专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US5358899A Oxygen assisted ohmic contact formation to n-type gallium arsenide 失效
标题翻译：氧辅助欧姆接触形成到n型砷化镓
公开(公告)号：US5358899A
公开(公告)日：1994-10-25
申请号：US193968
申请日：1994-02-09
申请人： Aaron J. Fleischman , Naftali E. Lustig , Robert G. Schad
发明人： Aaron J. Fleischman , Naftali E. Lustig , Robert G. Schad
IPC分类号： H01L21/28 , H01L21/285 , H01L29/43 , H01L29/45 , H01L21/44
CPC分类号： H01L29/452 , H01L21/28575
摘要： This invention describes a low resistance contact structure to n-type GaAs and a method for making such a contact structure. The contact structure is formed by depositing successive layers of Ni, Au, Ge, and Ni. A fifth layer is then deposited on the first four layers. The fifth layer is a metallic tungsten oxide. The metallic tungsten oxide is formed by sputtering tungsten onto the 4 layer stack in a low pressure argon plus oxygen atmosphere. The resulting 5 layer stack is then annealed in a rapid thermal anneal (RTA) process. The RTA process heats the stack for 5 seconds at 600 degrees. The resulting structure consists of an intermetallic NiGe compound having a small amount of a AuGa compound dispersed within it and being covered by a metallic tungsten oxide film. The oxygen from the metallic tungsten oxide film acts as a gettering mechanism to create gallium vacancies in the GaAs lattice structure during the RTA process. The oxygen forms a compound with gallium which is sandwiched between the metallic tungsten layer and the NiGe metallurgy. The sheet resistance of the contact metallurgy is low because the metallic tungsten oxide film is substantially thicker than that required to provide oxygen for the gettering process. The contact resistance to the n-type GaAs is low because the oxygen acts in a similar fashion to gold and creates more gallium vacancies in the GaAs. These vacancies are filled with an n-type dopant (Ge), supplied by the contact metallurgy, to create a better ohmic contact. The contact structure is reliable because there is a low gold content in the contact and because the nickel stabilizes the germanium which is not used for filling the gallium vacancies in the GaAs lattice.
摘要翻译：本发明描述了对n型GaAs的低电阻接触结构和制造这种接触结构的方法。接触结构通过沉积Ni，Au，Ge和Ni的连续层而形成。然后将第五层沉积在前四层上。第五层是金属氧化钨。通过在低压氩气和氧气气氛中将钨溅射到4层叠层上形成金属氧化钨。然后将所得的5层堆叠在快速热退火（RTA）工艺中退火。 RTA过程以600度加热堆叠5秒钟。所得结构由具有少量分散在其内并由金属氧化钨膜覆盖的AuGa化合物的金属间NiGe化合物组成。来自金属氧化钨膜的氧气作为吸气机制，在RTA工艺期间产生GaAs晶格结构中的镓空位。氧气与金属钨层和NiGe冶金之间形成与镓的化合物。接触冶金的薄层电阻低，因为金属氧化钨薄膜比为吸气过程提供氧气所需的金属氧化物薄膜要厚。对n型GaAs的接触电阻很低，因为氧以与金类似的方式起作用，并在GaAs中产生更多的镓空位。这些空位填充有由接触冶金提供的n型掺杂剂（Ge），以产生更好的欧姆接触。接触结构是可靠的，因为接触中的金含量低，并且因为镍使不稳定锗不能用于填充GaAs晶格中的镓空位。

