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    • 2. 发明授权
    • Radiation reduction exposure apparatus and method of manufacturing
semiconductor device
    • 减光曝光装置及半导体装置的制造方法
    • US6014421A
    • 2000-01-11
    • US847404
    • 1997-04-24
    • Yuji ChibaMasami Tsukamoto
    • Yuji ChibaMasami Tsukamoto
    • G03F7/20H01L21/027H01L21/30
    • G03F7/70233G03F7/70283G03F7/703G03F7/70358G03F7/70708G03F7/70725
    • An X-ray reduction exposure apparatus which provides a preferable image forming system in an entire mask surface area of a reflection type mask, can reduce curvature of the field and astigmatism of the transfer image even in scan exposure and, therefore, can obtain high transfer precision, and the apparatus contributes to the manufacture of a semiconductor element having high reliability. The X-ray reduction exposure apparatus has, as a characteristic feature, a drive mechanism for driving a mask scan stage substantially along the curvature surface of the mask. This drive mechanism is constituted by a main drive section (linear motor or the like) linearly driven in a direction corresponding to the moving direction of a mask scan stage and a sub-drive section (actuator or the like) driven perpendicularly to the drive direction, otherwise, constituted by a main drive section and a guide having a shape which is the same as the curvature surface shape of the mask.
    • 在反射型掩模的整个掩模表面区域中提供优选的图像形成系统的X射线减少曝光装置即使在扫描曝光中也可以减小转印图像的曲率和像散,因此可以获得高转印 并且该装置有助于制造具有高可靠性的半导体元件。 作为特征,X射线减少曝光装置具有用于基本上沿着掩模的曲率表面驱动掩模扫描台的驱动机构。 该驱动机构由与驱动方向垂直驱动的荫罩扫描台和副驱动部(致动器等)的移动方向对应的方向直线驱动的主驱动部(直线电机等)构成, 否则由主驱动部分和具有与掩模的曲率表面形状相同的形状的引导件构成。
    • 6. 发明授权
    • Ink ribbon cassette which can be used in line type thermal transfer printer
    • 可用于线型​​热转印打印机的墨带盒
    • US06307582B1
    • 2001-10-23
    • US09692002
    • 2000-10-19
    • Junichi KawatoYuji Chiba
    • Junichi KawatoYuji Chiba
    • B41J3200
    • B41J35/28B41J17/32
    • An ink ribbon cassette includes a cassette main body portion rotatably holding a supply core and a take-up core around which the end portions of an ink ribbon are wound and a ribbon guide portion extending to one side from the cassette main body portion and having on one side a ribbon slide contact surface, a ribbon turn-up portion formed at the forward end of the ribbon guide portion being formed by a rotatable roller member, whereby the frictional resistance of the ink ribbon turned up at the ribbon turn-up portion is reduced. Further, the main body portion includes a holder member having the ribbon guide portion and holding the supply core and the take-up core and a case member capable of holding the holder member by holding the supply core and the take-up core in such a way as to cover them from outside, whereby it is possible to provide an ink ribbon cassette which can be easily assembled.
    • 墨带盒包括:盒主体部分,其可旋转地保持供应芯和卷绕芯,卷绕在其上的墨带的端部围绕着卷带芯;以及从墨盒主体部分延伸到一侧的墨带引导部分, 一侧是色带滑动接触表面,形成在色带引导部分的前端的色带翻转部分由可旋转的辊部件形成,由此在色带卷起部分处翻转的色带的摩擦阻力为 减少 此外,主体部分包括具有带引导部分并且保持供应芯和卷取芯的保持器构件,以及壳体构件,其能够通过将供给芯和卷取芯保持在这样的位置中来保持保持器构件 以便从外部覆盖它们,从而可以提供可以容易地组装的色带盒。