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    • 5. 发明授权
    • Coating film
    • 涂膜
    • US06627559B2
    • 2003-09-30
    • US09911300
    • 2001-07-23
    • Toyohiko Shindo
    • Toyohiko Shindo
    • H01L21469
    • C23C16/4405C09D183/16C23C18/1212C23C18/122C23C18/1279Y10T428/12528
    • The present invention provides a coating film, which is not likely to cause cracks on the coated surface and is also capable of improving the resistance of the coated surface, especially oxidation resistance, corrosion resistance, and gas permeation resistance, a member provided with the coating film, and a method for producing the coating film. In the coating film of the present invention, a dense layer containing silicon dioxide as a principal component, which is obtained by heat-treating a solution containing perhydropolysilazane and polyorganosilazane, a ratio of the content of perhydropolysilazane to the total amount of polysilazane including perhydropolysilazane and polyorganosilazane being from 0.65 to 0.95, in air or air containing water vapor, was formed on the surface of a stainless steel plate. According to the present invention, it becomes possible to prevent cracks from occurring on the surface of the base and to prevent oxidation due to a high-concentration acidic substance, and thus the corrosion resistance and gas permeation resistance can be prevented.
    • 本发明提供一种不会在涂布面上产生裂纹的涂膜,也能够提高涂布面的电阻,特别是抗氧化性,耐腐蚀性和耐气体渗透性,具有涂层的部件 膜,以及涂膜的制造方法。 在本发明的涂膜中,通过对含有全氢聚硅氮烷和聚有机硅氮烷的溶液进行热处理而得到的含有二氧化硅作为主要成分的致密层,全氢聚硅氮烷的含量与聚硅氮烷的总量的比例包括全氢聚硅氮烷和 在不锈钢板的表面上形成含有水蒸气的空气或空气中的0.65〜0.95的聚有机硅氮烷。 根据本发明,可以防止在基体表面产生裂纹,并且防止由于高浓度酸性物质引起的氧化,从而可以防止耐腐蚀性和耐透气性。