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1. 发明申请

US20130078483A1 USE OF MAGNETIC MATERIAL FOR RIE STOP LAYER DURING DAMASCENE MAIN POLE FORMATION 有权
标题翻译：磁性材料在大面积主要形成过程中的停止层的使用
公开(公告)号：US20130078483A1
公开(公告)日：2013-03-28
申请号：US13247883
申请日：2011-09-28
申请人： Yingjian CHEN , Shiwen HUANG , Edward Hin Pong LEE , Mun Hyoun PARK , Kyusik SHIN , Yuming ZHOU
发明人： Yingjian CHEN , Shiwen HUANG , Edward Hin Pong LEE , Mun Hyoun PARK , Kyusik SHIN , Yuming ZHOU
IPC分类号： G11B5/33 , C23F1/02
CPC分类号： G11B5/3116 , G11B5/315 , Y10T428/11 , Y10T428/1171
摘要： A write head for use in a magnetic disk drive and methods of manufacturing the same. When a non-magnetic reactive ion etching (RIE) stop layer is used in a damascene main pole fabrication process, the leading edge shield and the side shield have a magnetic separation. By replacing a non-magnetic RIE stop layer with a magnetic RIE stop layer, no removal of the RIE stop layer around the main pole is necessary. Additionally, the leading edge shield and the side shield will magnetically join together without extra processing as there will be no magnetic separation between the leading edge shield and the side shield.
摘要翻译：用于磁盘驱动器的写入头及其制造方法。当在非镶嵌主极制造工艺中使用非磁性反应离子蚀刻（RIE）停止层时，前缘屏蔽和侧面屏蔽层具有磁分离。通过用磁RIE停止层代替非磁性RIE停止层，不需要在主极周围去除RIE停止层。此外，前缘屏蔽和侧屏蔽将磁性地结合在一起而不需要额外的处理，因为前缘屏蔽和侧屏蔽之间将不会有磁性分离。

2. 发明申请

US20120125885A1 PERPENDICULAR WRITE HEAD WITH WRAP AROUND SHIELD AND CONFORMAL SIDE GAP 有权
标题翻译：平头写字头与封面和合适的边缝
公开(公告)号：US20120125885A1
公开(公告)日：2012-05-24
申请号：US12954458
申请日：2010-11-24
申请人： YINGJIAN CHEN , Shiwen Huang , Fenglin Liu , Kyusik Shin
发明人： YINGJIAN CHEN , Shiwen Huang , Fenglin Liu , Kyusik Shin
IPC分类号： G11B21/00
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/23 , G11B5/315 , G11B5/3163
摘要： A perpendicular write head having a wrap around shield and a conformal side gap. In fabricating the write head, the leading edge shield may be chemical mechanical polished down to a level that is substantially even with a chemical mechanical polishing stop layer. Because the leading edge shield and the chemical mechanical polishing stop layer are used as RIE stop for trench RIE, a fully conformal side shield may be formed with a LTE/LES.
摘要翻译：垂直写头，其具有围绕屏蔽的保护层和保形侧间隙。在制造写入头时，前缘屏蔽可以化学机械抛光到基本上均匀的化学机械抛光停止层的水平。由于前缘屏蔽和化学机械抛光停止层用作沟槽RIE的RIE停止，所以可以用LTE / LES形成完全共形的侧屏蔽。

3. 发明授权

US08146236B1 Method for providing a perpendicular magnetic recording (PMR) transducer 有权
标题翻译：提供垂直磁记录（PMR）传感器的方法
公开(公告)号：US08146236B1
公开(公告)日：2012-04-03
申请号：US12057692
申请日：2008-03-28
申请人： Guanghong Luo , Liubo Hong , Honglin Zhu , Yun-Fei Li , Yingjian Chen
发明人： Guanghong Luo , Liubo Hong , Honglin Zhu , Yun-Fei Li , Yingjian Chen
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163 , Y10T29/49039 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method and system for providing a perpendicular magnetic recording (PMR) transducer from pole layer(s) are disclosed. First and second planarization stop layers are provided on the pole layer(s). A mask is provided on the second planarization stop layer. A first portion of the mask resides on a portion of the pole layer(s) used to form the PMR pole. The PMR pole is defined after the mask is provided. An intermediate layer surrounding at least the PMR pole is provided. A first planarization is performed on at least the intermediate layer. A portion of the second planarization stop layer is removed during the first planarization. A remaining portion of the second planarization stop layer is removed. A second planarization is performed. A portion of the first planarization stop layer remains after the second planarization. A write gap and shield are provided on the PMR pole and write gap, respectively.
摘要翻译：公开了一种用于从极层提供垂直磁记录（PMR）换能器的方法和系统。第一和第二平坦化停止层设置在极层上。在第二平坦化停止层上设置掩模。掩模的第一部分位于用于形成PMR极的极层的一部分上。在提供面罩之后定义PMR极。提供至少围绕PMR极的中间层。至少在中间层上执行第一平面化。在第一平坦化期间，去除第二平坦化停止层的一部分。去除第二平坦化停止层的剩余部分。执行第二平面化。在第二平面化之后，第一平坦化停止层的一部分保留。分别在PMR极和写间隙上提供写间隙和屏蔽。

