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    • 4. 发明授权
    • Defect inspection method and device therefor
    • 缺陷检查方法及其设备
    • US09239283B2
    • 2016-01-19
    • US13993888
    • 2011-11-08
    • Toshifumi HondaYukihiro ShibataAtsushi Taniguchi
    • Toshifumi HondaYukihiro ShibataAtsushi Taniguchi
    • G01N21/00G01N21/956G01N21/95G01N21/88
    • G01N21/00G01N21/8851G01N21/9501G01N21/956G01N2021/8896
    • To process a signal from a plurality of detectors without being affected by a variation in the height of a substrate, and to detect more minute defects on the substrate, a defect inspection device is provided with a photoelectric converter having a plurality of rows of optical sensor arrays in each of first and second light-collecting/detecting unit and a processing unit for processing a detection signal from the first and the second light-collecting/detecting unit to determine the extent to which the positions of the focal points of the first and the second light-collecting/detecting unit are misaligned with respect to the surface of a test specimen, and processing the detection signal to correct a misalignment between the first and the second light-collecting/detecting unit, and the corrected detection signal outputted from the first and the second light-collecting/detecting unit are combined together to detect the defects on the test specimen.
    • 为了处理来自多个检测器的信号而不受基板高度的变化的影响,并且在基板上检测更多的微小缺陷,缺陷检查装置设置有具有多行光学传感器的光电转换器 在第一和第二集光/检测单元中的每一个中的阵列,以及处理单元,用于处理来自第一和第二聚光/检测单元的检测信号,以确定第一和第二聚光/ 第二聚光/检测单元相对于试样的表面不对准,并且处理检测信号以校正第一和第二聚光/检测单元之间的未对准,并且校正的检测信号从 第一和第二聚光/检测单元组合在一起以检测试样上的缺陷。
    • 6. 发明申请
    • DEFECT INSPECTION METHOD AND DEFECT INSPECTION DEVICE
    • 缺陷检查方法和缺陷检查装置
    • US20140268122A1
    • 2014-09-18
    • US14232929
    • 2012-06-28
    • Shunichi MatsumotoAtsushi TaniguchiToshifumi HondaYukihiro ShibataYuta Urano
    • Shunichi MatsumotoAtsushi TaniguchiToshifumi HondaYukihiro ShibataYuta Urano
    • G01N21/95
    • G01N21/9501G01N21/956G01N2201/126G01N2201/127H01L22/12H01L2924/0002H01L2924/00
    • A defect inspection method and device for irradiating a linear region on a surface-patterned sample mounted on a planarly movable table, with illumination light from an inclined direction relative to a direction of a line normal to the sample, next detecting in each of a plurality of directions an image of the light scattered from the sample irradiated with the illumination light, then processing signals obtained by the detection of the images of the scattered light, and thereby detecting a defect present on the sample; wherein the step of detecting the scattered light image in the plural directions is performed through elliptical lenses in which elevation angles of the optical axes thereof are different from each other, within one plane perpendicular to a plane formed by the normal to the surface of the table on which to mount the sample and the longitudinal direction of the linear region irradiated with the irradiation light, the elliptical lenses being formed of circular lenses having left and right portions thereof cut.
    • 一种用于照射安装在平面可移动台上的表面图案样品上的线性区域的缺陷检查方法和装置,其具有相对于垂直于样品的线的方向的倾斜方向的照明光,接下来在多个 指示从照射光照射的样品散射的光的图像,然后处理通过检测散射光的图像而获得的信号,从而检测样品上存在的缺陷; 其特征在于,所述检测多个方向的散射光图像的步骤是通过椭圆形透镜进行的,所述椭圆透镜在光学轴的仰角彼此不同的垂直于与所述表的表面法线形成的平面的一个平面内 在其上安装样品和用照射光照射的线性区域的纵向方向,椭圆形透镜由其左侧和右侧部分切割的圆形透镜形成。
    • 7. 发明申请
    • DEFECT INSPECTION METHOD AND APPARATUS THEREFOR
    • 缺陷检查方法及其设备
    • US20120092484A1
    • 2012-04-19
    • US13375239
    • 2010-07-01
    • Atsushi TaniguchiYukihiro ShibataTaketo UenoToshihiko Nakata
    • Atsushi TaniguchiYukihiro ShibataTaketo UenoToshihiko Nakata
    • H04N7/18
    • G01N21/956G01N21/9501
    • To effectively utilize the polarization property of an inspection subject for obtaining higher inspection sensitivity, for the polarization of lighting, it is necessary to observe differences in the reflection, diffraction, and scattered light from the inspection subject because of polarization by applying light having the same elevation angle and wavelength in the same direction but different polarization. According to conventional techniques, a plurality of measurements by changing polarizations is required to cause a prolonged inspection time period that is an important specification of inspection apparatuses. In this invention, a plurality of polarization states are modulated in micro areas in the lighting beam cross section, images under a plurality of polarized lighting conditions are collectively acquired by separately and simultaneously forming the scattered light from the individual micro areas in the individual pixels of a sensor, whereby inspection sensitivity and sorting and sizing accuracy are improved without reducing throughput.
