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    • 1. 发明授权
    • Magnetron sputtering apparatus
    • 磁控溅射装置
    • US08808514B2
    • 2014-08-19
    • US13380103
    • 2011-04-21
    • Zhenyu Xie
    • Zhenyu Xie
    • C23C14/35
    • C23C14/352C23C14/564H01J37/32743H01J37/32788H01J37/32899H01J37/3405H01J2237/166
    • A magnetron sputtering apparatus comprising: a deposition chamber; a processing chamber in communication with the deposition chamber, wherein a target area composed of targets is located at the place where the processing chamber is connected with the deposition chamber; a transfer chamber provided adjacent to the processing chamber, wherein a first gas-tight gate is provided on a wall of the transfer chamber, the first gas-tight gate being opened or closed so as to control the vacuum degree in the transfer chamber and to replace the targets; a transfer device which is provided in the processing chamber and/or the transfer chamber, transfers the target between the transfer chamber and the processing chamber via a second gas-tight gate provided on the adjacent walls of the transfer chamber and the processing chamber for replacement when the transfer chamber is in a set vacuum degree state.
    • 一种磁控溅射装置,包括:沉积室; 与沉积室连通的处理室,其中由目标构成的目标区域位于处理室与沉积室连接的位置处; 与处理室相邻设置的传送室,其中第一气密门设置在传送室的壁上,第一气密门被打开或关闭,以便控制传送室中的真空度,以及 取代目标; 设置在处理室和/或传送室中的传送装置经由设置在传送室和处理室的相邻壁上的第二气密门在传送室和处理室之间传送目标,以便更换 当传送室处于设定真空度状态时。
    • 3. 发明授权
    • Array substrate and manufacturing method
    • 阵列基板及制造方法
    • US08563980B2
    • 2013-10-22
    • US13542140
    • 2012-07-05
    • Xiang LiuZhenyu XieXu Chen
    • Xiang LiuZhenyu XieXu Chen
    • H01L29/04H01L31/036H01L31/0376H01L31/20
    • H01L33/08H01L27/124
    • Manufacturing an array substrate includes forming data and gate lines which cross and a gate electrode on a substrate. The data line is discontinuously disposed to be separated from the gate line, or the gate line is discontinuously disposed to be separated from the data line. Active and gate insulating layers including bridge and source electrode vias are formed on the substrate. The bridge vias correspond to adjacent discontinuous sections of the data line or the gate line. The source electrode via corresponds to the data line. Pixel, source, and drain electrodes and a bridge line are formed on the substrate. The pixel electrode and the drain electrode are integral. The source electrode is connected to the data line through the source electrode via. The bridge line connects adjacent discontinuous sections of the data line or adjacent discontinuous sections of the gate line through bridge vias.
    • 制造阵列基板包括在基板上形成数据和与栅电极交叉的栅极线。 数据线不连续地设置成与栅极线分离,或者栅极线不连续地设置成与数据线分离。 在衬底上形成包括桥和源电极通孔的有源和栅绝缘层。 桥通孔对应于数据线或栅极线的相邻不连续部分。 源电极通孔对应于数据线。 在基板上形成像素,源极和漏极以及桥接线。 像素电极和漏电极是一体的。 源电极通过源极通孔连接到数据线。 桥接线通过桥接通孔连接数据线的相邻不连续部分或栅极线的相邻不连续部分。
    • 7. 发明申请
    • ARRAY SUBSTRATE AND MANUFACTURING METHOD
    • 阵列基板和制造方法
    • US20110073864A1
    • 2011-03-31
    • US12888171
    • 2010-09-22
    • Xiang LIUZhenyu XIEXu CHEN
    • Xiang LIUZhenyu XIEXu CHEN
    • H01L33/08H01L33/16
    • H01L33/08H01L27/124
    • A method of manufacturing an array substrate comprising: forming a data line and a gate line which are crossed with each other and a gate electrode on a base substrate, and the data line is discontinuously disposed so as to be separated from the gate line or the gate line is discontinuously disposed so as to be separated from the data line; forming an active layer and a gate insulating layer including bridge via holes and a source electrode via hole on the base substrate, and the bridge via holes are located at positions respectively corresponding to adjacent discontinuous sections of the data line or adjacent discontinuous sections of the gate line, and the source electrode via hole is located at a position corresponding to the data line; and forming a pixel electrode, a source electrode, a drain electrode and a bridge line on the base substrate, and the pixel electrode and the drain electrode are formed integrally, and the source electrode is connected to the data line through the source electrode via hole, and the bridge line connects the adjacent discontinuous sections of the data line or the adjacent discontinuous sections of the gate line through the bridge via holes.
    • 一种制造阵列基板的方法,包括:形成彼此交叉的数据线和栅极线以及在基底基板上的栅电极,并且数据线被不连续地设置成与栅极线或 栅极线不连续地设置成与数据线分离; 形成有源层和栅极绝缘层,栅极绝缘层包括基底基板上的桥接通孔和源极电极通孔,桥接通孔分别位于数据线的相邻不连续部分或栅极的相邻不连续部分 源极电极通孔位于与数据线对应的位置; 并且在基底基板上形成像素电极,源电极,漏电极和桥接线,并且像素电极和漏电极一体地形成,源电极通过源电极通孔连接到数据线 并且桥接线通过桥式通孔连接数据线的相邻不连续部分或栅极线的相邻不连续部分。
    • 10. 发明授权
    • Touch screen, color filter substrate and manufacturing methods thereof
    • 触摸屏,滤色器基板及其制造方法
    • US08941596B2
    • 2015-01-27
    • US12782218
    • 2010-05-18
    • Zhenyu XieXu ChenXiang Liu
    • Zhenyu XieXu ChenXiang Liu
    • G06F3/041G06F3/045
    • G06F3/045G06F3/0414
    • A touch screen and a manufacturing method thereof, and a color filter substrate and a manufacturing method thereof are provided in the invention. The touch screen comprises a substrate, a plurality of touch regions defined by a plurality of first signal lines and a plurality of second signal lines are provided on the substrate. In each touch region, the first signal line is connected with a first piezoelectric switch, the second signal line is connected with a second piezoelectric switch, when the touch region is touched by a force the first piezoelectric switch and the second piezoelectric switch are turned on and transfer voltage signals respectively via the first signal line and the second signal line to determine the coordinate of the touched touch region.
    • 本发明提供了触摸屏及其制造方法以及滤色器基板及其制造方法。 触摸屏包括基板,在基板上设置由多条第一信号线和多条第二信号线限定的多个触摸区域。 在每个触摸区域中,第一信号线与第一压电开关连接,第二信号线与第二压电开关连接,当触摸区域被第一压电开关和第二压电开关导通的力接触时 并且分别经由第一信号线和第二信号线传送电压信号,以确定触摸的触摸区域的坐标。