4. 发明申请

US20110151279A1 MAGNETIC WRITE HEAD MANUFACTURED BY AN ENHANCED DAMASCENE PROCESS PRODUCING A TAPERED WRITE POLE WITH A NON-MAGNETIC SPACER AND NON-MAGNETIC BUMP 有权
标题翻译：通过增强的大面积工艺制造的磁性写头，用非磁性间隔器和非磁性块形成带状写入点
公开(公告)号：US20110151279A1
公开(公告)日：2011-06-23
申请号：US12641251
申请日：2009-12-17
申请人： Donald G. Allen , Amanda Baer , Yingjian Chen , Andrew Chiu , Liubo Hong , Wen-Chien D. Hsiao , Edward H.P. Lee , Fenglin Liu , Aron Pentek , Katalin Pentek , Kyusik Shin , Yi Zheng , Qiping Zhong , Honglin Zhu
发明人： Donald G. Allen , Amanda Baer , Yingjian Chen , Andrew Chiu , Liubo Hong , Wen-Chien D. Hsiao , Edward H.P. Lee , Fenglin Liu , Aron Pentek , Katalin Pentek , Kyusik Shin , Yi Zheng , Qiping Zhong , Honglin Zhu
IPC分类号： G11B5/33
CPC分类号： G11B5/3163 , G11B5/112 , G11B5/1278 , G11B5/3116 , G11B5/314 , G11B5/3143 , G11B5/3146 , G11B5/315 , Y10T428/11 , Y10T428/1171
摘要： A magnetic write head having a tapered trailing edge and having a magnetic layer formed over a trailing edge of the write pole at a location recessed from the ABS, the magnetic layer being separated from the trailing edge of the write pole by a thin non-magnetic layer. The thin non-magnetic layer is preferably sufficiently thin that the magnetic layer can function as a portion of the write pole in a region removed from the ABS. A trailing magnetic shield is formed over the write pole and is separated from the write pole by a non-magnetic trailing gap layer. A non-magnetic spacer layer can be formed over the magnetic layer to provide additional separation between the magnetic layer and the trailing magnetic shield.
摘要翻译：一种具有锥形后缘并具有磁性层的磁性写头，该磁性层形成在从ABS的凹陷处的写入极的后缘上，该磁性层通过薄的非磁性的方式与写入极的后缘分离层。薄的非磁性层优选地足够薄，使得磁性层可以在从ABS去除的区域中用作写入极的一部分。尾磁屏蔽形成在写极上，并且通过非磁性拖尾间隙层与写极分离。可以在磁性层之上形成非磁性间隔层，以在磁性层和尾部磁屏蔽之间提供额外的间隔。

5. 发明申请

US20110134567A1 PERPENDICULAR MAGNETIC WRITE HEAD WITH WRAP-AROUND SHIELD, SLANTED POLE AND SLANTED POLE BUMP FABRICATED BY DAMASCENE PROCESS 有权
标题翻译：具有缠绕垫片的扁平磁头写头，由达玛斯工艺制成的狭缝和斜面垫
公开(公告)号：US20110134567A1
公开(公告)日：2011-06-09
申请号：US12634456
申请日：2009-12-09
申请人： Yingjian Chen , Liubo Hong , Yimin Hsu , Edward Hin Pong Lee , Katalin Pentek
发明人： Yingjian Chen , Liubo Hong , Yimin Hsu , Edward Hin Pong Lee , Katalin Pentek
IPC分类号： G11B5/10
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3116 , G11B5/3146 , G11B5/315
摘要： A magnetic write head having a write pole with a tapered trailing edge. The write head has a non-magnetic step layer and a non-magnetic bump formed on the front edge of the magnetic step layer. A non-magnetic trailing gap layer is formed over the tapered trailing edge of the write pole and over the non-magnetic bump and over the non-magnetic step layer. A magnetic trailing shield is formed over at least a portion of the non-magnetic gap layer.
摘要翻译：一种具有具有锥形后缘的写极的磁写头。写头具有形成在磁性阶梯层的前边缘上的非磁性阶梯层和非磁性凸块。非磁性拖尾间隙层形成在写磁极的锥形后缘和非磁性凸块之上以及非磁性阶梯层之上。在非磁隙层的至少一部分上形成有磁性后屏蔽。

