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1. 发明申请

US20120111826A1 DAMASCENE PROCESS USING PVD SPUTTER CARBON FILM AS CMP STOP LAYER FOR FORMING A MAGNETIC RECORDING HEAD 有权
标题翻译：使用PVD溅射碳膜作为CMP停止层形成磁记录头的吸塑工艺
公开(公告)号：US20120111826A1
公开(公告)日：2012-05-10
申请号：US12943835
申请日：2010-11-10
申请人： YANFENG CHEN , Yunjun Tang , Yana Qian , Ming M. Yang , Yunfei Li , Paul E. Anderson
发明人： YANFENG CHEN , Yunjun Tang , Yana Qian , Ming M. Yang , Yunfei Li , Paul E. Anderson
IPC分类号： G11B5/127
CPC分类号： G11B5/3116 , G11B5/3163
摘要： Damascene processes using physical vapor deposition (PVD) sputter carbon film as a chemical mechanical planarization (CMP) stop layer for forming a magnetic recording head are provided. In one embodiment, one such process includes providing an insulator, removing a portion of the insulator to form a trench within the insulator, depositing a carbon material on first portions of the insulator using a physical vapor deposition process, disposing at least one ferromagnetic material on second portions of the insulator to form a pole including a portion of the ferromagnetic material within the trench, and performing a chemical mechanical planarization on the at least one ferromagnetic material using at least a portion of the carbon material as a stop for the chemical mechanical planarization.
摘要翻译：提供使用物理气相沉积（PVD）溅射碳膜作为用于形成磁记录头的化学机械平面化（CMP）停止层的镶嵌工艺。在一个实施例中，一种这样的方法包括提供绝缘体，去除绝缘体的一部分以在绝缘体内形成沟槽，使用物理气相沉积工艺在绝缘体的第一部分上沉积碳材料，将至少一种铁磁材料放置在所述绝缘体的第二部分形成包括所述沟槽内的所述铁磁材料的一部分的极，以及使用所述碳材料的至少一部分作为所述化学机械平面化的停止层，对所述至少一种铁磁材料进行化学机械平坦化。

2. 发明授权

US09018100B2 Damascene process using PVD sputter carbon film as CMP stop layer for forming a magnetic recording head 有权
标题翻译：使用PVD溅射碳膜作为形成磁记录头的CMP停止层的镶嵌工艺
公开(公告)号：US09018100B2
公开(公告)日：2015-04-28
申请号：US12943835
申请日：2010-11-10
申请人： Yanfeng Chen , Yunjun Tang , Yana Qian , Ming M. Yang , Yunfei Li , Paul E. Anderson
发明人： Yanfeng Chen , Yunjun Tang , Yana Qian , Ming M. Yang , Yunfei Li , Paul E. Anderson
IPC分类号： H01L21/302 , H01L21/461 , H01L21/311 , B44C1/22 , B23P15/00 , C03C25/00 , G11B5/31
CPC分类号： G11B5/3116 , G11B5/3163
摘要： Damascene processes using physical vapor deposition (PVD) sputter carbon film as a chemical mechanical planarization (CMP) stop layer for forming a magnetic recording head are provided. In one embodiment, one such process includes providing an insulator, removing a portion of the insulator to form a trench within the insulator, depositing a carbon material on first portions of the insulator using a physical vapor deposition process, disposing at least one ferromagnetic material on second portions of the insulator to form a pole including a portion of the ferromagnetic material within the trench, and performing a chemical mechanical planarization on the at least one ferromagnetic material using at least a portion of the carbon material as a stop for the chemical mechanical planarization.
摘要翻译：提供使用物理气相沉积（PVD）溅射碳膜作为用于形成磁记录头的化学机械平面化（CMP）停止层的镶嵌工艺。在一个实施例中，一种这样的方法包括提供绝缘体，去除绝缘体的一部分以在绝缘体内形成沟槽，使用物理气相沉积工艺在绝缘体的第一部分上沉积碳材料，将至少一种铁磁材料放置在所述绝缘体的第二部分形成包括所述沟槽内的所述铁磁材料的一部分的极，以及使用所述碳材料的至少一部分作为所述化学机械平面化的停止层，对所述至少一种铁磁材料进行化学机械平坦化。

