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    • 2. 发明申请
    • OPTICAL SYSTEM
    • 光学系统
    • US20050018269A1
    • 2005-01-27
    • US10708183
    • 2004-02-13
    • Markus WeissUlrich Haag
    • Markus WeissUlrich Haag
    • G03F7/20G02B26/08
    • G03F7/70308G03F7/70258G03F7/70891
    • An optical system, for example a projection exposure apparatus for microlithography, has at least one optical element with an optical surface. A correction radiation device is provided that includes at least one correction radiation source for emitting correction radiation. A scanning device has at least one scanning mirror that is irradiated by the correction radiation and driven in such a way that a defined portion of the optical surface of the optical element is scanned with the correction radiation. This results in a correction of imaging characteristics of the optical element by means of heat which is supplied to the optical element by the correction radiation.
    • 光学系统,例如用于微光刻的投影曝光装置,具有至少一个具有光学表面的光学元件。 提供了一种校正辐射装置,其包括用于发射校正辐射的至少一个校正辐射源。 扫描装置具有至少一个由校正辐射照射的扫描镜,并以这样一种方式驱动,使得光学元件的光学表面的限定部分用校正辐射扫描。 这导致通过校正辐射提供给光学元件的热量校正光学元件的成像特性。
    • 5. 发明申请
    • Device for forming a peripherally closed hollow profiled element by means of fluidic internal high pressure
    • 用于通过流体内部高压形成外围封闭的中空型材元件的装置
    • US20070107480A1
    • 2007-05-17
    • US10576081
    • 2004-09-16
    • Kai-Uwe DudziakUlrich HaagStephen KuschelHeinz-Ruediger OtteStefan Schwarz
    • Kai-Uwe DudziakUlrich HaagStephen KuschelHeinz-Ruediger OtteStefan Schwarz
    • B21J5/04
    • B21D26/045
    • The invention relates to a device for forming a peripherally closed hollow profiled element (1) by means of fluidic internal high pressure. The device contains an axial plug (4) for sealing off the hollow profiled element (1) on the end face, said axial plug possessing an axial passage duct (5) supplying pressure fluid. The axial plug (4) has a sealing body which possesses on its end face (19) a trough-like depression (20), the peripheral wall (21) of which can be spread open radially elastically, within the hollow profiled element (1), by means of pressure fluid, until said wall comes to bear sealingly against the inner wall (22) of the hollow profiled element (1). To maintain the sealability of the device permanently, the axial plug (4) is to have a plug head (8), formed by an annular collar (10) and a narrowed extension (11) adjoining the latter toward the end face (7) of the head (8), and, on its plug body (9), a radial peripheral stop for bearing against the closing edge (12) of the hollowed profiled element end (13). The sealing body, designed as a sealing ring (17), is fixed on the extension (11), the margin (28) of the annular collar (10) projecting peripherally beyond the outside (27) of the sealing ring (17) at least one point in the radial direction.
    • 本发明涉及一种用于通过流体内部高压形成外围封闭的中空型材元件(1)的装置。 该装置包括用于密封端面上的中空型材元件(1)的轴向插头(4),所述轴向插塞具有供应压力流体的轴向通道导管(5)。 轴向插头(4)具有密封体,该密封体在其端面(19)上具有槽状凹部(20),该凹槽可以在中空型材元件(1)内径向弹性地展开 ),通过压力流体,直到所述壁密封地抵靠中空型材元件(1)的内壁(22)。 为了永久地保持设备的密封性,轴向插头(4)具有由环形套环(10)形成的插塞头(8)和与端子(7)相邻的插入头(11)的狭窄延伸部(11) 的头部(8),并且在其塞体(9)上具有用于抵靠中空的异形元件端部(13)的闭合边缘(12)的径向外周止动件。 被设计为密封环(17)的密封体固定在延伸部(11)上,环形套环(10)的边缘(28)周向地突出超过密封环(17)的外部(27) 径向方向最少一点。
    • 6. 发明授权
    • Optical system
    • 光学系统
    • US06912077B2
    • 2005-06-28
    • US10708183
    • 2004-02-13
    • Markus WeissUlrich Haag
    • Markus WeissUlrich Haag
    • G03F7/20G02B26/08
    • G03F7/70308G03F7/70258G03F7/70891
    • An optical system, for example a projection exposure apparatus for microlithography, has at least one optical element with an optical surface. A correction radiation device is provided that includes at least one correction radiation source for emitting correction radiation. A scanning device has at least one scanning mirror that is irradiated by the correction radiation and driven in such a way that a defined portion of the optical surface of the optical element is scanned with the correction radiation. This results in a correction of imaging characteristics of the optical element by means of heat which is supplied to the optical element by the correction radiation.
    • 光学系统,例如用于微光刻的投影曝光装置,具有至少一个具有光学表面的光学元件。 提供了一种校正辐射装置,其包括用于发射校正辐射的至少一个校正辐射源。 扫描装置具有至少一个由校正辐射照射的扫描镜,并以这样一种方式驱动,使得光学元件的光学表面的限定部分用校正辐射扫描。 这导致通过校正辐射提供给光学元件的热量校正光学元件的成像特性。
    • 8. 发明申请
    • Method and device for joining a planar component to a hollow section
    • 用于将平面部件连接到中空部分的方法和装置
    • US20060151577A1
    • 2006-07-13
    • US10524588
    • 2003-07-24
    • Kai-Uwe DudziakUlrich HaagStefan Schwarz
    • Kai-Uwe DudziakUlrich HaagStefan Schwarz
    • B23K20/12B23K31/02
    • B21D39/00B21D39/034
    • In a method and a device for joining a plane component to a hollow section, the component and the hollow section are inserted in an internal high pressure forming tool so as to be positioned in relation to each other and are connected through the subsequent aid of a fluidic high internal pressure in the hollow section. In order to achieve a connection between the plane component and the hollow section in a simple and process-controlled manner, while the high internal pressure is applied, the walls of the hollow section and the component, which rest against and are supposed to be connected with each other, are pressurized by a die that is integrated in the forming tool. The wall of the hollow section is punched so that the created slug is attached in a positive bonding manner to one area of the hole edge and increase in terms of its width towards its free end. A section in the form of a link, which has the same shape as the slug, is bent out of the wall of the component into the hollow section in a position that undercuts the hole edge of the hollow section.
    • 在用于将平面部件接合到中空部的方法和装置中,部件和中空部分插入到内部高压成形工具中,以便相对于彼此定位并且通过随后的辅助 中空部分流体高内压。 为了以简单和过程控制的方式实现平面部件和中空部分之间的连接,在施加高内部压力的同时,中空部分的壁和部件抵靠并应该连接 彼此之间通过集成在成形工具中的模具加压。 中空部分的壁被冲压,使得所产生的块塞以正接合的方式附接到孔边缘的一个区域,并且在其宽度方向上朝其自由端增加。 具有与塞子相同形状的连杆形式的部分从中空部分的壁部弯曲到中空部分的孔边缘的位置。