6. 发明授权

US07419891B1 Method and system for providing a smaller critical dimension magnetic element utilizing a single layer mask 失效
标题翻译：用于使用单层掩模提供较小临界尺寸的磁性元件的方法和系统
公开(公告)号：US07419891B1
公开(公告)日：2008-09-02
申请号：US11352652
申请日：2006-02-13
申请人： Benjamin Chen , Hongping Yuan , Danning Yang , Wei Zhang , Hugh C. Hiner , Lei Wang , Yingjian Chen , Brant Nease
发明人： Benjamin Chen , Hongping Yuan , Danning Yang , Wei Zhang , Hugh C. Hiner , Lei Wang , Yingjian Chen , Brant Nease
IPC分类号： H01L21/20
CPC分类号： H01L43/12 , B82Y10/00 , B82Y25/00 , G11B5/3906 , G11B5/3909
摘要： The method and system for providing a magnetic element are disclosed. The method and system include providing a magnetic element stack that includes a plurality of layers and depositing a stop layer on the magnetic element stack. The method and system also include providing a dielectric antireflective coating (DARC) layer on the stop layer, forming a single layer mask for defining the magnetic element on a portion of the DARC layer, and removing a remaining portion of the DARC layer not covered by the single layer mask. The portion of the DARC layer covers a portion of the stop layer. The method further includes removing a remaining portion of the stop layer and defining the magnetic element using at least the portion of stop layer as a mask.
摘要翻译：公开了用于提供磁性元件的方法和系统。该方法和系统包括提供包括多个层的磁性元件堆叠并在磁性元件堆叠上沉积停止层。该方法和系统还包括在停止层上提供介电抗反射涂层（DARC）层，形成用于在DARC层的一部分上限定磁性元件的单层掩模，以及去除DARC层未覆盖的DARC层的剩余部分单层面膜。 DARC层的一部分覆盖停止层的一部分。该方法还包括使用停止层的至少一部分作为掩模去除停止层的剩余部分并限定磁性元件。

7. 发明授权

US07342752B1 Magnetoresistive read head having a bias structure with at least one dusting layer 有权
标题翻译：具有至少一个除尘层的偏置结构的磁阻读取头
公开(公告)号：US07342752B1
公开(公告)日：2008-03-11
申请号：US10769239
申请日：2004-01-31
申请人： Wei Zhang , Yingjian Chen , Satoru Araki , Mohamad T Krounbi
发明人： Wei Zhang , Yingjian Chen , Satoru Araki , Mohamad T Krounbi
IPC分类号： G11B5/39
CPC分类号： G11B5/3909 , B82Y10/00 , B82Y25/00 , G11B5/3163 , G11B5/3932 , G11B2005/3996
摘要： A magnetoresistive read head includes a magnetoresistive sensor and a bias structure adjacent to the magnetoresistive sensor. The bias structure provides a magnetostatic bias field for the magnetoresistive sensor. The bias structure includes an underlayer, a bias layer over the underlayer, and at least one dusting layer directly below at least one of the underlayer or the bias layer.
摘要翻译：磁阻读取头包括磁阻传感器和与磁阻传感器相邻的偏置结构。偏置结构为磁阻传感器提供静磁偏置场。偏置结构包括底层，底层上的偏置层，以及直接位于底层或偏置层中的至少一个的至少一个除尘层。

8. 发明授权

US07289303B1 Spin valve sensors having synthetic antiferromagnet for longitudinal bias 失效
标题翻译：旋转阀传感器具有用于纵向偏置的合成反铁磁体
公开(公告)号：US07289303B1
公开(公告)日：2007-10-30
申请号：US09828635
申请日：2001-04-05
申请人： Kyusik Sin , Ningjia Zhu , Yingjian Chen
发明人： Kyusik Sin , Ningjia Zhu , Yingjian Chen
IPC分类号： G11B5/39
CPC分类号： G11B5/3932 , B82Y25/00 , G01R33/093 , H01F10/3272 , Y10T428/1107 , Y10T428/1121 , Y10T428/1143
摘要： Magnetoresistive (MR) sensors are disclosed having mechanisms for reducing edge effects such as Barkhausen noise. The sensors include a pinned layer and a free layer with an exchange coupling layer adjoining the free layer, and a ferromagnetic layer having a fixed magnetic moment adjoining the exchange coupling layer. The exchange coupling layer and ferromagnetic layer form a synthetic antiferromagnetic structure with part of the free layer, providing bias that reduces magnetic instabilities at edges of the free layer. Such synthetic antiferromagnetic structures can provide a stronger bias than conventional antiferromagnetic layers, as well as a more exactly defined track width than conventional hard magnetic bias layers. The synthetic antiferromagnetic structures can also provide protection for the free layer during processing, in contrast with the trimming of conventional antiferromagnetic layers that exposes if not removes part of the free layer.
摘要翻译：公开了具有减小诸如巴克豪森噪声等边缘效应的机构的磁阻（MR）传感器。传感器包括钉扎层和具有邻接自由层的交换耦合层的自由层，以及具有与交换耦合层邻接的固定磁矩的铁磁层。交换耦合层和铁磁层形成具有部分自由层的合成反铁磁结构，提供降低自由层边缘的磁性不稳定性的偏压。这种合成反铁磁结构可以提供比常规反铁磁层更强的偏压，以及比常规硬磁偏置层更精确地定义的轨道宽度。合成反铁磁性结构也可以在加工过程中为自由层提供保护，与如果不除去部分自由层的常规反铁磁层的修整相反。