3. 发明授权

US08137736B2 Fabrication method for hollow microneedles for drug delivery 有权
标题翻译：用于药物输送的中空微针的制造方法
公开(公告)号：US08137736B2
公开(公告)日：2012-03-20
申请号：US12348589
申请日：2009-01-05
申请人： Mingwei Zhu , Yanfeng Chen , Zhenlin Wang , Yanqing Lu , Haixiong Ge , Yuefeng Tang
发明人： Mingwei Zhu , Yanfeng Chen , Zhenlin Wang , Yanqing Lu , Haixiong Ge , Yuefeng Tang
IPC分类号： B05D3/12
CPC分类号： B81C1/00476 , A61M37/0015 , A61M2037/003 , A61M2037/0053 , B81B2201/055 , B81B2203/0338 , B81B2203/0361 , B81C2201/0108
摘要： A novel method suitable for commercially mass production of hollow microneedle with high quality for delivery of drugs across or into biological tissue is provided. It typically includes the following processes: (1) coating an elongated template of a first material with a second material to form a cover; (2) removing tips of the template and cover to form an opening in the cover; and (3) removing the template of the first material to obtain hollow microneedles of the second material. This simple, efficient and cost-effective fabrication method can mass produce hollow microneedle arrays involving no complicated and expensive equipments or techniques, which can be used in commercial fabrication of hollow needles for delivering drugs or genes across or into skin or other tissue barriers with advantages of minimal damage, painless, long-term and continuous usages.
摘要翻译：提供了一种适用于商业上大规模生产用于将药物跨越或进入生物组织的高品质的中空微针的新方法。它通常包括以下过程：（1）用第二材料涂覆第一材料的细长模板以形成盖子; （2）去除模板和盖子的尖端以在盖子上形成开口; 和（3）去除第一材料的模板以获得第二材料的中空微针。这种简单，高效和成本有效的制造方法可以大规模生产中空微针阵列，其不涉及复杂而昂贵的设备或技术，其可用于商业制造用于将药物或基因跨越或进入皮肤或其它组织屏障的中空针最小的伤害，无痛，长期和持续的使用。

4. 发明授权

US08871048B2 Flexible nanoimprint mold, method for fabricating the same, and mold usage on planar and curved substrate 有权
标题翻译：柔性纳米压印模具，其制造方法和模具在平面和弯曲基板上的使用
公开(公告)号：US08871048B2
公开(公告)日：2014-10-28
申请号：US12393672
申请日：2009-02-26
申请人： Yanfeng Chen , Haixiong Ge , Zhiwei Li , Changsheng Yuan , Minghui Lu
发明人： Yanfeng Chen , Haixiong Ge , Zhiwei Li , Changsheng Yuan , Minghui Lu
IPC分类号： B29C59/18 , G03F7/00 , B29C33/40 , B82Y10/00 , B82Y40/00
CPC分类号： B29C33/405 , B05D1/005 , B29C33/40 , B29C59/022 , B29K2083/00 , B29K2883/00 , B82Y10/00 , B82Y40/00 , G03F1/76 , G03F7/0002 , G03F7/20 , Y10T156/1023
摘要： The present invention provides a flexible nanoimprint mold which can fabricate sub-15 nm ultra fine structures on either planar or curved substrates. The mold comprises a top ultra-thin rigid layer of imprint patterning features and a bottom thick flexible layer of polymer elastomer. The two distinct layers are preferably integrated via chemically bonding. The top layer of the mold enables a sub-15 nm resolution of pattern fabrication and the bottom layer affords a conformal contact to planar or curved surface of substrates. The methods for fabricating the same are disclosed.
摘要翻译：本发明提供了一种灵活的纳米压印模具，其可以在平面或弯曲的基底上制造15nm以下的超细结构。模具包括压印图案特征的顶部超薄刚性层和聚合物弹性体的底部厚柔性层。两个不同的层优选通过化学键合来整合。模具的顶层能够实现15nm的图案制造分辨率，并且底层提供与基板的平面或弯曲表面的共形接触。公开了其制造方法。

