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    • 1. 发明授权
    • Apparatus for X-ray analysis with a simplified detector motion
    • 用于X射线分析的装置,具有简化的检测器运动
    • US06487270B1
    • 2002-11-26
    • US08637250
    • 1996-04-24
    • Walterus A. L. A. Van Egeraat
    • Walterus A. L. A. Van Egeraat
    • G01T136
    • G01N23/2076
    • An apparatus for X-ray analysis by means of a focusing optical system according to the Rowland geometry. The apparatus is arranged to operate with a fixed measuring channel, the X-ray detector (14, 16) occupying a fixed position. In order to compensate for mechanical tolerances and a spread in the period of the analysis crystal (12) (a multilayer mirror), it is necessary to rotate the crystal slightly, after which the X-ray beam to be analyzed is no longer completely incident on the detector (14, 16). In accordance with the invention, the analysis crystal (12) is readjusted by coupling the rotation of the crystal to a displacement of the crystal in conformity with the Rowland geometry. The detector need not be displaced for as long as the angle of incidence of the X-rays to be analyzed on the analysis crystal remains small, for example
    • 根据Rowland几何形状的通过聚焦光学系统进行X射线分析的装置。 该装置被布置成与固定测量通道一起操作,X射线检测器(14,16)占据固定位置。 为了补偿机械公差和分析晶体(12)(多层反射镜)期间的扩展,需要稍微旋转晶体,此后待分析的X射线束不再完全入射 在检测器(14,16)上。 根据本发明,通过将晶体的旋转与Rowland几何形状的晶体位移耦合来重新调整分析晶体(12)。 只要在分析晶体上要分析的X射线的入射角保持较小,例如<30°,则检测器不需要移位。 也可以选择待检查的其他波长,然后仅仅必须沿着通过入口狭缝的直线位移检测器。 与用于跟踪Rowland几何的精确检测器路径的机构相比,可以更容易地实现这种直线位移的引导。
    • 4. 发明授权
    • X-ray spectrometer with an analyzer crystal having a partly variable and
a partly constant radius of curvature
    • 具有分析器晶体的X射线光谱仪具有部分可变且部分恒定的曲率半径
    • US5914997A
    • 1999-06-22
    • US990215
    • 1997-12-12
    • Walterus A. L. A. Van Egeraat
    • Walterus A. L. A. Van Egeraat
    • G01J3/20G01N23/20G01N23/205G01N23/207G01N23/223G21K1/06G01N23/00
    • G01N23/20008G01J3/20G01N23/2055
    • An imaging optical system having a Rowland geometry can be used in a spectrometer for X-ray fluorescence. For the focusing of the X-ray beam emanating from the specimen to be analyzed use is made of a curved analyzer crystal 28 whose radius of curvature may be variable, as in the case of a crystal surface 29 in the form of a logarithmic spiral 40. If such an analyzer crystal is to be made sufficiently large so as to achieve adequate intensity in the X-ray detector, a part of the crystal would have to be given a radius of curvature which is smaller than permissible so as to avoid fracturing of the crystal. In accordance with the invention, a first part 40 of the reflective surface 29 has a radius of curvature which is dependent on the location on the crystal whereas another part 42 of the reflective surface has a constant radius of curvature 44. A crystal part having a constant radius of curvature exhibits angular deviations, but for as long as these angular deviations are smaller than a given (not very low) limit value, they can be ignored in relation to other, larger deviations of the log spiral part. Such larger deviations occur notably when a multilayer mirror is chosen for the analyzer crystal 28.
    • 具有Rowland几何形状的成像光学系统可用于X射线荧光的光谱仪中。 对于从要分析的样品发出的X射线束的聚焦,使用曲率分析器晶体28,其曲率半径可以是可变的,如在对数螺旋形40的形式的晶体表面29的情况下 如果要使这种分析器晶体足够大以在X射线检测器中获得足够的强度,那么晶体的一部分必须具有比允许的小的曲率半径,以避免压裂 水晶。 根据本发明,反射表面29的第一部分40具有取决于晶体上的位置的曲率半径,而反射表面的另一部分42具有恒定的曲率半径44.具有 恒定的曲率半径表现出角度偏差,但是只要这些角度偏差小于给定(非常低)的极限值,它们可以相对于对数螺旋部分的其他较大偏差而被忽略。 当为分析器晶体28选择多层反射镜时,这种较大的偏差显着出现。