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    • 3. 发明授权
    • Defect inspection method and defect inspection apparatus
    • 缺陷检查方法和缺陷检查装置
    • US06779159B2
    • 2004-08-17
    • US10156464
    • 2002-05-29
    • Hirokazu YokoyamaYutaka Nakashima
    • Hirokazu YokoyamaYutaka Nakashima
    • G06F1750
    • G01N21/9501
    • A defect inspection method and a defect inspection apparatus accurately determine whether potential defects on a surface of a wafer are true defects, and restrains the oversight or the like of defects, permitting reliable quality assurance and accurate quality control to be achieved. The number and positions of detected potential defects are used as the parameters for determining whether potential defects are true defects. The density of potential defects is determined, and the determined density is compared with a set value to decide whether the potential defects are true defects. A surface of a wafer is captured using a differential interference microscope, and the image is processed to count the number of potential defects observed on the surface. The potential defects are detected at the spots where luminance shifts in the captured image. A spatial filter is applied to the captured image to enhance the area where the luminance shifts, and the enhanced area is binarized. This allows even adjoining potential defects to be detected without overlapping. Based on the characteristic amounts of the detected areas, it is decided whether the potential defects are true defects or noises, then the number of the true defects is counted.
    • 缺陷检查方法和缺陷检查装置精确地确定晶片表面的潜在缺陷是否是真实缺陷,并且抑制缺陷的等等,从而可以实现可靠的质量保证和准确的质量控制。 使用检测到的潜在缺陷的数量和位置作为确定潜在缺陷是真实缺陷的参数。 确定潜在缺陷的密度,将确定的密度与设定值进行比较,以确定潜在缺陷是否为真实缺陷。 使用微分干涉显微镜捕获晶片的表面,并且处理图像以计数在表面上观察到的潜在缺陷的数量。 在捕获的图像中的亮度偏移的点处检测到潜在的缺陷。 将空间滤波器应用于拍摄图像以增强亮度移动的区域,并且增强区域被二值化。 这允许在不重叠的情况下检测到相邻的潜在缺陷。 根据检测区域的特征量,确定潜在的缺陷是真实的缺陷还是噪声,然后对真实缺陷的数量进行计数。
    • 4. 发明授权
    • Wet type electrophotography apparatus to evenly apply developing solution on a developing roller
    • 湿式电子照相设备将显影液均匀地涂在显影辊上
    • US06311034B1
    • 2001-10-30
    • US09284737
    • 1999-06-24
    • Yutaka NakashimaAkihiko InamotoShigrki UesugiSatoru MotoMotoharu IchidaMasanari TakabatakeShigeharu OkanoSeiichi Takeda
    • Yutaka NakashimaAkihiko InamotoShigrki UesugiSatoru MotoMotoharu IchidaMasanari TakabatakeShigeharu OkanoSeiichi Takeda
    • G03G1510
    • G03G15/101G03G2215/0174
    • A wet type electrophotography apparatus including a non-volatile, high-viscosity, high-concentration liquid toner as a developing solution. The wet type electrophotography apparatus includes a photoconductive medium on which an electrostatic latent image is formed, a prewetting device for applying a film of a prewetting solution to the surface of the photoconductive medium, a developing device including a developing roller, and a developing solution applying device for applying a film of the developing solution on the developing roller. The developing roller feeds the developing solution to the photoconductive medium by making contact with the photoconductive medium, and causes toner particles in the developing solution to deposit on an image carrier in accordance with an electrical field formed between the developing roller and the photoconductive medium. The developing solution applying device includes a plurality of interconnecting rotating rollers for transporting the developing solution while spreading and applying it on the surface with the rotating rollers, and applies a film of the developing solution on the surface of the final-stage rotating roller in accordance with an electrical field formed between the final-stage rotating roller and the developing roller by a bias voltage fed to the final-stage rotating roller.
    • 包括作为显影液的非挥发性,高粘度,高浓度液体调色剂的湿式电子照相设备。 湿式电子摄影装置包括其上形成有静电潜像的光导介质,用于将前润湿溶液的膜施加到光导介质的表面的预润湿装置,包括显影辊的显影装置和施加 用于将显影液的膜施加到显影辊上的装置。 显影辊通过与光导介质接触而将显影液供给到感光介质,并使显影液中的调色剂颗粒根据形成在显影辊和感光介质之间的电场沉积在图像载体上。 显影液施加装置包括多个相互连接的旋转辊,用于在用旋转辊在其表面上铺展并涂布显影液的同时输送显影液,并且将显影液的膜依次施加在末级旋转辊的表面上 其中通过馈送到末级旋转辊的偏置电压在最终级旋转辊和显影辊之间形成电场。