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    • 6. 发明申请
    • SINGLE MATCHING NETWORK FOR MATCHING MULTI-FREQUENCY AND METHOD OF CONSTRUCTURING THE SAME AND RADIO FREQUENCY POWER SOURCE SYSTEM USING THE SAME
    • 用于匹配多个频率的单一匹配网络和使用该方法的相同方法和无线电频率电源系统
    • US20120075033A1
    • 2012-03-29
    • US13239316
    • 2011-09-21
    • Liang OUYANGLei LiuXueming QianJinyuan Chen
    • Liang OUYANGLei LiuXueming QianJinyuan Chen
    • H03H7/38H01R43/00
    • H03H7/38H01J37/32183H03H2007/386Y10T29/49117
    • A single matching network is adapted to input at least two frequencies, which is used to selectively provide an RF power match at any one of the at least two frequencies to a plasma load, and the single matching network includes an input terminal connected to a multi-frequency input and an output terminal connected to the plasma load. A capacitor and an inductor connected in series with each other are provided between the input terminal and the output terminal to form a branch, the capacitance value of the capacitor is C0, and the inductance value of the inductor is Lo, wherein, the capacitance value C0 and the inductance value L0 satisfy the following relations: jω1L0+1/jω1C0=jy1 jω2L0+1/jω2C0=jy2 wherein, ω1=2πf1, ω2=2πf2, the f1 and f2 are respectively the two frequencies, y1 is the impedance required for the branch when achieving a matching state at frequency f1, and y2 is the impedance required for the branch when achieving a matching state at frequency f2.
    • 单个匹配网络适于输入至少两个频率,其用于选择性地将所述至少两个频率中的任一个处的RF功率匹配提供给等离子体负载,并且所述单个匹配网络包括连接到多个 频率输入和连接到等离子体负载的输出端子。 在输入端子和输出端子之间设置串联连接的电容器和电感器,以形成分支,电容器的电容值为C0,电感器的电感值为Lo,其中,电容值 C0和电感值L0满足以下关系:jω1L0+ 1 /jω1C0= jy1jω2L0+ 1 /jω2C0= jy2其中,ω1= 2&pgr; f1,ω2= 2&pgr; f2,f1和f2分别为两个频率,y1 是当在频率f1处实现匹配状态时分支所需的阻抗,并且y2是当在频率f2达到匹配状态时分支所需的阻抗。