9. 发明授权

US07286329B1 GMR sensor with shallow contiguous junction and bias layers aligned with free sensor layers 失效
标题翻译： GMR传感器具有与自由传感器层对准的浅连续结和偏置层
公开(公告)号：US07286329B1
公开(公告)日：2007-10-23
申请号：US10788656
申请日：2004-02-27
申请人： Yingjian Chen , Wei Zhang , Mohamad T. Krounbi , Satoru Araki , Jinqiu Zhang
发明人： Yingjian Chen , Wei Zhang , Mohamad T. Krounbi , Satoru Araki , Jinqiu Zhang
IPC分类号： G11B5/39
CPC分类号： G01R31/318357 , G11B5/3932
摘要： A magnetic sensor is disclosed having a shallow contiguous junction. Such a sensor is can greatly increase yield for mass-produced heads, especially for large wafers. The magnetic bias layers can be aligned with a free layer of the sensor, improving performance. Milling may be terminated prior to penetration of an antiferromagnetic layer, so that for example the antiferromagnetic layer may extend significantly beyond the free and pinned layers of the sensor.
摘要翻译：公开了一种具有浅连续结的磁传感器。这种传感器可以大大提高批量生产头部的产量，特别是对于大型晶片。磁偏置层可以与传感器的自由层对准，从而提高性能。铣削可以在穿透反铁磁层之前终止，使得例如反铁磁层可以显着地延伸超过传感器的自由和固定层。

10. 发明授权

US07007372B1 Method for making high speed, high areal density inductive write structure 失效
标题翻译：制造高速，高密度感应写入结构的方法
公开(公告)号：US07007372B1
公开(公告)日：2006-03-07
申请号：US10656311
申请日：2003-09-05
申请人： Yingjian Chen , Hua-Ching Tong , Lei Wang , Xizeng Shi
发明人： Yingjian Chen , Hua-Ching Tong , Lei Wang , Xizeng Shi
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/3146 , G11B5/3109 , G11B5/3113 , G11B5/3116 , G11B5/313 , G11B5/3153 , G11B5/3967 , Y10T29/49032 , Y10T29/49039 , Y10T29/49043 , Y10T29/49048 , Y10T29/49052 , Y10T29/49071 , Y10T29/49073
摘要： An inductive write element is disclosed for use in a magnetic data recording system. The write element provides increased data rate and data density capabilities through improved magnetic flux flow through the element. The write element includes a magnetic yoke constructed of first and second magnetic poles. The first pole includes a pedestal constructed of a high magnetic moment (high Bsat) material, which is preferably FeRhN nanocrystalline films with lamination layers of CoZrCr. The second pole includes a thin inner layer of high Bsat material (also preferably FeRhN nanocrystalline films with lamination layers of CoZrCr), the remainder being constructed of a magnetic material capable of being electroplated, such as a Ni—Fe alloy. An electrically conductive coil passes through the yoke between the first and second poles to induce a magnetic flux in the yoke when an electrical current is caused to flow through the coil. Magnetic flux in the yoke produces a fringing field at a write gap whereby a signal can be imparted onto a magnetic medium passing thereby.
摘要翻译：公开了用于磁数据记录系统的感应写入元件。写元件通过改善通过元件的磁通量提供增加的数据速率和数据密度能力。写元件包括由第一和第二磁极构成的磁轭。第一极包括由高磁矩（高B sat sat）材料构成的基座，其优选为具有CoZrCr层压层的FeRhN纳米晶体膜。第二极包括一高层高层材料的薄层（也优选具有CoZrCr叠层的FeRhN纳米晶膜），其余部分由能够电镀的磁性材料构成，例如Ni -Fe合金。导电线圈通过第一和第二极之间的磁轭，当电流流过线圈时，引起磁轭中的磁通量。轭中的磁通在写入间隙产生边缘场，由此可以将信号传递到通过的磁介质上。

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