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1. 发明授权

US5076692A Particle detection on a patterned or bare wafer surface 失效
标题翻译：在图案或裸晶圆表面上进行粒子检测
公开(公告)号：US5076692A
公开(公告)日：1991-12-31
申请号：US531132
申请日：1990-05-31
申请人： Armand P. Neukermans , Peter C. Jann , Ralph Wolf , David Wolze , Stanley Stokowski
发明人： Armand P. Neukermans , Peter C. Jann , Ralph Wolf , David Wolze , Stanley Stokowski
IPC分类号： H01L21/66 , G01N21/94 , H01L21/027
CPC分类号： G01N21/94 , G01N21/4788
摘要： A method and apparatus for predicting the number of contaminant particles in circuit area of a patterned semiconductor wafer having a number of reflective circuit areas. The method includes forming on a wafer in specified areas, a grating test pattern, such as a line grating. The grating patterns are formed at the same time and in the same manner that repetitive circuit patterns are formed on the wafer. The wafer is then scanned by a light beam. Since the diffraction pattern caused by the grating test patterns is known, it is possible to detect when the light beam is scanning one of the known grating patterns. The diffraction pattern may be inspected for fabrication derived variations. In response to detecting a known grating pattern, a detection mechanism is activated. Since the diffraction pattern is known it may be spatially separated. In this way only light scattered by particles or defects in the pattern are collected and detected. From the scattered light that is collected and detected, a particle count may be determined for the grating pattern area. From this particle count an accurate prediction of the number of particles in the circuit patterns may be made. The apparatus may also inspect bare areas. In this manner real time inspection may be performed on patterned wafers.
摘要翻译：一种用于预测具有多个反射电路区域的图案化半导体晶片的电路区域中的污染物颗粒数量的方法和装置。该方法包括在特定区域的晶片上形成光栅测试图案，例如线光栅。光栅图案是以与在晶片上形成重复电路图案相同的方式形成的。然后通过光束扫描晶片。由于由光栅测试图案引起的衍射图案是已知的，因此可以检测光束何时扫描已知光栅图案之一。可以检查衍射图案以进行制造衍生的变化。响应于检测到已知的光栅图案，检测机构被激活。由于衍射图案是已知的，它可以在空间上分离。以这种方式，仅收集并检测由图案中的颗粒或缺陷散射的光。从收集和检测的散射光中，可以确定光栅图案区域的粒子数。从该粒子计数可以进行电路图案中的粒子数量的准确预测。该设备还可以检查裸露的区域。以这种方式，可以对图案化的晶片进行实时检查。

2. 发明授权

US5488204A Paintbrush stylus for capacitive touch sensor pad 失效
标题翻译：用于电容式触摸传感器垫的画笔触控笔
公开(公告)号：US5488204A
公开(公告)日：1996-01-30
申请号：US324438
申请日：1994-10-17
申请人： Carver A. Mead , Ralph Wolf , Timothy P. Allen
发明人： Carver A. Mead , Ralph Wolf , Timothy P. Allen
IPC分类号： G06F3/023 , G06F3/033 , G06F3/041 , G06F3/044 , G06F3/048 , G08C21/00
CPC分类号： G06F3/04855 , G06F3/041 , G06F3/044 , G06F3/0488 , G06F3/04883 , G06F3/04892 , G06K9/00335
摘要： A proximity sensor system includes a touch-sensor pad with a sensor matrix array having a characteristic capacitance on horizontal and vertical conductors connected to sensor pads. The capacitance changes as a function of the proximity of an object or objects to the sensor matrix. The change in capacitance of each node in both the X and Y directions of the matrix due to the approach of an object is converted to a set of voltages in the X and Y directions. These voltages are processed by circuitry to develop electrical signals representative of the centroid of the profile of the object, i.e, its position in the X and Y dimensions. Noise reduction and background level setting techniques inherently available in the architecture are employed. A conductive paintbrush-type stylus is used to produce paint-like strokes on a display associated with the touch-sensor pad.
摘要翻译：接近传感器系统包括具有传感器矩阵阵列的触摸传感器焊盘，该传感器阵列在连接到传感器焊盘的水平和垂直导体上具有特征电容。电容根据物体或传感器矩阵的接近度而变化。由于物体的接近，矩阵的X和Y方向上的每个节点的电容的变化被转换成在X和Y方向上的一组电压。这些电压由电路处理以产生表示物体轮廓的质心的电信号，即其在X和Y尺寸中的位置。采用本构架中固有可用的降噪和背景设置技术。导电画笔型触笔用于在与触摸传感器垫相关联的显示器上产生油漆状笔触。