2. 发明授权

US5317190A Oxygen assisted ohmic contact formation to N-type gallium arsenide 失效
标题翻译：氧辅助欧姆接触形成N型砷化镓
公开(公告)号：US5317190A
公开(公告)日：1994-05-31
申请号：US782683
申请日：1991-10-25
申请人： Aaron J. Fleischman , Naftali E. Lustig , Robert G. Schad
发明人： Aaron J. Fleischman , Naftali E. Lustig , Robert G. Schad
IPC分类号： H01L21/28 , H01L21/285 , H01L29/43 , H01L29/45 , H01L29/400
CPC分类号： H01L29/452 , H01L21/28575
摘要： This invention describes a low resistance contact structure to n-type GaAs and a method for making such a contact structure. The contact structure is formed by depositing successive layers of Ni, Au, Ge, and Ni. A fifth layer is then deposited on the first four layers. The fifth layer is a metallic tungsten oxide. The metallic tungsten oxide is formed by sputtering tungsten onto the 4 layer stack in a low pressure argon plus oxygen atmosphere. The resulting 5 layer stack is then annealed in a rapid thermal anneal (RTA) process. The RTA process heats the stack for 5 seconds at 600 degrees. The resulting structure consists of an intermetallic NiGe compound having a small amount of a AuGa compound dispersed within it and being covered by a metallic tungsten oxide film. The oxygen from the metallic tungsten oxide film acts as a gettering mechanism to create gallium vacancies in the GaAs lattice structure during the RTA process. The oxygen forms a compound with gallium which is sandwiched between the metallic tungsten layer and the NiGe metallurgy. The sheet resistance of the contact metallurgy is low because the metallic tungsten oxide film is substantially thicker than that required to provide oxygen for the gettering process. The contact resistance to the n-type GaAs is low because the oxygen acts in a similar fashion to gold and creates more gallium vacancies in the GaAs. These vacancies are filled with an n-type dopant (Ge), supplied by the contact metallurgy, to create a better ohmic contact. The contact structure is reliable because there is a low gold content in the contact and because the nickel stabilizes the germanium which is not used for filling the gallium vacancies in the GaAs lattice.
摘要翻译：本发明描述了对n型GaAs的低电阻接触结构和制造这种接触结构的方法。接触结构通过沉积Ni，Au，Ge和Ni的连续层而形成。然后将第五层沉积在前四层上。第五层是金属氧化钨。通过在低压氩气和氧气气氛中将钨溅射到4层叠层上形成金属氧化钨。然后将所得的5层堆叠在快速热退火（RTA）工艺中退火。 RTA过程以600度加热堆叠5秒钟。所得结构由具有少量分散在其内并由金属氧化钨膜覆盖的AuGa化合物的金属间NiGe化合物组成。来自金属氧化钨膜的氧气作为吸气机制，在RTA工艺期间产生GaAs晶格结构中的镓空位。氧气与金属钨层和NiGe冶金之间形成与镓的化合物。接触冶金的薄层电阻低，因为金属氧化钨薄膜比为吸气过程提供氧气所需的金属氧化物薄膜要厚。对n型GaAs的接触电阻很低，因为氧以与金类似的方式起作用，并在GaAs中产生更多的镓空位。这些空位填充有由接触冶金提供的n型掺杂剂（Ge），以产生更好的欧姆接触。接触结构是可靠的，因为接触中的金含量低，并且因为镍使不稳定锗不能用于填充GaAs晶格中的镓空位。

3. 发明授权

US06447449B1 System for measuring intraocular pressure of an eye and a MEM sensor for use therewith 有权
标题翻译：用于测量眼睛眼内压的系统和与其一起使用的MEM传感器
公开(公告)号：US06447449B1
公开(公告)日：2002-09-10
申请号：US09642573
申请日：2000-08-21
申请人： Aaron J. Fleischman , Shuvo Roy
发明人： Aaron J. Fleischman , Shuvo Roy
IPC分类号： A61B316
CPC分类号： A61B3/16
摘要： A tonometer sensor for disposition in proximity to a portion of a surface of eye comprises a substrate including a contact surface for making contact with the surface portion of the eye. The contact surface includes an outer non-compliant region and in inner compliant region fabricated as an impedance element that varies in impedance as the inner region changes shape. A first region of material is responsive to a non-invasive external force to press the contact surface against the surface portion of the eye and cause the compliant region to change shape in proportion to an intraocular pressure of the eye. A second region of conductive material is electrically coupled to the impedance element of the compliant region and is responsive to an external signal for energizing the impedance element so that the intraocular pressure may be determined.
摘要翻译：用于配置在眼睛表面的一部分附近的眼压计传感器包括包括用于与眼睛的表面部分接触的接触表面的基底。接触表面包括外部非顺应性区域，并且在内部顺应性区域中制造为阻抗元件，该阻抗元件在内部区域改变形状时阻抗变化。第一材料区域响应于非侵入性外力以将接触表面压靠眼睛的表面部分，并使顺应区域与眼睛的眼内压成比例地改变形状。导电材料的第二区域电耦合到顺应性区域的阻抗元件，并且响应于外部信号以激励阻抗元件，使得可以确定眼内压。

