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1. 发明授权

US4770680A Wafer carrier for a semiconductor device fabrication, having means for sending clean air stream to the wafers stored therein 失效
标题翻译：用于半导体器件制造的晶片载体，具有用于将清洁空气流发送到其中存储的晶片的装置
公开(公告)号：US4770680A
公开(公告)日：1988-09-13
申请号：US48350
申请日：1987-05-11
申请人： Akira Machida , Akira Abiru
发明人： Akira Machida , Akira Abiru
IPC分类号： B65D85/86 , B65G1/04 , H01L21/00 , H01L21/304 , H01L21/67 , H01L21/673 , B01D50/00
CPC分类号： H01L21/67017 , B65G1/0471 , H01L21/6732 , Y10S414/14 , Y10S55/18 , Y10S55/29
摘要： A compact wafer carrier for storing spaced semiconductor wafers in parallel with each other, is provided for fabrication processes of a semiconductor device requiring a high particulate contamination control. The wafer carrier has an air cleaning device, including a secondary battery as a power source, a motor fan, and a particulate air filter, and a storing chamber directly connected to the air cleaning device for storing the wafers. The storing chamber has a first opening for receiving the filtered air flow, and a second opening for loading and unloading the wafers, both openings facing each other. As a result, the major part of the filtered air flows in a laminated stream passing along the surfaces of the wafers stored with a fairy high speed, serving to protect the wafers from the intrusion of the particles contained in the environmental air, and removing the particles originally adhered to the surfaces of the wafers.

2. 发明申请

US20140018955A1 PRODUCTION EFFICIENCY IMPROVING APPARATUS, PRODUCTION EFFICIENCY IMPROVING METHOD, AND COMPUTER PROGRAM 有权
标题翻译：生产效率改善装置，生产效率改进方法和计算机程序
公开(公告)号：US20140018955A1
公开(公告)日：2014-01-16
申请号：US14004120
申请日：2012-03-09
申请人： Teruo Asakawa , Makoto Yamamoto , Akira Machida , Masaaki Kawaguchi
发明人： Teruo Asakawa , Makoto Yamamoto , Akira Machida , Masaaki Kawaguchi
IPC分类号： G05B19/418
CPC分类号： G05B19/4189 , G05B19/41865 , G05B2219/31372 , H01L21/67276 , Y02P90/12 , Y02P90/20 , Y02P90/28
摘要： A production efficiency improving apparatus includes a first communicating means for communicating information with a plurality of processing apparatuses that process objects, and a second communicating means for communicating conveyance control information, with a conveyance system comprising conveyance apparatuses for conveying the objects between the plurality of processing apparatuses. A means for predicting, on the basis of information communicated by the first communicating means, the conveying timing at which the processing apparatus needs to send out processed objects, and the conveying timing at which the processing apparatus needs to bring in unprocessed objects. A generating means generates the control information such that the conveyance apparatus will arrive at the processing apparatus that is the destination of the communication of information at the predicted timing predicted by the means for predicting.
摘要翻译：一种生产效率提高装置包括：第一通信装置，用于与处理物体的多个处理装置进行信息通信;以及第二通信装置，用于传送传送控制信息;传送系统，包括用于在多个处理之间传送对象的传送装置设备。一种用于根据第一通信装置传送的信息，预测处理装置需要发送处理对象的传送定时以及处理装置需要引入未处理对象的传送定时的装置。发生装置产生控制信息，使得输送装置将到达作为通过预测装置预测的预测定时的信息通信的目的地的处理装置。

3. 发明授权

US09268328B2 Production efficiency improving apparatus, production efficiency improving method, and computer program 有权
标题翻译：生产效率提高装置，生产效率提高方法和计算机程序
公开(公告)号：US09268328B2
公开(公告)日：2016-02-23
申请号：US14004120
申请日：2012-03-09
申请人： Teruo Asakawa , Makoto Yamamoto , Akira Machida , Masaaki Kawaguchi
发明人： Teruo Asakawa , Makoto Yamamoto , Akira Machida , Masaaki Kawaguchi
IPC分类号： G06F7/00 , G06F19/00 , G05B19/418 , H01L21/67
CPC分类号： G05B19/4189 , G05B19/41865 , G05B2219/31372 , H01L21/67276 , Y02P90/12 , Y02P90/20 , Y02P90/28
摘要： A production efficiency improving apparatus includes a first communicating means for communicating information with a plurality of processing apparatuses that process objects, and a second communicating means for communicating conveyance control information, with a conveyance system comprising conveyance apparatuses for conveying the objects between the plurality of processing apparatuses. A means for predicting, on the basis of information communicated by the first communicating means, the conveying timing at which the processing apparatus needs to send out processed objects, and the conveying timing at which the processing apparatus needs to bring in unprocessed objects. A generating means generates the control information such that the conveyance apparatus will arrive at the processing apparatus that is the destination of the communication of information at the predicted timing predicted by the means for predicting.
摘要翻译：一种生产效率提高装置包括：第一通信装置，用于与处理物体的多个处理装置进行信息通信;以及第二通信装置，用于传送传送控制信息;传送系统，包括用于在多个处理之间传送对象的传送装置设备。一种用于根据第一通信装置传送的信息，预测处理装置需要发送处理对象的传送定时以及处理装置需要引入未处理对象的传送定时的装置。发生装置产生控制信息，使得输送装置将到达作为通过预测装置预测的预测定时的信息通信的目的地的处理装置。

4. 发明授权

US4848536A Apparatus for transporting an electrically conductive wafer 失效
标题翻译：用于输送导电晶片的装置
公开(公告)号：US4848536A
公开(公告)日：1989-07-18
申请号：US174737
申请日：1988-03-29
申请人： Akira Machida
发明人： Akira Machida
IPC分类号： B65G54/02 , B65G49/07 , H01L21/67 , H01L21/677
CPC分类号： H01L21/67784
摘要： A wafer transporter comprising a plurality of plane electrodes which are horizontally coplanar with each other. The plane electrodes face the wafer to be transported. A plurality of air nozzles are provided through the electrodes, and air is blown from the nozzles perpendicularly toward the wafer surface. A voltage is applied between the electrodes facing the wafer. The applied voltage is divided by the capacitances between the wafer which is electrically conductive, and the electrodes, thus the wafer is attracted vertically toward the electrode, and is maintained without friction by the balance of the repulsive force of the air blowing and the attractive electrostatic force. The divided voltages become unequal due to the difference of the wafer area facing respective electrodes. This voltage difference produces a horizontal force which moves the wafer in a horizontal direction. The wafer is forced to stay at a balancing point where the induced voltages are equal. This is used to prevent the wafer from deviating from the course. Successive switching of the applied voltage to a next electrode in the direction of the wafer's movement allows the wafer to travel along the row of the electrodes.

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