3. 发明申请

US20060092142A1 Object position detector with edge motion feature and gesture recognition 失效
标题翻译：具有边缘运动特征和手势识别的物体位置检测器
公开(公告)号：US20060092142A1
公开(公告)日：2006-05-04
申请号：US11303196
申请日：2005-12-15
申请人： David Gillespie , Timothy Allen , Ralph Wolf , Shawn Day
发明人： David Gillespie , Timothy Allen , Ralph Wolf , Shawn Day
IPC分类号： G09G5/00
CPC分类号： G06F3/04883 , G06F3/03547 , G06F3/041 , G06F3/044 , G06F3/047 , G06F3/0488 , G06F2203/04101 , G06F2203/04808 , G06K9/00335
摘要： A method of generating a signal comprising providing a capacitive touch sensor pad including a matrix of X and Y conductors, developing capacitance profiles in one of an X direction and a Y direction from the matrix of X and Y conductors, determining an occurrence of a single gesture through an examination of the capacitance profiles, the single gesture including an application of at least two objects on the capacitive touch sensor pad, and generating a signal indicating the occurrence of the single gesture.
摘要翻译：一种产生信号的方法，包括提供包括X和Y导体的矩阵的电容式触摸传感器焊盘，从X和Y导体的矩阵在X方向和Y方向之一上显影电容分布，确定单个通过检查电容曲线的手势，单个手势包括在电容式触摸传感器垫上的至少两个对象的应用，以及生成指示单个手势的发生的信号。

4. 发明授权

US5543591A Object position detector with edge motion feature and gesture recognition 失效
公开(公告)号：US5543591A
公开(公告)日：1996-08-06
申请号：US320158
申请日：1994-10-07
申请人： David Gillespie , Timothy P. Allen , Ralph Wolf
发明人： David Gillespie , Timothy P. Allen , Ralph Wolf
IPC分类号： G06F3/023 , G06F3/038 , G06F3/041 , G06F3/044 , G06K9/00 , G08C21/00
CPC分类号： G06K9/00335 , G06F3/038 , G06F3/0383 , G06F3/041 , G06F3/0414 , G06F3/044 , G06F3/0486 , G06F3/04883 , G06F3/04892 , G06F2203/04808
摘要： Methods for recognizing gestures made by a conductive object on a touch-sensor pad are disclosed. Tapping, pushing, hopping, and zigzag gestures are recognized by analyzing the position, pressure, and movement of the conductive object on the sensor pad during the time of a suspected gesture, and signals are sent to a host indicating the occurrence of these gestures. Signals for compensating for unintended motion of the conductive object on the touch-sensor pad during the gestures are also sent to the host.

5. 发明申请

US20060187214A1 Object position detector with edge motion feature and gesture recognition 失效
公开(公告)号：US20060187214A1
公开(公告)日：2006-08-24
申请号：US11386354
申请日：2006-03-22
申请人： David Gillespie , Timothy Allen , Ralph Wolf , Shawn Day
发明人： David Gillespie , Timothy Allen , Ralph Wolf , Shawn Day
IPC分类号： G09G5/00
CPC分类号： G06F3/04883 , G06F3/03547 , G06F3/044 , G06F2203/04101
摘要： A method of generating a signal comprising providing a capacitive touch sensor pad including a matrix of X and Y conductors, developing capacitance profiles in one of an X direction and a Y direction from the matrix of X and Y conductors, determining an occurrence of a single gesture through an examination of the capacitance profiles, the single gesture including an application of at least two objects on the capacitive touch sensor pad, and generating a signal indicating the occurrence of the single gesture.

6. 发明授权

US07106434B1 Inspection tool 有权
标题翻译：检验工具
公开(公告)号：US07106434B1
公开(公告)日：2006-09-12
申请号：US10628626
申请日：2003-07-28
申请人： Evan R. Mapoles , Ralph Wolf
发明人： Evan R. Mapoles , Ralph Wolf
IPC分类号： G01B11/24
CPC分类号： G01R31/2894 , G01R31/2893
摘要： An integrated inspection system adapted to inspect a substrate. A first inspection station performs a first inspection of the substrate at a first resolution, and identifies defect candidate sites. A controller determines position information associated with each of the identified defect candidate sites. A second inspection station performs a second inspection of the defect candidate sites at a second resolution, where the second resolution is higher than the first resolution. A substrate stage moves the substrate between the first inspection station and the second inspection station, and indexes the substrate under both the first inspection station and the second inspection station.
摘要翻译：适用于检查基板的综合检查系统。第一检查站以第一分辨率执行基板的第一次检查，并且识别缺陷候选位置。控制器确定与所识别的缺陷候选位置中的每一个相关联的位置信息。第二检查站以第二分辨率执行第二分辨率高于第一分辨率的缺陷候选位置的第二次检查。衬底台在第一检查站和第二检查站之间移动衬底，并且在第一检查站和第二检查站两者下对衬底进行索引。