4. 发明授权

US07771351B1 Method and apparatus for eddy current compensation in a radio frequency probe 有权
标题翻译：无线电频率探头中涡流补偿的方法和装置
公开(公告)号：US07771351B1
公开(公告)日：2010-08-10
申请号：US11441851
申请日：2006-05-26
申请人： James R. Talman , Aaron J. Fleischman , Brian L. Sauer , Shuvo Roy
发明人： James R. Talman , Aaron J. Fleischman , Brian L. Sauer , Shuvo Roy
IPC分类号： A61B5/07 , A61B5/00
CPC分类号： A61B5/0031 , A61B5/076 , A61B2562/028
摘要： Systems and methods are provided for determining a characteristic of an associated in vivo sensor within a living body. A transmit coil produces an excitation signal, having a first orientation, to excite the in vivo sensor to produce a response signal. A receive coil produces a current in response to the response signal. The receive coil is oriented to interact with signals having a second orientation that is substantially orthogonal to first orientation. The probe further comprises at least one eddy current compensation coil that produces a compensation field. A component of the compensation field along the second orientation has a magnitude at the receive coil substantially equal and opposite to a magnitude of a similarly oriented component of a magnetic field associated with eddy currents induced within the body.
摘要翻译：提供了用于确定活体内的相关体内传感器的特性的系统和方法。发射线圈产生具有第一取向的激励信号，以激发体内传感器以产生响应信号。接收线圈响应于响应信号产生电流。接收线圈定向成与具有基本上与第一取向正交的第二取向的信号相互作用。探头还包括产生补偿场的至少一个涡流补偿线圈。沿着第二取向的补偿场的分量在接收线圈处具有与在体内引起的涡流相关联的磁场的类似取向分量的幅度基本相等的量值。

5. 发明授权

US06790372B2 Microneedle array module and method of fabricating the same 失效
公开(公告)号：US06790372B2
公开(公告)日：2004-09-14
申请号：US10162848
申请日：2002-06-05
申请人： Shuvo Roy , Aaron J. Fleischman
发明人： Shuvo Roy , Aaron J. Fleischman
IPC分类号： B61C100
CPC分类号： B81C1/00111 , A61M37/0015 , A61M2037/003 , A61M2037/0038 , A61M2037/0053 , B81B2201/055
摘要： A microneedle array module is disclosed comprising a multiplicity of microneedles affixed to and protruding outwardly from a front surface of a substrate to form the array, each microneedle of the array having a hollow section which extends through its center to an opening in the tip thereof. A method of fabricating the microneedle array module is also disclosed comprising the steps of: providing etch resistant mask layers to one and another opposite surfaces of a substrate to predetermined thicknesses; patterning the etch resistant mask layer of the one surface for outer dimensions of the microneedles of the array; patterning the etch resistant mask layer of the other surface for inner dimensions of the microneedles of the array; etching unmasked portions of the substrate from one and the other surfaces to first and second predetermined depths, respectively; and removing the mask layers from the one and the other surfaces. One embodiment of the method includes the steps of: providing an etch resistant mask layer to the other surface of the substrate to a predetermined thickness; patterning the etch resistant mask layer of the other surface to define a reservoir region in the substrate; and etching away the unmasked reservoir region of the substrate to form a reservoir well in the other surface of the substrate. A layer of material may be provided to the other surface to enclose the reservoir well and a passageway is provided through the layer to the well region.

