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    • 8. 发明授权
    • Method and apparatus for manufacturing multilayered wiring board and multi-layered wiring board
    • 制造多层布线板和多层布线板的方法和装置
    • US06237218B1
    • 2001-05-29
    • US09355438
    • 1999-07-28
    • Akira OgawaYoshitaka Fukuoka
    • Akira OgawaYoshitaka Fukuoka
    • H05K336
    • H05K3/4638H05K3/0008H05K3/4614H05K2203/166Y10T29/49126Y10T29/49155Y10T29/53178Y10T29/53183Y10T428/24917
    • A method for manufacturing multi-layered wiring board in which the positions of alignment marks are detected by irradiating a base material with X rays, and the position of the base material is corrected in accordance with the detected positions of the alignment marks. Then, the aligned base material is successively laminated upon another so as to improve the lamination accuracy. In the method, in addition, such a constitution is adopted that, when the laminating process is repeated twice or more, the position of each base material is corrected by offsetting the base material from the laminating position and the base material is laminated upon another base material at the laminating position by backing the base material to the laminating position. Namely, the positional displacement between the base materials to be laminated upon another is corrected by deciding the position of each base material against the preset optical axis of X rays. When such a constitution is adopted, a plurality of base materials can be laminated upon another with accuracy.
    • 一种制造多层布线板的方法,其中通过用X射线照射基材来检测对准标记的位置,并且根据检测到的对准标记的位置校正基材的位置。 然后,对准的基材依次层压在另一个上,以提高层压精度。 在该方法中,另外,采用这样的结构,当层叠处理重复两次以上时,通过将基材从层叠位置偏移来校正各基材的位置,并且将基材层压在另一基材上 通过将基材背衬到层压位置在层压位置处的材料。 也就是说,通过根据X射线的预设光轴确定每个基底材料的位置来校正待叠层的基材之间的位置偏移。 当采用这种结构时,可以精确地将多个基材层压在另一个上。