5. 发明授权

US07880139B2 Method and apparatus of uniform gas-phase molecular matrix deposition for imaging mass spectrometry 有权
标题翻译：用于成像质谱的均匀气相分子基质沉积的方法和装置
公开(公告)号：US07880139B2
公开(公告)日：2011-02-01
申请号：US12154912
申请日：2008-05-28
申请人： Yanfeng Chen , M. Cameron Sullards , Thomas M. Orlando , Joseph A. Hankin , Robert C. Murphy , Robert M. Barkley
发明人： Yanfeng Chen , M. Cameron Sullards , Thomas M. Orlando , Joseph A. Hankin , Robert C. Murphy , Robert M. Barkley
IPC分类号： H01J49/04
CPC分类号： H01J49/0004 , G01N1/2813 , H01J49/0418
摘要： Disclosed are apparatus and methods for depositing solvent-free molecules on surfaces of samples, with particular application to imaging mass spectrometry. A vacuum chamber is configured to have controllable matrix translation apparatus for controlling the position of one or more solvent-free matrices within the chamber. Sublimation apparatus is used to sublimate molecules from the solid phase matrices. One or more samples are placed separately from the solvent-free matrices within the chamber. Condensation apparatus individually cools the samples to deposit sublimated molecules on the samples. Controllable sample translation apparatus is used to control the position of the samples within the chamber. Rotatable sample holding apparatus may be used to hold and move the samples to allow deposition of molecules on multiple samples at substantially the same time. Rotatable matrix holding apparatus may also be used to hold and move a plurality of matrices to create a homogenous mixture of molecules that are deposited onto one or more samples. As surface characterization system may be used to monitor deposition of the molecules to determine their thickness and roughness. A computer may be configured to control the matrix translation apparatus, the sublimation apparatus, the condensation apparatus, and the sample translation apparatus to provide for automated deposition of solvent-free molecules on the samples.
摘要翻译：公开了用于在样品表面上沉积无溶剂分子的装置和方法，特别适用于成像质谱法。真空室被配置为具有用于控制腔室内的一种或多种无溶剂基质的位置的可控矩阵平移装置。升华装置用于升华固相基质中的分子。将一个或多个样品与腔室内的无溶剂基质分开放置。冷凝装置分别冷却样品以将升华的分子沉积在样品上。可控样品转换装置用于控制室内样品的位置。可旋转的样品保持装置可用于保持和移动样品，以允许分子在基本上同时沉积在多个样品上。可旋转矩阵保持装置还可以用于保持和移动多个矩阵以产生沉积在一个或多个样本上的分子的均匀混合物。由于表面表征系统可用于监测分子的沉积以确定其厚度和粗糙度。计算机可以被配置为控制矩阵翻译装置，升华装置，冷凝装置和样品翻译装置，以提供样品上无溶剂分子的自动沉积。

6. 发明申请

US20100109203A1 FLEXIBLE NANOIMPRINT MOLD, METHOD FOR FABRICATING THE SAME, AND MOLD USAGE ON PLANAR AND CURVED SUBSTRATE 有权
标题翻译：柔性纳米薄膜模具，其制造方法和在平面和弯曲基板上的模具使用
公开(公告)号：US20100109203A1
公开(公告)日：2010-05-06
申请号：US12393672
申请日：2009-02-26
申请人： Yanfeng Chen , Haixiong Ge , Zhiwei Li , Changsheng Yuan , Minghui Lu
发明人： Yanfeng Chen , Haixiong Ge , Zhiwei Li , Changsheng Yuan , Minghui Lu
IPC分类号： B29C59/16 , B29C33/38
CPC分类号： B29C33/405 , B05D1/005 , B29C33/40 , B29C59/022 , B29K2083/00 , B29K2883/00 , B82Y10/00 , B82Y40/00 , G03F1/76 , G03F7/0002 , G03F7/20 , Y10T156/1023
摘要： The present invention provides a flexible nanoimprint mold which can fabricate sub-15 nm ultra fine structures on either planar or curved substrates. The mold comprises a top ultra-thin rigid layer of imprint patterning features and a bottom thick flexible layer of polymer elastomer. The two distinct layers are preferably integrated via chemically bonding. The top layer of the mold enables a sub-15 nm resolution of pattern fabrication and the bottom layer affords a conformal contact to planar or curved surface of substrates. The methods for fabricating the same are disclosed.
摘要翻译：本发明提供了一种灵活的纳米压印模具，其可以在平面或弯曲的基底上制造15nm以下的超细结构。模具包括压印图案特征的顶部超薄刚性层和聚合物弹性体的底部厚柔性层。两个不同的层优选通过化学键合来整合。模具的顶层能够实现15nm的图案制造分辨率，并且底层提供与基板的平面或弯曲表面的共形接触。公开了其制造方法。

