layer on an entire surface of the resultant structure to fill the trench.
    • 实施例涉及一种用于制造半导体器件的方法。 在实施例中,该方法可以包括在由隔离区域限定的半导体衬底的有源区上形成栅极电介质层以形成栅极导电层图案,蚀刻形成栅极导电层图案的半导体衬底的隔离区域, 以形成隔离沟槽,通过进行氧化工艺在栅极导电层图案和沟槽中的侧壁氧化物层形成多环氧化物层,在多孔层上形成间隔氮化物层,在侧壁氧化物层上形成衬里氮化物层 通过进行氮化物层形成工艺,然后在所得结构的整个表面上形成电介质层以填充沟槽。
    • 9. 发明授权
    • Warm hydro-forming device
    • 热成型装置
    • US07231793B2
    • 2007-06-19
    • US11040521
    • 2005-01-21
    • Sung Man SohnMun Yong LeeBong Jun KimYoung Hoon Moon
    • Sung Man SohnMun Yong LeeBong Jun KimYoung Hoon Moon
    • B21D26/02B21D9/18
    • B21D26/033B21D26/039B21D26/045B29C33/08B29C43/10B29C2043/3238B29L2023/00Y10T29/49805
    • A warm hydro-forming device comprises: an upper mold and a lower mold respectively mounted to an upper mold die and a lower mold die; a lifting die installed to the lower mold die through a guide unit, an upper portion of the lifting die being connected to the upper mold die through a lifting unit to cooperatively operate in an upward and downward direction with the upper mold die; a pair of hydraulic pressure cylinders for providing an axial compression force to the tube component and supplying a forming hydraulic fluid into the tube component; an ascending and descending unit for ascending or descending the upper mold die; and a heating unit associated with the lifting die such that the heating unit can move toward or away from the tube component. The heating unit heats the tube component and a forming hydraulic fluid through a high frequency induction heating.
    • 一种温暖的加氢成型装置,包括:分别安装在上模具和下模具上的上模具和下模具; 提升模具,其通过导向单元安装到下模具模具上,提升模具的上部通过提升单元连接到上模具,以与上模具成向上和向下的方向协同操作; 一对液压缸,用于向所述管部件提供轴向压缩力并将成形液压流体供应到所述管部件中; 用于上模或下降模具的上升和下降单元; 以及与提升模具相关联的加热单元,使得加热单元可以朝向或远离管部件移动。 加热单元通过高频感应加热来加热管部件和成形液压流体。