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    • 3. 发明授权
    • Method for forming micro cavity
    • 微孔形成方法
    • US06342427B1
    • 2002-01-29
    • US09473968
    • 1999-12-29
    • Chang Auck ChoiChi Hoon JunWon Ick JangYun Tae Kim
    • Chang Auck ChoiChi Hoon JunWon Ick JangYun Tae Kim
    • H01L2100
    • B81C1/00047B81B2203/033B81C2201/0133B81C2201/0178B81C2203/0136
    • A method for forming a micro cavity is disclosed. In the method for forming the cavity, a first layer is formed on a silicon layer and a trench is formed in the silicon layer by selectively etching the silicon layer. A second and a third layers are formed on the trench and on the silicon layer. Etching holes are formed through the third layer by partially etching the third layer. A cavity is formed between the silicon layer and the third layer after the second layer is removed through the etching holes. Therefore, the cavity having a large size can be easily formed and sealed in the silicon layer by utilizing the volume expansion of the silicon or the poly silicon layer. Also, a vacuum micro cavity can be formed according as a low vacuum CVD oxide layer or a nitride layer formed on the etching holes which are partially opened after the thermal oxidation process by controlling the size of the etching holes concerning the other portion of the poly silicon layer.
    • 公开了一种用于形成微腔的方法。 在形成空腔的方法中,在硅层上形成第一层,并且通过选择性地蚀刻硅层,在硅层中形成沟槽。 在沟槽和硅层上形成第二和第三层。 通过部分地蚀刻第三层,通过第三层形成蚀刻孔。 在通过蚀刻孔除去第二层之后,在硅层和第三层之间形成空穴。 因此,通过利用硅或多晶硅层的体积膨胀,可以容易地在硅层中形成并密封具有大尺寸的空腔。 此外,可以根据在热氧化处理后部分打开的蚀刻孔上形成的低真空CVD氧化物层或氮化物层,通过控制与聚合物的其它部分相关的蚀刻孔的尺寸,形成真空微腔 硅层。
    • 9. 发明授权
    • Dissolved oxygen measurement system
    • 溶解氧测量系统
    • US08834692B2
    • 2014-09-16
    • US13218830
    • 2011-08-26
    • Han Young YuYark Yeon KimYong Ju YunWon Ick Jang
    • Han Young YuYark Yeon KimYong Ju YunWon Ick Jang
    • G01N27/26G01N27/30G01N27/407
    • G01N27/407
    • Provided is a dissolved oxygen measurement system. The dissolved oxygen measurement system includes a hydrogen storage device storing hydrogen, a first hydrogen fuel cell in which the hydrogen stored in the hydrogen storage device and water supplied from the outside in real time react with each other to generate first electricity energy, a water storage tank storing the water supplied from the outside, a second hydrogen fuel cell in which the water supplied from the water storage tank and the hydrogen stored in the hydrogen storage device react with each other to generate second electricity energy, and a control unit analyzing a difference between the first electricity energy and the second electricity energy.
    • 提供了一种溶解氧测量系统。 溶解氧测量系统包括存储氢的氢存储装置,第一氢燃料电池,其中存储在氢存储装置中的氢和从外部供应的水实时地相互反应以产生第一电能;储水器 存储从外部供应的水的储存器;第二氢燃料电池,其中从储水箱供应的水和储存在储氢装置中的氢彼此反应以产生第二电能;以及控制单元, 在第一电能和第二电能之间。