7. 发明申请

US20100090099A1 Method and apparatus of uniform gas-phase molecular matrix deposition for imaging mass spectrometry 有权
标题翻译：用于成像质谱的均匀气相分子基质沉积的方法和装置
公开(公告)号：US20100090099A1
公开(公告)日：2010-04-15
申请号：US12154912
申请日：2008-05-28
申请人： Yanfeng Chen , M. Cameron Sullards , Thomas M. Orlando , Joseph A. Hankin , Robert C. Murphy , Robert M. Barkley
发明人： Yanfeng Chen , M. Cameron Sullards , Thomas M. Orlando , Joseph A. Hankin , Robert C. Murphy , Robert M. Barkley
IPC分类号： H01J49/00
CPC分类号： H01J49/0004 , G01N1/2813 , H01J49/0418
摘要： Disclosed are apparatus and methods for depositing solvent-free molecules on surfaces of samples, with particular application to imaging mass spectrometry. A vacuum chamber is configured to have controllable matrix translation apparatus for controlling the position of one or more solvent-free matrices within the chamber. Sublimation apparatus is used to sublimate molecules from the solid phase matrices. One or more samples are placed separately from the solvent-free matrices within the chamber. Condensation apparatus individually cools the samples to deposit sublimated molecules on the samples. Controllable sample translation apparatus is used to control the position of the samples within the chamber. Rotatable sample holding apparatus may be used to hold and move the samples to allow deposition of molecules on multiple samples at substantially the same time. Rotatable matrix holding apparatus may also be used to hold and move a plurality of matrices to create a homogenous mixture of molecules that are deposited onto one or more samples. As surface characterization system may be used to monitor deposition of the molecules to determine their thickness and roughness. A computer may be configured to control the matrix translation apparatus, the sublimation apparatus, the condensation apparatus, and the sample translation apparatus to provide for automated deposition of solvent-free molecules on the samples.
摘要翻译：公开了用于在样品表面上沉积无溶剂分子的装置和方法，特别适用于成像质谱法。真空室被配置为具有用于控制腔室内的一种或多种无溶剂基质的位置的可控矩阵平移装置。升华装置用于升华固相基质中的分子。将一个或多个样品与腔室内的无溶剂基质分开放置。冷凝装置分别冷却样品以将升华的分子沉积在样品上。可控样品转换装置用于控制室内样品的位置。可旋转的样品保持装置可用于保持和移动样品，以允许分子在基本上同时沉积在多个样品上。可旋转矩阵保持装置还可以用于保持和移动多个矩阵以产生沉积在一个或多个样本上的分子的均匀混合物。由于表面表征系统可用于监测分子的沉积以确定其厚度和粗糙度。计算机可以被配置为控制矩阵翻译装置，升华装置，冷凝装置和样品翻译装置，以提供样品上无溶剂分子的自动沉积。

8. 发明授权

US08846534B1 Process for CMP with large feature size variation 有权
标题翻译：具有大特征尺寸变化的CMP的工艺
公开(公告)号：US08846534B1
公开(公告)日：2014-09-30
申请号：US13269453
申请日：2011-10-07
申请人： Yunfei Li , Ge Yi , Dujiang Wan , Guanghong Luo , Lijie Zhao , Yanfeng Chen , Lily Yao , Ming Jiang
发明人： Yunfei Li , Ge Yi , Dujiang Wan , Guanghong Luo , Lijie Zhao , Yanfeng Chen , Lily Yao , Ming Jiang
IPC分类号： H01L21/302
CPC分类号： G11B5/3163
摘要： Embodiments of the present invention relate to reducing the size variation on a wafer fabrication. In some embodiments, at least a portion the backfill material over features larger than a threshold size is etched or milled to provide backfill protrusions over those features. The backfill protrusions are configured to reduce the size variation across the fabrication. Embodiments of the invention may be used in fabrication of many types of devices, such as tapered wave guides (TWG), near-field transducers (NFT), MEMS devices, EAMR optical devices, optical structures, bio-optical devices, micro-fluidic devices, and magnetic writers.
摘要翻译：本发明的实施例涉及减小晶片制造的尺寸变化。在一些实施例中，至少一部分覆盖材料超过阈值尺寸的特征被蚀刻或研磨以在这些特征上提供回填突起。回填突起构造成减小制造过程中的尺寸变化。本发明的实施例可用于制造诸如锥形波导（TWG），近场换能器（NFT），MEMS装置，EAMR光学装置，光学结构，生物光学装置，微流体设备和磁性作者。