6. 发明授权

US06994672B2 Apparatus and method for measuring intraocular pressure 失效
标题翻译：用于测量眼内压的装置和方法
公开(公告)号：US06994672B2
公开(公告)日：2006-02-07
申请号：US10118440
申请日：2002-04-08
申请人： Aaron J. Fleischman , Shuvo Roy
发明人： Aaron J. Fleischman , Shuvo Roy
IPC分类号： A61B3/16
CPC分类号： A61B3/16 , A61B2562/0247
摘要： An apparatus (176) for measuring intraocular pressure (IOP) comprises an applanation tonometer (180) having a distal end that is movable toward the eye and a disposable module (188) positioned at the distal end. The module (188) includes a sensor carrier (192) and a sensor (10) connected to the sensor carrier. The sensor (10) comprises a contact surface (14) for making contact with a surface portion of the eye (36). The contact surface (14) includes an outer non-compliant region (16) and an inner compliant region (18) fabricated as an impedance element that varies in impedance as the inner compliant region changes shape. The sensor (10) further comprises a region of conductive material (38) electrically coupled to the impedance element of the compliant region (18) and responsive to an external signal for energizing the impedance element so that the IOP may be determined.
摘要翻译：用于测量眼内压（IOP）的装置（176）包括具有能够朝向眼睛移动的远端的压平眼压计（180）和位于远端的一次性模块（188）。模块（188）包括连接到传感器载体的传感器载体（192）和传感器（10）。传感器（10）包括用于与眼睛（36）的表面部分接触的接触表面（14）。接触表面（14）包括外部非顺应性区域（16）和内部顺应性区域（18），该内部顺应性区域（18）被制造为当内部顺应性区域改变形状时阻抗变化的阻抗元件。传感器（10）还包括电耦合到柔性区域（18）的阻抗元件的导电材料（38）的区域，并且响应于外部信号来激励阻抗元件，使得可以确定IOP。

7. 发明授权

US06749568B2 Intraocular pressure measurement system including a sensor mounted in a contact lens 有权
标题翻译：眼内压测量系统，包括安装在隐形眼镜中的传感器
公开(公告)号：US06749568B2
公开(公告)日：2004-06-15
申请号：US10128321
申请日：2002-04-22
申请人： Aaron J. Fleischman , Shuvo Roy , Hilel Lewis
发明人： Aaron J. Fleischman , Shuvo Roy , Hilel Lewis
IPC分类号： A61B316
CPC分类号： A61B3/16 , A61B2562/028
摘要： An apparatus for measuring intraocular pressure (IOP) comprises a contact lens including an inner surface contoured to a surface portion of an eye and a sensor disposed in the contact lens. The sensor comprises a contact surface for making contact with the surface portion of the eye. The contact surface includes an outer non-compliant region and an inner compliant region fabricated as an impedance element that varies in impedance as the inner compliant region changes shape. The sensor further comprises a region of conductive material electrically coupled to the impedance element of the compliant region and responsive to an external signal for energizing the impedance element so that the IOP may be determined.
摘要翻译：用于测量眼内压（IOP）的装置包括隐形眼镜，其包括形成眼睛表面部分的内表面和设置在隐形眼镜中的传感器。传感器包括用于与眼睛的表面部分接触的接触表面。接触表面包括外部非顺应性区域和制造为阻抗元件的内部顺应性区域，其随着内部顺应性区域改变形状而阻抗变化。该传感器还包括导电材料的区域，该区域电耦合到柔性区域的阻抗元件，并且响应外部信号以激发阻抗元件，使得可以确定IOP。

