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    • 3. 发明申请
    • NODE AND METHOD FOR TRANSMISSION MODE SWITCHING FOR DOWNLINK TRANSMISSION IN DOWNLINK CHANNEL
    • 用于下行通道中下行链路传输的传输模式切换的节点和方法
    • US20140119223A1
    • 2014-05-01
    • US14128221
    • 2011-07-01
    • Xinghua SongYu QianHai Wang
    • Xinghua SongYu QianHai Wang
    • H04W72/08
    • H04W72/085H04B7/0417H04B7/0617H04B7/0671H04B7/0689H04L1/0015H04W76/27
    • The present invention discloses a node for transmission mode switching for downlink transmission in a downlink channel (100), comprising: a configuring unit (110) adapted to configure an initial transmission mode for the downlink transmission as a default transmission mode; a deriving unit (120) adapted to derive channel quality metric (CQM) of the downlink channel; a first determining unit (130) adapted to determine a first predefined threshold on the basis of link level simulation of a first transmission mode and a second transmission mode; and a first switching unit (140) adapted to switch the transmission mode from the initial transmission mode to the first transmission mode or the second transmission mode on the basis of the CQM and the first predefined threshold. The present invention provides a simple, direct and efficient approach for transmission mode switching for downlink transmission in a downlink channel on the basis of available feedback from UE (or other kinds of terminals if appropriate) and/or link adaptation decisions from eNB (or other kinds of base stations if appropriate), provides high peak rate while maintaining cell coverage, and provides a proprietary solution without any impact on protocol/standard or UE implementation.
    • 本发明公开了一种用于下行链路信道(100)中下行链路传输的传输模式切换的节点,包括:配置单元(110),用于将下行链路传输的初始传输模式配置为默认传输模式; 导出单元(120),适于导出所述下行链路信道的信道质量度量(CQM); 第一确定单元,适于基于第一传输模式和第二传输模式的链路级仿真来确定第一预定义阈值; 以及适于基于所述CQM和所述第一预定义阈值将所述传输模式从所述初始传输模式切换到所述第一传输模式或所述第二传输模式的第一切换单元。 本发明基于来自UE(或适当的其他类型的终端)的可用反馈和/或来自eNB(或其他的)的链路适配决定,提供了用于下行链路信道中的下行链路传输的传输模式切换的简单,直接和有效的方法 各种基站,如果适用),提供高峰值速率同时保持小区覆盖,并提供专有解决方案,而不会对协议/标准或UE实现任何影响。
    • 7. 发明授权
    • Automatic frequency tuning of an RF power source of an inductively
coupled plasma reactor
    • 电感耦合等离子体反应器的RF电源的自动频率调谐
    • US5919382A
    • 1999-07-06
    • US720588
    • 1996-09-30
    • Xue-Yu QianArthur Sato
    • Xue-Yu QianArthur Sato
    • H05H1/46C23C16/50C23F4/00H01J37/32H01L21/205H01L21/302H01L21/3065H01L21/31B23K10/00
    • H01J37/321H01J37/32082
    • The invention is embodied in a coil antenna for radiating RF power supplied by an RF source into a vacuum chamber of an inductively coupled plasma reactor which processes a semiconductor wafer in the vacuum chamber, the reactor having a gas supply inlet for supplying processing gases into the vacuum chamber, the coil antenna including plural concentric spiral conductive windings, each of the windings having an interior end near an apex of a spiral of the winding and an outer end at a periphery of the spiral of the winding, and a common terminal connected to the interior ends of the plural concentric spiral windings, the RF power source being connected across the terminal and the outer end of each one of the windings. In embodiment, the inner ends of the concentric spiral windings are connected radially outwardly of a common conductor rather than inwardly to an apex terminal. In another embodiment, the concentric spiral windings are each powered at a point intermediate the radially inner and outer ends. In yet another embodiment, there are plural radially separate groups of concentric spiral windings, each connected to a separately controlled RF power source to enable adjustment of radial distribution of the plasma ion density. In a further embodiment, the spiral concentric windings are not conformal with the shape of the chamber ceiling, and can extend above the ceiling.
    • 本发明体现在用于将由RF源提供的RF功率辐射到电感耦合等离子体反应器的真空室中的线圈天线,所述电感耦合等离子体反应器处理真空室中的半导体晶片,所述反应器具有用于将处理气体供应到 真空室,线圈天线包括多个同心的螺旋导电绕组,每个绕组具有靠近绕组螺旋的顶点的内端和绕组的螺旋周边的外端,以及连接到 多个同心螺旋绕组的内端,RF电源跨越端子和每个绕组的外端连接。 在实施例中,同心螺旋绕组的内端部连接到公共导体的径向外侧而不是向内连接到顶点端子。 在另一个实施例中,同心螺旋绕组各自在径向内端和外端之间的点处供电。 在另一个实施例中,存在多个径向分开的同心螺旋绕组组,每组连接到单独控制的RF功率源,以能够调整等离子体离子密度的径向分布。 在另一个实施例中,螺旋同心绕组不与室顶的形状保持一致,并且可以在天花板上方延伸。