9. 发明授权

US08721902B1 Method and system for providing an energy assisted magnetic recording writer having a heat sink and NFT 有权
标题翻译：用于提供具有散热器和NFT的能量辅助磁记录写入器的方法和系统
公开(公告)号：US08721902B1
公开(公告)日：2014-05-13
申请号：US13046380
申请日：2011-03-11
申请人： Zhongyan Wang , Wei Gao , Shawn M. Tanner , Mirzafer Abatchev , Yanfeng Chen , Yufeng Hu
发明人： Zhongyan Wang , Wei Gao , Shawn M. Tanner , Mirzafer Abatchev , Yanfeng Chen , Yufeng Hu
IPC分类号： B44C1/22
CPC分类号： G11B5/314 , G11B5/6088 , G11B2005/0021
摘要： A method provides an EAMR transducer. The EAMR transducer is coupled with a laser and has an ABS configured to reside in proximity to a media during use. The EAMR transducer includes an NFT for focusing the energy onto the media. A sacrificial layer is deposited on the NFT and a mask having an aperture provided on the sacrificial layer. A portion of the sacrificial layer exposed by the aperture is removed to form a trench above the NFT. A heat sink is then provided. At least part of the heat sink resides in the trench. The heat sink is thermally coupled to the NFT. Optical material(s) are provided around the heat sink. A write pole configured to write to a region of the media is also provided. The write pole is thermally coupled with the top of the heat sink. Coil(s) for energizing the write pole are also provided.
摘要翻译：一种方法提供一种EAMR传感器。 EAMR传感器与激光器耦合并且具有被配置为在使用期间驻留在介质附近的ABS。 EAMR传感器包括用于将能量聚焦到介质上的NFT。牺牲层沉积在NFT上，并且具有设置在牺牲层上的孔的掩模。被孔径暴露的牺牲层的一部分被去除以在NFT上方形成沟槽。然后提供散热器。散热片的至少一部分位于沟槽中。散热器与NFT热耦合。光学材料设置在散热器的周围。还提供了被配置为写入介质的区域的写入极。写柱与散热器的顶部热耦合。还提供用于激励写入极的线圈。

10. 发明授权

US08526275B1 Systems and methods for dissipating heat from a near-field transducer in an energy assisted magnetic recording assembly 有权
标题翻译：用于从能量辅助磁记录组件中的近场换能器散热的系统和方法
公开(公告)号：US08526275B1
公开(公告)日：2013-09-03
申请号：US13458949
申请日：2012-04-27
申请人： Hongxing Yuan , Zhongyan Wang , Wentao Yan , Yanfeng Chen , Matthew R. Gibbons , Zhong Shi
发明人： Hongxing Yuan , Zhongyan Wang , Wentao Yan , Yanfeng Chen , Matthew R. Gibbons , Zhong Shi
IPC分类号： G11B11/00
CPC分类号： G11B5/314 , G11B5/6088 , G11B2005/0021
摘要： Embodiments of the present invention are directed to a recording head for energy assisted magnetic recording. The recording head includes a near-field transducer (NFT) having a preselected shape and a surface, a writing pole on the NFT, and a non-metal heat dissipator positioned between the NFT surface and the writing pole. The non-metal heat dissipator includes a first portion in contact with the NFT surface, the first portion extending beyond an edge of the NFT surface in a first direction substantially perpendicular to an air bearing surface (ABS) and parallel to the NFT surface.
摘要翻译：本发明的实施例涉及一种用于能量辅助磁记录的记录头。记录头包括具有预选形状和表面的近场传感器（NFT），NFT上的书写杆和位于NFT表面和书写杆之间的非金属散热器。非金属散热器包括与NFT表面接触的第一部分，第一部分在大致垂直于空气轴承表面（ABS）并平行于NFT表面的第一方向上延伸超过NFT表面的边缘。

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