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    • 9. 发明申请
    • ELEVATOR CONTROL DEVICE
    • 电梯控制装置
    • US20090026021A1
    • 2009-01-29
    • US12016076
    • 2008-01-17
    • Yasuki KimuraNaoki HashiguchiSatoshi Suzuki
    • Yasuki KimuraNaoki HashiguchiSatoshi Suzuki
    • B66B1/28
    • B66B9/00B66B11/008
    • An elevator control device for controllably driving multiple traction units includes position sensors and current supplies. Each of the current supplies includes a position controller for generating a speed command for the corresponding traction unit based on input difference between a common position command for the traction units and a feedback signal derived from an output of the pertinent position sensor, a speed controller for generating a current command for the corresponding traction unit based on an input difference between the speed command generated by the position controller and a feedback signal obtained by differentiating the output of the pertinent position sensor, and a current controller for supplying an electric current to the corresponding traction unit based on the current command generated by the speed controller.
    • 用于可控地驱动多个牵引单元的电梯控制装置包括位置传感器和电流供应。 每个电流供应包括位置控制器,用于根据用于牵引单元的公共位置命令和从相关位置传感器的输出得到的反馈信号之间的输入差产生对应的牵引单元的速度指令;位置控制器,用于 基于由位置控制器产生的速度指令与通过对相关位置传感器的输出进行微分而获得的反馈信号之间的输入差异,产生对应的牵引单元的电流指令;以及电流控制器,用于向相应的牵引单元提供电流 牵引单元基于由速度控制器产生的当前指令。
    • 10. 发明授权
    • Electron beam writing method and lithography mask manufacturing method
    • 电子束写入方法和光刻掩模制造方法
    • US07592103B2
    • 2009-09-22
    • US11094306
    • 2005-03-31
    • Yasuki Kimura
    • Yasuki Kimura
    • G03F9/00
    • H01J37/3026G03F1/78H01J2237/31769Y10S430/143
    • A writing pattern to be a correcting object is divided by a rough mesh for a Foggy effect correction and a fine mesh for a proximity effect correction, a rate of an area occupied by the pattern to be written for each of the meshes is obtained, a stored energy based on a Foggy effect and a proximity effect in execution of exposure in a state in which a correction for a calculating object mesh is not carried out at all is calculated, an dose in the fine mesh for a proximity effect correction is obtained by a first calculation in such a manner that an influence of the Foggy effect and the proximity effect is reduced and a pattern and a dimension which can disregard the influence of the Foggy effect and the proximity effect are coincident with each other by the stored energy which is calculated, are calculation is carried out in such a manner that the pattern and the dimension which can disregard the influence of the Foggy effect and the proximity effect are coincident with each other with the influence of the Foggy effect and the proximity effect fixed, and the recalculation is repeated until desirable precision in a dimension is reached.
    • 作为校正对象的写入图案被用于Foggy效果校正的粗糙网格和用于邻近效应校正的精细网格划分,获得要为每个网格写入的图案所占据的面积的比率, 计算出根据Foggy效应的存储能量和在执行计算对象网格的校正完全不执行的状态下执行曝光的接近效应,用于邻近效应校正的细网格中的剂量通过 以这样的方式进行第一次计算,使得雾效应和邻近效应的影响减小,并且可以忽略雾效应和邻近效应的影响的图案和尺寸彼此一致,存储的能量是 进行计算时,以能够忽视雾效应和邻近效应的影响的图案和尺寸相互一致的方式进行计算, 雾效应和邻近效应的影响被固定,并且重新计算重复直到达到所需尺寸的理想精度。