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    • 1. 发明授权
    • Vacuum process for avoiding devitrification damage to transparent
slip-cast silica crucibles
    • 用于避免透明滑石粉坩埚失透的真空过程
    • US4072489A
    • 1978-02-07
    • US684730
    • 1976-05-10
    • Ted A. LoxleyWalter G. BarberWalter W. CombsJohn M. Webb
    • Ted A. LoxleyWalter G. BarberWalter W. CombsJohn M. Webb
    • C03B19/06C04B35/14C03B23/20C03B32/00
    • C04B35/14C03B19/06C03B19/066C03B20/00Y10S65/04Y10S65/08Y10S65/13
    • A process is disclosed for making vitreous silica crucibles of exceptional high quality for use in the growing of a silicon crystal from molten silicon. The crucibles are formed from fine particles of high purity fused silica by slip casting or other suitable process, are dried and fired to provide a rigid porous body, and are thereafter sintered to a high density, preferably to the transparent state. The invention solves the problem of spalling, blistering and cracking during crystal growing and the resulting contamination of the molten silicon, which has long plagued the industry, by eliminating water from the fused silica particles before the porous body is sintered to the transparent state. Said body is thoroughly dried in a vacuum furnace at a high temperature and at a sub-atmospheric pressure low enough to remove the chemically bound water which cannot be removed by heat alone. The crucibles of this invention retain their transparency and high quality without spalling or introducing microscopic particles of silica into the silicon, thereby making it possible to grow a silicon crystal of highest quality without dislocations and imperfections due to contamination by said particles.
    • 公开了一种制造用于从熔融硅生长硅晶体的高品质的玻璃状石英坩埚的方法。 坩埚由高纯度熔融二氧化硅的细颗粒通过滑移浇铸或其它合适的方法形成,被干燥和烧制以提供刚性多孔体,然后烧结成高密度,优选至透明状态。 本发明通过在将多孔体烧结至透明状态之前从熔融二氧化硅颗粒中除去水分,解决了在晶体生长过程中产生剥落,起泡和开裂以及长期困扰工业的熔融硅的污染问题。 所述体在真空炉中在高温和低于足够大的低于大气压的气压下彻底干燥,以除去不能单独加热除去的化学结合水。 本发明的坩埚保持其透明性和高质量,而不会将硅石的微小颗粒剥落或引入到硅中,从而使得可以生长最高质量的硅晶体,而不会由于所述颗粒的污染而发生位错和缺陷。