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1. 发明授权

US09465012B2 Measurement method using a sensor; sensor system and sensor 有权
标题翻译：使用传感器的测量方法; 传感器系统和传感器
公开(公告)号：US09465012B2
公开(公告)日：2016-10-11
申请号：US14364980
申请日：2012-12-14
申请人： Cambridge Enterprise Limited , University of Bolton
发明人： Andrew Flewitt , William Milne , Luis Garcia-Gancedo , Jack Luo
IPC分类号： G01N29/00 , G01N29/32 , G01N29/02 , G01N29/036 , G01N29/24
CPC分类号： G01N29/326 , G01N29/022 , G01N29/036 , G01N29/2437 , G01N2291/0426
摘要： Provided is a method for measurement of a change in environment at a sensor. The sensor has: a first layer formed of a piezoelectric material; a second layer formed adjacent the first layer and acoustically coupled with the first layer; and electrodes disposed to apply a driving signal to the first layer to generate bulk acoustic waves. The temperature coefficient of frequency of the first layer is different to that of the second layer. In the method, a first layer resonant frequency associated with the first layer and a combination resonant frequency associated with a combination of the first and second layers are detected. A shift in one or both of the first layer resonant frequency and the combination resonant frequency is detected. A portion of the shift caused by a temperature change at the sensor is identified. Another portion of the shift caused by an environmental change at the sensor other than the temperature change is identified. Also provided is a corresponding sensor and sensor system operable to carry out the method.
摘要翻译：提供了一种用于测量传感器的环境变化的方法。传感器具有：由压电材料形成的第一层; 与第一层相邻形成并与第一层声耦合的第二层; 以及电极，其设置成向第一层施加驱动信号以产生体声波。第一层的频率温度系数与第二层的温度系数不同。在该方法中，检测与第一层相关联的第一层谐振频率和与第一层和第二层的组合相关联的组合谐振频率。检测第一层谐振频率和组合谐振频率中的一个或两个的偏移。识别由传感器的温度变化引起的偏移的一部分。识别出除了温度变化以外的传感器环境变化引起的移动的另一部分。还提供了可操作以执行该方法的相应的传感器和传感器系统。

2. 发明申请

US20140331778A1 Identification of Environmental Sensor Changes and Temperature Sensor Changes with a Two Layer Bulk Acoustic Wave Resonator 有权
标题翻译：用双层体声波谐振器识别环境传感器变化和温度传感器变化
公开(公告)号：US20140331778A1
公开(公告)日：2014-11-13
申请号：US14364980
申请日：2012-12-14
申请人： Cambridge Enterprise Limited , University of Bolton
发明人： Andrew Flewitt , William Milne , Luis Garcia-Gancedo , Jack Luo
IPC分类号： G01N29/32 , G01N29/24
CPC分类号： G01N29/326 , G01N29/022 , G01N29/036 , G01N29/2437 , G01N2291/0426
摘要： Provided is a method for measurement of a change in environment at a sensor. The sensor has: a first layer formed of a piezoelectric material; a second layer formed adjacent the first layer and acoustically coupled with the first layer; and electrodes disposed to apply a driving signal to the first layer to generate bulk acoustic waves. The temperature coefficient of frequency of the first layer is different to that of the second layer. In the method, a first layer resonant frequency associated with the first layer and a combination resonant frequency associated with a combination of the first and second layers are detected. A shift in one or both of the first layer resonant frequency and the combination resonant frequency is detected. A portion of the shift caused by a temperature change at the sensor is identified. Another portion of the shift caused by an environmental change at the sensor other than the temperature change is identified. Also provided is a corresponding sensor and sensor system operable to carry out the method.
摘要翻译：提供了一种用于测量传感器的环境变化的方法。传感器具有：由压电材料形成的第一层; 与第一层相邻形成并与第一层声耦合的第二层; 以及电极，其设置成向第一层施加驱动信号以产生体声波。第一层的频率温度系数与第二层的温度系数不同。在该方法中，检测与第一层相关联的第一层谐振频率和与第一层和第二层的组合相关联的组合谐振频率。检测第一层谐振频率和组合谐振频率中的一个或两个的偏移。识别由传感器的温度变化引起的偏移的一部分。识别出除了温度变化以外的传感器环境变化引起的移动的另一部分。还提供了可操作以执行该方法的相应的传感器和传感器系统。

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