8. 发明授权

US06706005B2 Apparatus and method for assessing loads on adjacent bones 有权
公开(公告)号：US06706005B2
公开(公告)日：2004-03-16
申请号：US09939331
申请日：2001-08-24
申请人： Shuvo Roy , Aaron J. Fleischman , Edward C. Benzel , Lisa Ferrara
发明人： Shuvo Roy , Aaron J. Fleischman , Edward C. Benzel , Lisa Ferrara
IPC分类号： A61B5103
CPC分类号： A61F2/442 , A61B5/0031 , A61B5/036 , A61B5/4504 , A61B17/7044 , A61B2562/0247 , A61B2562/0261 , A61B2562/028 , A61F2/30744 , A61F2/446 , A61F2002/2835 , A61F2002/30563 , A61F2002/3067 , A61F2002/30772 , A61F2002/3085 , A61F2002/4666 , A61F2250/0002
摘要： An apparatus (10) that utilizes microelectromechanical systems (MEMS) technology to provide an in vivo assessment of loads on adjacent bones (24 and 26) comprises a body (34) for insertion between the adjacent bones. At least one sensor (42) is associated with the body (34). The sensor (42) generates an output signal in response to and indicative of a load being applied to the body (34) through the adjacent bones (24 and 26). A telemetric device (40) is operatively coupled with the sensor (42). The telemetric device (40) is operable to receive the output signal from the sensor (42) and to transmit an EMF signal dependent upon the output signal. According to various aspects of the invention, the sensor comprises a pressure sensor (42), a load cell (320), and/or at least one strain gauge (142).

9. 发明授权

US06682490B2 Apparatus and method for monitoring a condition inside a body cavity 有权
标题翻译：用于监测体腔内的状况的装置和方法
公开(公告)号：US06682490B2
公开(公告)日：2004-01-27
申请号：US10005307
申请日：2001-12-03
申请人： Shuvo Roy , Kenneth Ouriel , Aaron J. Fleischman
发明人： Shuvo Roy , Kenneth Ouriel , Aaron J. Fleischman
IPC分类号： A61B50215
CPC分类号： A61B5/6876 , A61B5/0031 , A61B5/0215 , A61B5/036 , A61B5/076 , A61B5/6882 , A61B5/6884
摘要： An apparatus (10) utilizes microelectricalmechanical systems (MEMS) technology to monitor a condition in a body cavity (28). The apparatus (10) comprises at least one sensor (42) for insertion into the body cavity. The sensor (42) generates a signal in response to a condition inside the body cavity (28). At least one telemetric device (44) is operatively coupled with the sensor (42). The telemetric device (44) is operable to receive the signal from the sensor (42) and to transmit an electromagnetic signal dependent upon the signal. The telemetric device (44) includes at least one coil member (82) extending from the telemetric device. The coil member (82) engages the body cavity (28) to secure the telemetric device (44) in the body cavity.
摘要翻译：一种装置（10）利用微机电系统（MEMS）技术来监测体腔（28）中的状况。装置（10）包括用于插入体腔的至少一个传感器（42）。传感器（42）响应于体腔（28）内的状况产生信号。至少一个遥测装置（44）可操作地与传感器（42）耦合。遥测装置（44）可操作以从传感器（42）接收信号并传送取决于该信号的电磁信号。遥测装置（44）包括从遥测装置延伸的至少一个线圈构件（82）。线圈构件（82）接合体腔（28）以将遥测装置（44）固定在体腔中。

10. 发明授权

US06641540B2 Miniature ultrasound transducer 有权
公开(公告)号：US06641540B2
公开(公告)日：2003-11-04
申请号：US09948068
申请日：2001-09-06
申请人： Aaron J. Fleischman , Shuvo Roy , Geoffrey R. Lockwood
发明人： Aaron J. Fleischman , Shuvo Roy , Geoffrey R. Lockwood
IPC分类号： A61B814
CPC分类号： B06B1/0688 , B06B1/0651
摘要： An ultrasonic transducer (108) for use in medical imaging comprises a substrate (300) having first and second surfaces. The substrate (300) includes an aperture (301) extending from the first surface to the second surface. Electronic circuitry (302) is located on the first surface. A diaphragm (304) is positioned at least partially within the aperture (301) and in electrical communication with the electronic circuitry (302). The diaphragm (304) has an arcuate shape, formed by applying a differential pressure, that is a section of a sphere. A binder material (314) is in physical communication with the diaphragm (304) and the substrate (300).

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式