    • 为了有效地利用检查对象的偏振特性以获得更高的检测灵敏度,对于照明的偏振,需要观察来自检查对象的反射,衍射和散射光的差异,因为通过施加具有相同的光的偏振 仰角和波长相同但偏振不同。 根据常规技术,需要通过改变极化的多个测量来引起作为检查设备的重要规格的延长的检查时间段。 在本发明中,在照明光束横截面的微小区域中调制多个偏振状态,通过分别并且同时形成来自各个像素中的各个微区域的散射光,共同地获得多个偏振光照条件下的图像 传感器,从而在不降低生产能力的情况下提高检测灵敏度和分选和尺寸精度。
    • 8. 发明授权
    • Measuring apparatus, measuring method, and characteristic measurement unit
    • 测量装置,测量方法和特征测量单元
    • US07796257B2
    • 2010-09-14
    • US12087663
    • 2006-12-27
    • Yukitoshi OtaniKazuhiko OkaToshitaka WakayamaAtsushi Taniguchi
    • Yukitoshi OtaniKazuhiko OkaToshitaka WakayamaAtsushi Taniguchi
    • G01J4/00
    • G01N21/21G01J4/04
    • A measuring apparatus includes a light intensity information acquisition section 40 that acquires light intensity information relating to a measurement light containing a given band component, the measurement light having been modulated by optical elements included in an optical system 10 and a measurement target (or a sample 100), and a calculation section 50 that calculates at least one matrix element of a Mueller matrix that indicates the optical characteristics of the measurement target based on the light intensity information relating to the measurement light and a theoretical expression for the light intensity of the measurement light. The light intensity information acquisition section 40 acquires the light intensity information relating to a plurality of the measurement lights obtained from the optical system 10 by changing setting of a principal axis direction of at least one of the optical elements. The calculation section 50 performs a carrier amplitude coefficient calculation process, and a matrix element calculation process that calculates the at least one matrix element based on a carrier amplitude coefficient and the theoretical expression for the carrier amplitude coefficient including the at least one matrix element.
    • 测量装置包括光强度信息获取部分40,其获取与包含给定频带分量的测量光有关的光强度信息,测量光已被包括在光学系统10中的光学元件和测量对象(或样品 100),以及计算部50,其基于与测量光有关的光强度信息和测量光强度的理论表达式,计算指示测量对象的光学特性的Mueller矩阵的至少一个矩阵元素 光。 光强度信息获取部40通过改变至少一个光学元件的主轴方向的设定来获取与从光学系统10获得的多个测量光有关的光强度信息。 计算部分50执行载波幅度系数计算处理和基于载波幅度系数和包括至少一个矩阵元素的载波幅度系数的理论表达式来计算至少一个矩阵元素的矩阵元素计算处理。
    • 10. 发明授权
    • Crash sensor
    • 碰撞传感器
    • US5206469A
    • 1993-04-27
    • US730680
    • 1991-07-16
    • Masaru TakedaAkihiko KuroiwaEtsujiro ImanishiKoji MinekuboTatsuo MunakataAtsushi TaniguchiKazuyuki KitaMasaharu Kakiya
    • Masaru TakedaAkihiko KuroiwaEtsujiro ImanishiKoji MinekuboTatsuo MunakataAtsushi TaniguchiKazuyuki KitaMasaharu Kakiya
    • B60R21/01G01P15/135H01H35/14
    • G01P15/135B60R21/0132H01H35/14H01H35/145
    • The crash sensor of the present invention comprises a magnet, a sensing mass made of a ferromagnetic material and attractable by the magnet, a sleeve made of a paramagnetic material and restricting the movement of the sensing mass in one direction, a pair of strips that make a closed circuit by contact with the sensing mass having moved in one direction and a body fitted with the magnet and housing the sensing mass, the sleeve and the contacts; the crash sensor further comprising a magnetic shield made of a ferromagnetic material and covering the magnet and the body. The magnetic shield forms a closed-type magnetic field by covering the magnet and the body and forms an appropriate magnetic loop in the vicinity of the sensing mass, so that the crash sensor also acts as a magnetic shield to protect itself from being influenced by outside ferromagnetic bodies and makes effective use of the magnetic force of the magnet. The above pair of strips are fitted in the same direction vertically on the inner wall of the body, whereby they do not project out in the axial direction so that the crash sensor can be of a reduced whole length, as well as of smaller outside diameter than conventional crash sensor with its contacts positioned facing each other.
    • 本发明的碰撞传感器包括磁体,由铁磁材料制成并且被磁体吸引的传感质量块,由顺磁性材料制成的套筒并限制感测体在一个方向上的移动,一对条带 通过与感测质量块沿一个方向移动而接触的闭合电路和装配有磁体的主体并容纳感测块,套筒和触点; 碰撞传感器还包括由铁磁材料制成并覆盖磁体和主体的磁屏蔽。 磁屏蔽通过覆盖磁体和主体而形成闭合磁场,并在感测质量块附近形成适当的磁环,使得碰撞传感器也充当磁屏蔽,以保护自身免受外界的影响 铁磁体,有效利用磁铁的磁力。 上述一对条带在主体的内壁上垂直相同的方向嵌合,从而它们不会在轴向方向上突出,使得碰撞传感器可以具有缩短的整个长度以及更小的外径 比传统的碰撞传感器,其触点定位为彼此面对。