7. 发明申请

US20050108134A1 Managing an investment portfolio 审中-公开
标题翻译：管理投资组合
公开(公告)号：US20050108134A1
公开(公告)日：2005-05-19
申请号：US10712082
申请日：2003-11-13
申请人： William Harlow , Ralph Wolf , Eric Penanhoat
发明人： William Harlow , Ralph Wolf , Eric Penanhoat
IPC分类号： G06Q40/00 , G06F17/60
CPC分类号： G06Q40/06 , G06Q40/025
摘要： There are methods and apparatus, including computer program products, for managing an investment portfolio. For example, there is a method that includes receiving asset classes with corresponding sets of financial data, determining variation information for the sets of financial data, and determining a final set of factors based on the variation information.
摘要翻译：有一些方法和设备，包括计算机程序产品，用于管理投资组合。例如，存在一种方法，包括接收具有相应财务数据集的资产类别，确定财务数据组的变化信息，以及基于变化信息确定最终因素集合。

8. 发明申请

US20050092899A1 Apparatus and methods for optically inspecting a sample for anomalies 有权
标题翻译：用于光学检查样品异常的装置和方法
公开(公告)号：US20050092899A1
公开(公告)日：2005-05-05
申请号：US10993473
申请日：2004-11-18
申请人： Ralph Wolf , Eva Benitez , Dongsheng (Don) Chen , John Greene , Jamie Sullivan , Eric Vella , Khiem Vo
发明人： Ralph Wolf , Eva Benitez , Dongsheng (Don) Chen , John Greene , Jamie Sullivan , Eric Vella , Khiem Vo
IPC分类号： G01B11/30 , G01N21/47 , G01N21/88 , G01N21/95 , G01N21/956 , H01J40/14
CPC分类号： G01N21/956 , G01N21/47 , G01N21/9501
摘要： Disclosed are methods and apparatus for detecting a relatively wide dynamic range of intensity values from a beam (e.g., scattered light, reflected light, or secondary electrons) originating from a sample, such as a semiconductor wafer. In other words, the inspection system provides detected output signals having wide dynamic ranges. The detected output signals may then be analyzed to determine whether defects are present on the sample. For example, the intensity values from a target die are compared to the intensity values from a corresponding portion of a reference die, where a significant intensity difference may be defined as a defect. In a specific embodiment, an inspection system for detecting defects on a sample is disclosed. The system includes a beam generator for directing an incident beam towards a sample surface and a detector positioned to detect a detected beam originating from the sample surface in response to the incident beam. The detector has a sensor for detecting the detected beam and generating a detected signal based on the detected beam and a non-linear component coupled to the sensor. The non-linear component is arranged to generate a non-linear detected signal based on the detected signal. The detector further includes a first analog-to-digital converter (ADC) coupled to the non-linear component. The first ADC is arranged to digitize the non-linear detected signal into a digitized detected signal.
摘要翻译：公开了用于检测来自诸如半导体晶片的样品的光束（例如，散射光，反射光或二次电子）的相对宽的动态范围的方法和装置。换句话说，检查系统提供检测到的具有宽动态范围的输出信号。然后可以分析检测到的输出信号，以确定样品中是否存在缺陷。例如，将来自目标管芯的强度值与来自参考管芯的相应部分的强度值进行比较，其中将显着的强度差定义为缺陷。在具体实施例中，公开了一种用于检测样品上的缺陷的检查系统。该系统包括用于将入射光束引向样品表面的光束发生器，以及响应入射光束检测来自样品表面的检测光束的检测器。检测器具有用于检测检测到的光束并基于检测到的光束产生检测信号的传感器和耦合到传感器的非线性分量。非线性分量被布置成基于检测到的信号产生非线性检测信号。检测器还包括耦合到非线性分量的第一模数转换器（ADC）。第一ADC被布置成将非线性检测信号数字化为数字化的检测信号。

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